This is a legacy product, and replaced byVQ5301-51 VQ5000 VALVE, SOL 5 PORT. VALVE, 3 POSITION, PLUG-IN(DC). VALVE. VQ5000 BASE MT NO SIZE RATING. 1.40013 lb. 2F.

This is a legacy product, and replaced byVQ5401-51 VQ5000 VALVE, SOL 5 PORT. VALVE, 3 POSITION, PLUG-IN(DC). VALVE. VQ5000 BASE MT NO SIZE RATING. 1.37367 lb. 2G.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

Air-hydro CA2H Air-hydro CA2WH Auto switch Made to order Precautions H1 AL Width across flats B1 Width across flats of hexagon hole WB 2-cushion valve A N F K N B C M H S + Stroke ZZ + Stroke With rod boot e 9 l f h + l ZZ + l + Stroke (mm) HN Stroke range Bore size (mm) B C (MAX) P A AL B1 D DL E F G H H1 HR J K KA M MM MO N RF S WB WL ZZ 40 50 63 80 100 up to 500 30 27 60 22 44 16 13 32 10 15 51

MXF

state auto switch (2-wire, 3-wire) MXS MXQ +1 0 mm Stroke length tolerance Extension end 5 mm/Retraction end 5 mm Stroke adjustment range MXF MXW IN MXJ OUT Theoretical Output (N) MXP Operating pressure (MPa) Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction 0.7 0.6 0.5 0.4 0.3 0.2 MXY OUT 50 35 30 25 20 15 10 8 4 IN 38 27 23 19 11 15 8 MTS 79 68 57 34 45 23 OUT 113 12 6 60 51

Vacuum Pad, without Buffer. 51 lb.

Vacuum Pad, without Buffer. 51 lb. M30.

Vacuum Pad, without Buffer. 51 lb.

Vacuum Pad, without Buffer. 51 lb. M30.

Vacuum Pad, with Buffer. 51 lb. M30.

Vacuum Pad, with Buffer. 51 lb. M30.

Vacuum Pad, with Buffer. 51 lb. M30.

This is a legacy product, and replaced byVQC1101-51 VQC1000 SOL VALVE 5-PORT. VALVE, SGL SOL, PLUG-IN *LQA. VALVE. VQC1000 BUILT IN FITTING

Model: 51 (Bottom Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Stations: 8 Stations, P,E Port Location: D (D Side), A,B Port Size: 02 (1/4)

Model: 51 (Bottom Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Stations: 6 Stations, P,E Port Location: D (D Side), A,B Port Size: 02 (1/4)

Compact Slide ø 6, ø 10, ø 16, ø 20 MXH Series

pin hole additionally -XC79 -XB13 Low speed cylinder (5 to 50 mm/s) Theoretical Output -XC3 Special port location (N) -XC19 Intermediate stroke (Spacer type) Piston area (mm2) Operating pressure (MPa) Rod size (mm) Bore size (mm) Operating direction -XC22 Fluororubber seal 0.3 0.5 0.7 19 14 OUT 8 28 3 6 14 10 IN 6 21 55 39 OUT 23 78 4 10 46 33 IN 19 66 141 101 OUT 60 201 6 16 121 86 IN 51

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

MGQ MGG Theoretical Output MGC OUT IN [N] MGF Bore size [mm] Rod size [mm] Operating direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGZ 12 6 OUT 113 23 34 45 57 68 79 90 102 113 -XC79 Tapped hole, drilled hole, pinned hole machined additionally -XC82 Bottom mounting type -XC85 Grease for food processing equipment IN 85 17 25 34 42 51 59 68 76 85 MGT

ALF400 to 900, ALT-5/-9

AV AU AF AR ALF500/600 IR Port size D VEX AMR ITV IC Model Port size VBA C D A B , 1 4 3 8 1 2 , ALF400 ALF400-06 ALF500 ALF600 ALF800 ALF900 80 85 90 100 100 100 238.5 246.5 295.5 319.5 338.5 344.5 44 46 48 51 59 63 VE 3 4 1 3 4, 1 1 1 1 4 1 2 , 2 VY1 G Dimensions: Auto Feed Tank PPA AL Float switch Contact point capacity: AC: 15 VA, DC: 15 W Contact point construction: 1a, 1b Width across

This is a legacy product, and replaced byVQ5101R-51 VQ5000 VALVE, SOL 5 PORT. VALVE, SGL SOL, PLUG-IN (DC). VALVE. VQ5000 BASE MT NO SIZE RATING. 1.32277 lb. 2D.

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Display Unit for Deionized Water and Chemicals (4-channel Controller) PF2D200/201 40.1 (7.5) 40 6 2.5 L L/min 36.8 OUT1 CH FLOW SMC SET Sensor connector (option) Front protective cover + Panel mounting 53 9.4 (2) 47 42.4 46.4 Panel mounting adapter Front protective cover Waterproof seal Panel 55 or more 37.5 +0.1 -0.2 55 or more Panel fitting dimensions Applicable panel thickness: 0.5 to 8 mm 51