REA/REB

range Usable range 5 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 REBR32 REBR25 10 REBR15 1 0.1 100 200 300 400 600 500 Maximum speed U (mm/s) 62 Series

VQ5000

VQ 5 0 1 0 5 Individual terminal block kit Series VV5Q51-0503T1 1 set VQ5100-5 2 sets VQ5200-5 2 sets VQ5300-5 1 set Manifold base part no. Valve part no. (Stations 1 and 2) Valve no. (Stations 3 and 4) Valve part no.

ITV

ARJ 0.5 0.5 Return AR425 to 935 0 0 ARX Out 0.5 0.5 AMR ARM 1 2 3 4 1 0 25 50 75 1 100 5 Input signal (%F.S.)

CY1

5 !4 !7 w #3 !6 e #1 @9 #0 i !0 !3 !1 !

Modular Design with Uniform Body Style

8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Pressure gauge port size*1 [AR] 1/8 Fluid Air Ambient and fluid temperatures*2 5 to 60C (No freezing) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Auto drain minimum operating pressure N.C.

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Sine Rodless Cylinder Series REA/REB

8 @0 @2 @1 o q !4 !3 y i #1 !5 #2 !9 !7 !1 !2 !0 #0 r t u @9 !6 e #5 #4 w #3 @5 @7 @4 @6 REBH15 @8 @3 Component Parts Component Parts No. Description Body No.

JXCx-OMT0062

Example) 1 byte Binary Decimal Hexadecimal (BIN) (OCT) (HEX) 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 0 0 0 0 0 0 1 0 2 2 0 0 0 0 0 0 1 1 3 3 0 0 0 0 0 1 0 0 4 4 0 0 0 0 0 1 0 1 5 5 0 0 0 0 0 1 1 0 6 6 0 0 0 0 0 1 1 1 7 7 0 0 0 0 1 0 0 0 8 8 0 0 0 0 1 0 0 1 9 9 0 0 0 0 1 0 1 0 10 A 0 0 0 0 1 0 1 1 11 B 0 0 0 0 1 1 0 0 12 C 0 0 0 0 1 1 0 1 13 D 0 0 0 0 1 1 1 0 14 E 0 0 0 0 1 1 1 1 15 F 0 0

2-Color Display Digital Flow Switch Series PFM

A B 4 (5/32") C4 10.1 8.1 6 C6 10.3 8.3 8 (5/16") C8 12 10 1/4 N7 10.3 8.3 PFM -01/02--X693 PFM -01/02--X694 7 5 7 5 10.2 10.2 43 1 1 IN OUT A 43 (34.2) (34.2) 13 3 13 3 A 18 C 18 B C OUT B 48 20 IN 20 48 2 x 3.4 2 x 3.4 C (Width across flats) A B Port size Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 13 11 17 17 15 G 1/4 21 940 Series PFM7/PFM5 Made to Order 2 Please contact SMC for detailed specifications

HRX-OM-K003

Table 5-2 Model Indication Screen No. Item Descriptions 1 System model 2 System revision No. 5.3.2 Status screen 1 1 2 3 4 Figure 5-4 Status Screen 1 Table 5-3 Status Screen 1 No.

•

c 0 ZPY401 40 43 lB.5 29S 465 25 ~ 1 5 615 6.5 3.3 N41 :.:::') 1 4.5 1.8 ZPY5O!' 53 5 50 19. 295 <7 5 7S.5 6'l5 7.5 3.8 . . 1 012 12 22 13 15 12 22 38 ~ 64 3 1.7 N4( fS:)145 5 1.8 38 20 68 25 64 3 1.8 38.5 64.S 3.5 1.2 ~ i 1 65 7 2.5 ZPY10D 10 12 15 25 .

10

Symbol Size Port size Symbol Voltage Electrical entry A B C D E F H J K L M N 2 Grommet 1 N.C. 3 1/8 Size 1 A 5 24 VDC 4 C37 N.O. 2 1/4 3 5 B Grommet 100 VAC 2 With surge voltage suppressor C 110 VAC 1/8 3 D 200 VAC 5 Stainless steel E 230 VAC 2 1/4 3 F 24 VDC 5 G DIN terminal 24 VDC With surge voltage suppressor A B D E H J L M 4 H 100 VAC Size 2 2 1/4 N.C. 7 J 110 VAC C37 4 5 N.O. 3/8

IIIIIII

, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440

Mechanical Valves Series NVM, NVFM, NVZNI

, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

MGP

40 5 32 1 32 1 10 50 100 200 0.2 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 7 Series MGP Compact Guide Cylinder Horizontal Mounting Ball Bushing 1 7 l = 50mm V = 200m/s 1 8 l = 100mm V = 200m/s MGPL12 to 25 MGPL12 to 25 10 10 25 20 25 5 5 25 25 25 20 Load weight m (kg) Load weight m (kg) 20 20 25 16 20 20 16 16 12 16 16 16 12

Modular F.R.L. Unit

1/8 1/4 1/4 3/8 1/4 3/8 Note 1) Pressure gauge port size 1/16 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 Fluid Air Proof pressure 1.5MPa Max. operating pressure 1.0MPa Set pressure range 0.05 to 0.7MPa 0.05 to 0.85MPa Relief pressure Set pressure + 0.05MPa Note 2) [at relief flow rate of 0.1L/min (ANR)] Ambient and fluid temperature 5 to 60C (with no freezing) Nominal filtration rating 5m Recommended

JXCx-OMY0004

Alarm was generated in order of (1) -> (5) 16 Alarm 1 17 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 18 Alarm 3 Alarm 2 0 (1) (2) (3) (4) Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. Refer to 15.3. Alarms and countermeasures (P.66) for detailed alarm information. 19 Alarm 4 5 Please refer to 20.

Dual Rod Cylinder Series CXSJ/CXS

5 !4 @0 !1 !2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0!5 @9@3@4r!8w!9!3 i!0 @2ut!6 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 !4ye!1!2 q @1 !4 y e !1 !2 @3 @1 q CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 y e !1 !2 q @1 Component Parts: Standard Piping Component Parts No.

Solid State Auto Switches

With Pre-wired Connector 1 Eliminates the harnessing work by cable with connector specifications Adopts global standardized connector (IEC947-5-2) IP67 construction How to Order Connector Specifications D M9N S A PC Connector model M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 1 2 3 4 Solid state auto switch Standard part no. For the applicable auto switch model, refer to the table below.