MQQ

Q G RS H A Bore size (mm) LC LH LS LT LX LY Z ZZ X S LZ Y RZQ 10 5.5 14 83 2.3 33 25 19 108 6 65 42 9 16 5.5 18 92 2.3 42 30 21 119 6 74 54 9 MI W S 20 6.8 25 137.5 3.2 40 40 20.5 166 8 97.5 55 20 25 6.8 28 142.5 3.2 40 47 24.5 175 8 102.5 55 20 CEP1 CE1 Rod side flange style: MQMLF 6 CE2 20 ML2B 2.3 C J G5-S 33 42 27.5 2-5.5 66 + Stroke 93.5 + Stroke CV MVGQ 10, 16, 20, 25 CC RB FY J FT

MQQ

Dimensions Foot style: MQMLL 6 25 14 33 42 18.5 2.3 6 9 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke RE A B REC 10, 16, 20, 25 CX CY LY LH MQQ M X X Y Y LX LZ Z 4-LC S + Stroke LS + Stroke ZZ + Stroke LT RHC MK(2) RS Q G RS H A Bore size (mm) LC LH LS LT LX LY Z ZZ X S LZ Y RZQ 10 5.5 14 83 2.3 33 25 19 108 6 65 42 9 16 5.5 18 92 2.3 42 30 21 119 6 74 54 9 MI W S 20 6.8 25 137.5 3.2 40 40

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

1u @7 @6 q!7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

Single Axis Electric Actuator Series LJ1H

8kg 10kg Speed (mm/s) Speed (mm/s) 250 250 LJ1H10 Model Mounting orientation 10kg 200 200 Load movement direction 150 150 600 100 100 400 L1 (mm) a = 1000 Pitching Yawing Vertical Vertical 50 50 m a a = 2000 200 a = 3000 0 100 200 300 400 500 0 100 200 300 400 500 L1 Mep Stroke (mm) Stroke (mm) 0 2 4 6 8 10 When an actuator is operated under conditions that exceed the lines in the graphs

Possible to transfer a workpiece at low-speed.

A S 3H9 effective depth 2 3H9 effective depth 2 TD 0.6 TC (mm) D (g6) DD (h9) AU A B BA BB BC BD BU H Size Rotation angle 10 15 90, 180 29 12 18 42.4 (8.5) 8.5 17 6.7 2.2 16.7 5 90, 180 31 14 20 53.6 (9.5) 9 26.4 10.6 23.1 6 DW Q S US UW ab M TA TC TD Rotation angle Size 90 56 10 4.5 17 35 44 6 9 15.5 8 15.4 180 69 90 65 15 5.5 20 40 50 7 10 16 9 17.6 180 82 The AU dimension is not the

25

cartridge) 6 6 5 5 Discharge time (s) Discharge time (s) 4 4 30 Hz 1 Hz 30 Hz 3 3 1 Hz 2 2 1 1 Sensing AC Sensing AC 0 0 2,000 0 500 1,000 1,500 0 500 1,000 1,500 2,000 Installation distance (mm) Installation distance (mm) 418 Technical Data IZS40/41/42 Series IZS IZS IZS42 1) Without air purge IZN 0 2 4 6 8 10 12 14 16 18 20 IZF 1 Hz 30 Hz Discharge time (s) ZVB IZD IZE IZH 0 50 100 150

RB/RBL/RBQ

72.1 72.1 73.2 104.5 12 12 18 25 96.6 97.6 105.2 152.5 13.5 13.5 17 23 19 19 27 36 21.9 21.9 31.2 41.6 6 6 6 6 MVGQ CC Note) L, LL and S dimensions of RBL(C)1007/1006 are different from those of RB(C)1007/1006.

LEF-OM002xx

10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 LECPA Horizontal Transfer 50 12 B B 20 B 10 A A 40 W(kg) A W(kg) H H W(kg) 15 8 30 6 10 20 4 10 5 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25

MLGP

7 8 9.5 10 D-Y7BAL 5 5 6 6 6 6 6 6.5 CL D-P5DWL 4 4 5 4 4 Since this is a guideline including hysteresis, not meant to be guaranteed.

MLGP

7 8 9.5 10 D-Y7BAL 5 5 6 6 6 6 6 6.5 CL D-P5DWL 4 4 5 4 4 Since this is a guideline including hysteresis, not meant to be guaranteed.

SFOD-OMT0005CN

(5) (1) 2 (3) (4) () ON OFF BUSY SVRE ON SETON (7) INP 0mm/s -57- 14 14.1 [5m ] (1) (2) LE CP A B-1 2 (L) A A-1 1 B B-2 6 1 1.5m B A-2 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield (3) Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 S 9 B A-6 8 3 (14.2) (2) 2 1 (8) (1) B1 A1 (14) (18) (17.7) 5 6 (3) 2 1 A6 B6 15 16 L (11) (30.7) 14.2 [820m] LE-CP(1) (2) * * A B-1

Compact Manifold Regulator

Knob Position Symbol Position Knob position Knob position Knob position Front Top Bottom 56 A B C Top Front Bottom 84 42 84 70 70 6 26 (Max.28) P U S SMC SMC H L 6 O C K SMC SMC 28.5 51.5 6 51.5 80 13 OUT IN 3 28 13 13 OUT IN OUT IN 3 3 2. OUT Piping Position 3.

Auto Switch Guide

M2.5 x 4l Slotted set screw Indicator light ML2B 8 3.2 DC (+) Brown 2.6 2 4.6 4 C J G5-S 2.7 4 2.8 Most sensitive position 6 2.8 22 500 (3000) 20 2.7 CV OUT Black 3.2 2.6 DC () Blue MVGQ 9.5 6 Most sensitive position 22 500 (3000) 4 D-M9B, D-M9BV CC Precautions OUT (+) Brown RB Be sure to read before handling.

Fieldbus System

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

MGP

XAH7 depth 6 WB Q GB 37.5 + Stroke C + Stroke WA 17 J K S 2-Rc 1/8 (plug) 6 XAH7 depth 6 10 HR G E B + Stroke A + Stroke 2-Rc 1/8 With front lock XB XAH7 15 8.4 5.4 HN d e 4.5 3 6 XAH7 24 End lock mechanism (Locking type manual release) T-slot dimensions 24 (mm) Section XX detail Bore size (mm) d e 15 For 25 2.8 7.8 20 DM 3 8.2 25 With rear lock Refer to "Manufacture of Intermediate Strokes

AC

Piping adapter Model File E10-M5 E20-01 to03 E30-02 to04 SAC1000, #5 SAC2000, #5 SAC2503, #5 SAC4000, #5 SAC4006, #5 SAC5000, #5 E50-06 E40-02 to06 E60-06.10 Pressure switch with piping adapter Model File IS1000E-201 to 203 IS1000E-302 to 304 IS1000E-402 to 406 SAC2000, #6 SAC2503, #6 SAC4000, #6 1.1-19 Attachments Pressure Switch: (S) Compact pressure switch can be mounted easily.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 14 18 20 13 CX D6 5 5 8 F 5 6 -X 13.5 Width across flats 2 Width across flats 6 6 2-M4 x 0.7 Bottom hole diameter 3.3 4-M3 x 0.5 depth 3 17 0.05 20Base side for mounting B D Stroke: S M Data 2 M4 x 0.7 J 3 Z Max. 9.5 (Rubber stopper) Max. 10.5 (Metal stopper) 2.4 Piping port 2-M3 x 0.5 Without magnet and switch

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

0 Driver type*6 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 11LEJS 11LEJS 25Au Vacuum port

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(increment of 0.1 s), 1 to 10 s (increment of 1 s), 20 s, 30 s, 40 s, 50 s, or 60 s.