Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Cushion: Rubber cushion, Operating Pressure(MPa): 0.08 to 0.7, Specification: Built-in magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Cushion: Rubber cushion, Operating Pressure(MPa): 0.08 to 0.7, Specification: Built-in magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Cushion: Rubber cushion, Operating Pressure(MPa): 0.08 to 0.7, Specification: Built-in magnet, Auto Switches:

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Cushion: Rubber cushion, Operating Pressure(MPa): 0.08 to 0.7, Specification: Built-in magnet, Auto Switches: Without

Clean Series: Relief Type, Magnet: Built-in Magnet, Series: J2, Mounting: Basic Style, Bore Size: 10mm, Stroke: 125mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: Perpendicular to Axis, Version: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Type

Clean Series: Relief Type, Magnet: Built-in Magnet, Series: J2, Mounting: Basic Style, Bore Size: 10mm, Stroke: 15mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: Perpendicular to Axis, Version: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Type:

Clean Series: Relief Type, Magnet: Built-in Magnet, Series: J2, Mounting: Basic Style, Bore Size: 10mm, Stroke: 30mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: Perpendicular to Axis, Version: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Type:

Clean Series: Relief Type, Magnet: Built-in Magnet, Series: J2, Mounting: Basic Style, Bore Size: 10mm, Stroke: 30mm, Cushion: Air Cushion, Head Cover Port Location: Perpendicular to Axis, Version: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Type: Band Mounting

Clean Series: Relief Type, Magnet: Built-in Magnet, Series: J2, Mounting: Basic Style, Bore Size: 10mm, Stroke: 75mm, Cushion: Air Cushion, Head Cover Port Location: Perpendicular to Axis, Version: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Type: Band Mounting

Clean Series: Relief Type, Magnet: Built-in Magnet, Series: J2, Mounting: Basic Style, Bore Size: 10mm, Stroke: 100mm, Cushion: Air Cushion, Head Cover Port Location: Perpendicular to Axis, Version: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Type: Band Mounting

Clean Series: Relief Type, Magnet: Built-in Magnet, Series: J2, Mounting: Basic Style, Bore Size: 10mm, Stroke: 75mm, Cushion: Air Cushion, Head Cover Port Location: Perpendicular to Axis, Version: Z, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Type: Band Mounting

Clean Series: Relief Type, Magnet: Built-in Magnet, Series: J2, Mounting: Basic Style, Bore Size: 10mm, Stroke: 150mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: Perpendicular to Axis, Version: Z, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Type: Band

Air Cylinder

, Non-rotating rod type (except single acting type)) (mm) Auto switch model D-H7l D-H7C D-H7lW D-H7BA D-H7NF D-G39A D-K39A D-A3lA D-A44A CJ1 D-M9l(V) D-M9lW(V) D-M9lA(V) D-A9l(V) D-G5NT D-C7/C8 D-C73C D-C80C D-B5l D-B64 D-B59W CJP CJ2 A B A B A B A B A B A B A B A B 20 11 9.5 7 5.5 1 0 6.5 5 3 1.5 7.5 6 1.5 0 4 3 25 10 10 6 6 0 0 5.5 5.5 2 2 6.5 6.5 0.5 0.5 3.5 3.5 32 11.5 10.5 7.5 6.5 1.5

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Compound No. 1349-80 Symbol Nil N1 Leakage Pa m3/s or less Note 1) Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10

5

D-M9mAV D-A3m D-A44 D-G39 D-K39 D-A9m D-A9mV D-A5m D-A6m D-A59W D-F5m D-J59 D-F59F D-F5NT REA D-P3DWA D-P4DW REB REC A B A B A B A B A B A B A B A B A B A B Bore size 32 10 8 6 4 0 0 4 2 6.5 4.5 11.5 9.5 0 0 3.5 1.5 5.5 3.5 3 1 Smooth Smooth 40 9 9 5 5 0 0 3 3 5.5 5.5 10.5 10.5 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 0 0 4 3 6.5 5.5 11.5 10.5 0 0 3.5 2.5 5.5 4.5 3 2 Low Speed 63 10 9 6 5 0 0

Electric Actuator/Slider Type

A 10 B 15 C 20 Produced upon receipt of order (Robotic cable only) Refer to the specications Note 2) on pages 9 and 10.

NCQ8

A B A HS 056 HS B A B A 075, 106 HS B A B A 150, 200, 250 Note 1) Figures in the table below are references for auto switch mounting positions in the stroke end detection.

Auto Switch Guide

/J59/J51 Grommet Tie-rod Terminal conduit 10-20-36 D-G39C/K39C D-M9N/M9P/M9B 10-20-37 D-M9NV/M9PV/M9BV D-F8N/F8P/F8B D-F9G/F9H 10-20-40 Direct Grommet D-Y59A/Y59B/Y7P 10-20-38 D-Y69A/Y69B /Y7PV 10-20-41 D-Y7G/7H 10-20-39 D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 10-20-42 Band Grommet D-G59W/G5PW/K59W 10-20-43 2-color indication D-F79W/F7PW/J79W 10-20-44 Solid State Switch Rail Grommet D-F7NWV/F7BWV

Made to Order

CM2 CG1 MB MB1 CA2 CS1 A 0 to 25 A 0 to 25 MGG MGC B 0 to 50 B 0 to 50 A 0 to 10 MGP B 0 to 25 Note) Specifications other than above are the same as standard type. 0 to 10 (8) MTS 0 to 25 (12 to 40) Precautions Warning 1.

Rotary Actuator/Vane Type

E L Double shaft/Port location: Side ported MRQ K G1 F D B N V1 Body (B) T V2 M S Body (A) C G2 J F L A 2 x R E Size: 10 Size: 10, 15, 20, 30, 40 A port B port N W 2 x R 2 x M3 x 0.5 depth 3 Size 10 only (For unit mounting) Y X DRefer to page 61 for details of shaft types J, K, T and Y.