Electric Actuators

Two mounting styles Table traveling accuracy C D Bottom mount Top mount Model Traveling accuracy C side against A side D side against B side LG1H 0.1 or less 0.1 or less A B Variations Mounting orientation Lead screw type Motor type Guide type Motor/Screw connection Series Standard motor [Tamagawa Seiki Co., Ltd.]

D. P. Lube (Unit) Series ALD(U)600/900

3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

Vacuum Equipment

Calculation D n W P t : Vacuum pressure (kPa) : Safety factor horizontal lifting: 4 or more vertical lifting: 8 or more : Pad diameter (mm) : Number of pads per workpiece : Lifting force (N) D = x x x t x 1000 1 P 4 3.14 W n Selection Graph After establishing the workpiece weight, number of pads to be used, and the vacuum pressure when adsorbing the workpiece, the pad diameters for horizontal

Compact and Lightweight

ZA A B t 2 x D ZX C ZM ZL ZH ZH ZH ZH -X267 ZH13 to 20DA 2 x D B ZHP A F E C ZU VQD-V Long clamping screw set for 1 station required for assembly needs to be ordered separately.

AC Servo Motor Driver (Pulse input type)

No Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 65536 114688 32768 65536 Electronic gear denominator *3 PA07 1 250 125 125 125 250 125 125 Regenerative option PA02 0 0 (Non)/ 0002 (LEC-MR-RB-032)/ 0003 (LEC-MR-RB-12) 1 Rotation direction selection *4 PA14 0 0 (+Counter motors side ) (+Counter motors side

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Mass (g) D-B30 D-B30J D-B31 D-B31J D-B35 D-B35J Auto switch model 190 250 190 250 190 250 0.5 Lead wire length (m) Auto Switch Internal Circuit 3 368 368 368 D-B30 5 462 462 462 Contacts protection resistance Brown (Terminal 1) Blue (Terminal 2) Contacts (Magnetism detection) Lead wire length In case of the grommet type (J type), the lead wire length is 0.5 m.

Solid State Auto Switches

D-B31 D-B31J D-B35 D-B35J Auto switch model 190 190 190 None 0.5 m (Nil) 250 250 250 Lead wire length D-B31 3 m (L) 268 268 268 5 m (Z) 462 462 462 Contacts protection resistance () () Reed switch Neon bulb Current limiting resistance Lead wire length In case of the grommet type (J type), the lead wire length is 0.5 m.

LX

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.

LX

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.

HRL

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 250 x 4.186 x 103 x 12 900 = = 13953 [J/s] 14.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 14.0 [kW] x 1.2 = 1 x 250 x 60 x 1.0 x 103 x 12 15 x 860 16.8 [kW] = Thermo-chiller Q x t: Heat capacity [kJ] 13953 [W] = 14.0 [kW] Water bath 20C Cooling capacity = Considering

Table of Contents

L1 L2 M D I.D.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

DZ/Y/YZ VFS1320-D/DZ/Y/YZ VFS1420-D/DZ/Y/YZ VFS1520-D/DZ/Y/YZ Lead wire O.D.

MU

switch model D-A7H D-A80H D-F7 D-F7V D-J79 D-F7W D-F7WV D-J79W D-F7BAL D-F7BAVL D-F79F D-A7H D-80H D-F7 D-J79 F-F7W D-79W D-F7NTL D-F79F D-F7BAL D-A73C D-A80C D-J79C D-A79W D-P5DWL Equivalent bore size (mm) D-F7NTL D-A7 D-A80 D-A73C D-A80C D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A7 D-A80 D-P5DWL CUJ A 4.5 (7) 4.5 (7) 5 (10) 6.5 (11.5) 7 (12) A 10 (12.5) 10 (12.5) 10.5 (15.5) 12 (17) 12.5 (

MU

Its Mounting Height Proper Auto Switch Mounting Position Auto Switch Mounting Height Auto switch model D-A7H D-A80H D-F7 D-F7V D-J79 D-F7W D-F7WV D-J79W D-F7BAL D-F7BAVL D-F79F D-A7H D-80H D-F7 D-J79 F-F7W D-79W D-F7NTL D-F79F D-F7BAL D-A73C D-A80C D-J79C D-A79W D-P5DWL Equivalent bore size (mm) D-F7NTL D-A7 D-A80 D-A73C D-A80C D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A7 D-A80 D-P5DWL CUJ A

3 Position Cylinder Series RZQ

D-F7W D-J79W D-F7BAL D-F79F D-F7NTL D-M9 D-M9W D-M9AL D-F7 D-J79 D-A9V D-A80 D-A73C D-A80C D-M9WV D-M9AVL D-F7WV D-F7BAVL D-M9V D-F7V D-J79C D-P4DWL D-A7H D-A80H D-A9 D-A79W Number of auto switches 5 10 5 10 15 15 15 20 15 1 pc.

Stability of suction position,

D 32 50 53.5 17 D D 40 32.6 14.91) 3 15 2.5 4 22.61) 5 19.7 30 (Rotating angle) 30 (Rotating angle) 66 63 53 50 D-D D-D 22 14 16 26 7 11 Dimensions Dimensions Model A B Weight [g]/Pad material N/U/CL S F ZP3E-YF50UMJB10 74.6 118.6 221 220 227 ZP3E-YF50UMJB30 99.6 143.6 237 236 243 ZP3E-YF50UMJB50 119.6 163.6 250 249 255 Model A B Weight [g]/Pad material N/U/CL S F ZP3E-YF63UMJB10 105 165

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

JIS symbol Auto switch model D-A3, D-A44 D-G39, D-K39 D-A5, D-A6, D-A59W, D-F5, D-J5 D-F5W, D-J59W, D-F5NT, D-F5BA, D-F5F D-B5, D-B6 Bore size (mm) 40 50 63 80 100 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA-04 BA-05 BA-08 BA-10 BT-04 BT-06 BT-06 BT-08 BT-08 Standard Strokes Bore size (mm) Standard strokes (mm) 40 50 63 80 100 125 160 25 to 1000 25 to 1000 25 to 1000 25 to 1300 25 to 1500

•

D-Y7P D-A3D DF5 . modsl . gIM fc1iv .. ' 5[ ~F D-M9DWV D-Y7PV D-G39 D-A44 D--A6D D-J59W O-Y70W D-F5BAL .. , I 'Di M90 W DM9DAVL D-K39 D-A59W O-Y70WV D-F59F .

CJ2X/CUX/CQSX/CQ2X/CM2X

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

VZS

from D side as the 1st one.