MHZ

Model MHK MHS Gripping force (1) Bore size (mm) JIS Symbol Double acting Opening/ Closing stroke (Both sides) (mm) Gripping force per finger Effective value (N) Weight (2) (g) Action Model MHC External Internal MHT 28 60 130 250 460 28 60 130 255 465 28 60 130 255 460 6 10 16 20 25 6 10 16 20 25 6 10 16 20 25 6.1 17 40 66 104 3.3 9.8 30 42 65 1.9 6.3 24 28 45 4 4 6 10 14 4 4 6 10 14 4 4 6

MHZ

14 22 30 4 4 6 10 14 22 30 4 4 6 10 14 22 30 6 10 16 20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

MGC

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

Series AP500

to 1.0 MPa) Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Vacuum to 3500 psig (24.1 MPa) 1) Vacuum to 300 psig (2.1MPa) 5000 psig (34.5 MPa) 10 psig (69 MPa) 40 to 160F (40 to 71C) (No freezing) 2) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra max 15 in. (0.4 m) Option: 10 in.

CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 +0.036 0 8 8 +0.4 +0.1 41 +0.4 +0.1 48 +0.5 +0.1 48 +0.5 +0.1 56 (29.3) (33.1) (40.4) (49.2) +0.036 0 +0.036 0 +0.043 0 +0.043 0 31 37 38.5 42.5 5.5 5.5 6.6 6.6 10 10 10 10 42 48 53 60 20 25 32 40 25 30 35 40 5.5 5.5 6.6 6.6 10 10 10 10 36 43 50 58 20 25 32 40 +0.036 0 10 10 +0.043 0 12 12 +0.043 0 14

LEC-OM02904

10 . 2 10.1 . 2 10.2 . 3 10.3 . 5 10.3.1 . 5 10.3.2 . 6 10.4 . 7 10.5 . 7 10 1 10 10 10.1 10.11(50) 2(51) 70% 04575 LECSS(115% (full load current)) 1000 1000 100 100 10 10 [s] [s] [s] [s] 1 1 0.1 0.1 100 200 300 350 0 50 150 250 100 200 300 400 0 50 150 250 350 1,2[%] 1,2,3[%] (12) [] [] (123) LECSS-S5 LECSS-S7, LECSS-S8 1.()30r/min100%, 2.300~350%LE--350% 10.1 10 2 10 10.2

Cylinder with Lock Series CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 + 0.036 0 8 8 + 0.4 + 0.1 41 + 0.4 + 0.1 48 + 0.5 + 0.1 48 + 0.5 + 0.1 56 (29.3) (33.1) (40.4) (49.2) 31 37 38.5 42.5 5.5 5.5 6.6 6.6 42 48 53 60 10 10 10 10 10 10 10 10 20 25 32 40 + 0.036 0 + 0.036 0 + 0.043 0 + 0.043 0 25 30 35 40 5.5 5.5 6.6 6.6 36 43 50 58 20 25 32 40 10 10 + 0.043 0 12 12 + 0.043

CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 + 0.036 0 8 8 + 0.4 + 0.1 41 + 0.4 + 0.1 48 + 0.5 + 0.1 48 + 0.5 + 0.1 56 (29.3) (33.1) (40.4) (49.2) 31 37 38.5 42.5 5.5 5.5 6.6 6.6 42 48 53 60 10 10 10 10 10 10 10 10 20 25 32 40 + 0.036 0 + 0.036 0 + 0.043 0 + 0.043 0 25 30 35 40 5.5 5.5 6.6 6.6 36 43 50 58 20 25 32 40 10 10 + 0.043 0 12 12 + 0.043

Slider Type/Ball Bushing Bearing

5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 #0 @7 #1 10 Component Parts Note No. Description Material No.

IIIIIIIIII

CURRENT RATING LISTED IN CATALOG UL/CSA RATING 15A 15.1 Amps and 1/2 HP, 125 or 250 VAC. 1.2 Amp, 125 VDC; 1/4 Amp, 250 VDC 5 Amps, 120 VAC "L" (lamp load) 10A 10 Amps and 1/4 HP, 125 or 250 VAC. 1/2 Amp, 125 VDC; 1/4 Amp, 250 VDC 3 Amps, 125 VAC "L" (lamp load) 4A 4 Amps, 250 VAC 1/10 HP, 125 VAC 3A 3 Amps, 125, 250, 277 VAC 1/10 HP, 250 VAC Gold Option .1 Amp, 125 VAC MATERIAL APPROVALS

LEF-OM006xx

) CCW : CW : . 1) (2mm/) 2 1 CCW CW 2 3 OFF(ON) -28- (=) P.25 =02mm) =0 a) CCW 50mm =0() =10 50mm CCW CW 0 10 20 30 40 50 [mm] 50mm CCW CW 10 20 30 40 50 60 [mm] b) CW )50mm =0() =10 =-10 50mm CCW CW -50 -40 -30 -20 -10 0 [mm] 50mm CCW CW -40 -30 -20 -10 0 10 [mm] 50mm CCW CW -60 -50 -40 -30 -20 -10 [mm] -29- 4/ A 50mm () 5m 5m 10% 15m 20% -30- 5./ 5.1 (LEC ) ,,

Series AK1000

volume Mass 4500 psig (30.7 MPa) 10 psig (69 MPa) 40 to 160F (40 to 71C) (No freezing) 2) 0.09 1 x 10-10 Pam3/sec NPT female, Compression 0.38 pisg (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel mount) 0.49 in3 (8 cm3) 2.4 lbs (1.09 kg) 3) 1) Max 300 psig (2.1 MPa) for PTFE seat. 2) 14 to 194F (10 to 90C) for Vespel and PEEK

100

Air unit 1.5 JPY/m3 (ANR), Annual operating cycles: 30 (Operating hours: 10 hours/day, Operating days: 250 days/year, 120 cycles/h, when 1 unit is used) Cost conditions *1 Air consumption 100 Peak vacuum pressure 10% reduction -84 Air consumption [L/min (ANR)] Existing model ZL112 ZL1 63 L/min (ANR) Vacuum pressure [kPa] 57 63 Approx.10% reduction Air consumption Existing model (ZL112) ZL1

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

CXT

10 2 10 15 20 CXT 32 40 5 15 10 5 1 10 10 20 (mm) D-F7W D-J79W D-F7BAL D-F7NT D-F79F Auto switch model D-A7 D-A8 D-A73C D-A80C D-A7H D-A80H D-F7 D-J79 D-F7V D-J79C D-F7WV D-F7BAVL D-A79W Application No. of auto switches mounted 2 5 10 15 15 20 20 CXT 32 40 1 5 5 10 15 15 20 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

CXT

2 pcs. 10 10 25 to 5 20 15 5 1 pc. 10 10 25 CXTl25 5 15 10 10 2 pcs. 10 15 20 CXTl 32 40 5 15 10 5 1 pc. 10 10 20 (mm) D-F7lW D-J79W D-F9BAL D-F7NT D-F79F Auto switch model D-A7l D-A8l D-A73C D-A80C D-A7lH D-A80H D-F7l D-J79 D-F7lV D-J79C Applicable model D-F7lWV D-A79W D-F7LF Number of mountings 2 pcs. 5 10 15 15 20 20 25 CXTl 32 40 1 pc. 5 5 10 15 15 20 25 3.8-10 Platform Cylinder Series

Magnetically Coupled Rodless Cylinder

Useable range 10 10 Load Work piece Useable range 5 5 Fn 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 7 8 9 1 01 11 21 31 41 5 Lo Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B40 CY3B20 Selection example 500 200 Given a load drive resisting force of Fn = 100 (N) and a distance from the cylinder shaft center to the load application point of Lo =

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Useable range 10 10 Load Work piece Useable range 5 5 Fn 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 7 8 9 1 01 11 21 31 41 5 Lo Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B40 CY3B20 Selection example 500 200 Given a load drive resisting force of Fn = 100 (N) and a distance from the cylinder shaft center to the load application point of Lo =

PF-OMN0009_C

* , *PVC PVC PVC () PVC PVC , -10No.PF-OMN0009CN-F PF3W5 48 () 3 A : 04 20 40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12