Uniaxial Electric Actuator Series LJ1

2 4 6 8 10 0 1 2 3 4 5 Work load (W) kg Work load (W) kg Work load (W) kg 300 30 150 L2 200 20 M2 100 L2 mm L2 mm L2 mm W 100 10 50 L2 M2 0 10 30 20 0 1 2 3 4 5 0 2 4 6 8 10 Work load (W) kg Work load (W)kg Work load (W) kg 30 300 150 a=500 a=500 a=500 Horizontal/Lateral a=1000 a=1000 a=1000 20 200 100 a=2000 a=2000 L3 mm L3 mm L3 mm a=2000 L3 100 10 50 W M3 a 0 1 2 3 4 5 0 10 30 20 0 2

AN

(Ex.: AN200-N02) AN600-10 270 1 1 1 AN700-12 440 1 4 AN800-14 590 1 2 AN900-20 960 2 Note) NPT thread is also available. Specify N after ANm00-.

IDX-OM-W020

. 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 5 . 5-1 IDFB Series 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-5 6-5 . 6-7 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 R 9-1 . 9-1 9-2 . 9-1 9-3 . 9-1 10 S 10-1 . 10-1 10-2 . 10-1 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 12 V 12-1 . 12

Miniature Guide Rod Cylinder Series MGJ

Table a Standard strokes Table b Intermediate stroke (by the 1 mm stroke) Bore size (mm) Applicable stroke (mm) 1 to 15 (Spacer type) 1 to 20 (Spacer type) Bore size (mm) Standard stroke (mm) 5, 10, 15 5, 10, 15, 20 6 10 6 10 Model no.: MGJ6-9 Installing a 1 mm width spacer for MGJ6-10 External size: same as MGJ6-10 Example Minimum stroke for auto switch mounting is 4 mm.

Process Valve

Note) A: Non-locking push type A (projecting) 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 4 Note 2) 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Valve size 1 to 4 10 5 6 Note 2) Note) B: Slotted locking type B (tool required) 7 Note 2) 2 15 Note 1) CE-compliant: For D or DZ only Note 2) Semi-standard Note 3) For other rated voltages, please consult with SMC. 3 20 25

Guide Table Series MGF ø40, ø63, ø100 1

50 40 50 40 MGF63 Load weight m0 (kg) Load weight m0 (kg) MGF63 Load weight m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) How to read the graph 1) When the load

VQ

Wire color Black Brown Red Orange Yellow Pink Blue Violet Gray White White Yellow Orange Yellow Pink Blue Violet Gray Orange Red Dot marking VQ 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 4 1 5 10 VQZ 16 11 20 17 VZ Multi-connector pin arrangement DIN rail mounting bracket VS White Black Black Red Red Red Black Black White Pin No. 1 SOL. 1 station SOL. 2 stations 2 SOL. 3 stations

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Lead wire length: 1000 mm ZM-K1LO . 1 pc. VJ10-36-1A-10 . 2 pcs.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

12 2 x 2 x M6 x 1.0 effective depth 10 2 x 5.4 through 52 12 1 28 40 Flat washer 10 10 7 7 28 42.5 + Stroke 5 40 47.5 + Stroke Note 1) Standard strokes available in 5 mm increments.

Rotary One-touch Fittings Manifold Series KM

-06-08-01S-3 33 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5 76.5 77 78 41 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 1 4 3 8 1 2 10 6 KM14-06-10-02S-3 44 45 67 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 10 8 KM14-08-10-02S-3 48 88 89 90.5 94 95 98.5 19 71 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19

Ejector Valve Unit Series ZYY/ZYX 1

ZSE1-00-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 Model -X129 (-X130) -X129 (-X130) -X129 (-X130) -X129 (-X130) -X129 (-X130) -X129 (-X130) -X129 (-X130) Sensor type Diffusion type semiconductor pressure sensor Set pressure range 0 to 101 kPa Hysteresis 1 to 10% of set pressure (Adjustable) 3% full span or less (Fixed) 1 to 10% of set pressure (Adjustable) 1% full



size P , A port R port Body size Port 01 02 02 03 04 04 06 10 10 12 14 20 Nil 01 02 8 1 1 4 1 4 1 3 8 3 Body ported Base mounted 2 1 2 1 5 4 3 1 1 1 1 2 4 1 1 7 4 1 2 1 9 2 Without sub-plate 8 1 2 4 1 Option Description Part no. 0 3 0 3 0 3 0 3 0 3 0 3 VEX1A33 VEX1B33 VEX113 VEX123 VEX133 VEX153 VEX173 VEX193 B Bracket (With bolt and washer) VEX1-18-1A VEX1-18-1A VEX3-32A VEX5-32A VEX7-

VP3145/3165/3185

0.47 5.4 23 0.32 6.2 21 0.39 5.8 28 0.36 7.6 26 0.35 7.0 VP3145 3 4 1.5 Weight (kg) Port size Effective area (mm2) Valve model Grommet 1 (IN), 2 (OUT) 3 (EXH) 1 2 (IN OUT) 230 280 310 570 650 650 2 3 (OUT EXH) 280 310 330 650 670 670 3 4 1 4 1 2.0 VP3165 1 1 4 1 1 4 1 VP3185 2.8 1 2 1 2 2 For grommet Conduit terminal +0.2 kg 4-10-2 3 Large Size 3 Port Solenoid Valve Rubber Seal Series

ZB-OM00301

10 ZB1-VPN3A KJ H 04 04 C2 2 H 02 2 C4 4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Relation of Operating Temperature and Maximum Operating Pressure Particulate Generation Grade Classifications 1.2 10 Average particle concentration Particles/ft Grade 4 Max. operating pressure MPa 1.0 10 0.8 Grade 3 10 0.6 10 Grade 2 10 0.4 Grade 1 100.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 1 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06

KB

KBE1-04 KBE1-06 KBE2-06 KBE2-08 KBE2-10 KBE3-08 KBE3-10 KBE3-12 KBE4-12 15.0 15.5 17.0 15.5 15.5 19.5 31.5 32.0 33.5 35.5 38.0 39.5 41.0 42.0 41.5 14 14 34.5 35.5 37.5 39.0 41.5 43.5 45.0 46.0 44.0 17.9 27.0 26.0 29.5 57.5 51.6 63.0 83.4 66.6 M12 X 1 16.0 4 13.6 17 6 M14 X 1 17.0 17 17.6 M16 X 1 M20 X 1 M16 X 1 M20 X 1 19 24 19 24 18.5 21.0 18.5 21.0 8 10 8 10 22 25.2 18.5 22.0 12 M22 X 1

IDX-OM-W094

-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDFA60/70/80/90 Series IDX-OM-W094 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-5 8 A . 8-1 8.1 . 8-1 8.2 . 8-1 8.3 . 8-1 8.4 . 8-1 8.5 . 8-2 9 C . 9-1 9.1 . 9-1 9.2 . 9-1 10 L . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 10.4 . 10-2 11 R . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 .

Stainless Steel Heat

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8 Series IDUS/IDFS Safety Instructions These safety instructions are intended to prevent a hazardous situation and/

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

(Atmospheric conditions) 1.3 x 10-7 Pam3/sec Leakage:1.3 x 10-7 Pam3/sec or less (at normal temperatures, excluding gas permeation) 0.1 MX Note 1) This data indicates deterioration with age of the average number of particles per operation under the following test conditions. 5.0 10-7 Particulate generation [particles/cycle] Standard value Note 1) The data indicates the leakage measured in

IDX-OM-W053

5-1 . 5-1 6 6-1 . 6-1 6-2 . 6-2 6-3 . 6-3 6-4 . 6-4 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 1 8 C 8-1 . 8-1 8-2 . 8-1 8-3 . 8-1 9 G 7-1 . 9-1 10 H 10-1 . 10-1 10-2 . 10-1 11 K 11-1 . 11-1 11-2 . 11-1 12 L 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 13 R 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 14-5 .