XM, XY

(FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

CNG

CNS D-H7C D-B5, D-B6, D-B59W CLS HS HS Auto switch Auto switch 12 8.5 CLQ 24.5 16 MLGP A B A B 33 38.2 RLQ MLU Proper Auto Switch Mounting Position Auto Switch Mounting Height ML1C Auto switch model D-C7/C80 D-H7 D-H7W D-H7NF D-H7BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7/C80 D-C73C D-C80C D-B5/B64 DD-B5/B64 D-B59W D-G5NTL D-H7C D-C73C D-C80C D-G5NTL D-B59W -X Bore size (mm) A B A B A B A B

SYJ3000/5000/7000

(A) 4 (B) 2 (A) 4 (B) 2 Plug Plug Number of solenoids Single Double 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 Plug Plug 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) (JIS Symbols above: Series SYJ5000) 1-5-74 75 Series SYJ3000/5000/7000 Specific Product Precautions 2 Be sure to read before handling.

MQQ

25 10 to 50, 75, 100 124 12 28 10 to 50, 75, 100 B + Stroke L FT FX FZ FX (Dimensions other than A and L are the same as the front flange type.)

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

CP95

5.5 35 11 6.6 13 16 40 4.3 4 25 12 20 55 10 38 50 5 6.5 40 15 9 18 21 45 4.3 4 27 16 22 65 10 46.5 63 5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 6.6 8.5 10.5 40 11 12 41

CP95

11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35 50 21 50 12 23 15 10.5 9 80 18 20 66 86 47 40 60 25 63 14 27 18 11 11.5 100 18 20 18 71 15 30 12.5 55 50 70 25 11

Compact Cylinder with Air Cushion and Lock Series RLQ

Hs A B A B Proper auto switch mounting position (mm) D-A7H, A80H, A73C, A80C D-F7, F7V, F79F, J79 D-J79C, F7W, F7WV D-J79W, F7BAL, F7BAVL D-A7 D-A80 D-F7NTL D-A79W D-F7LF Bore size (mm) B B A A B A B A B A 32 11 10 50 51 3 43 6 46 5.5 45.5 40 13.5 12.5 56.5 57.5 5.5 49.5 8.5 52.5 8 52 50 18 19 61.5 60.5 11 53.5 14 56.5 13.5 56 63 22 21 67 66 14 59 17 62 16.5 61.5 Auto switch mounting height

MLGP

Bore size (mm) a b c d e b a 6.5 8.5 11 10.5 13.5 17.8 5.5 7.5 10 4 4.5 7 11 13.5 18.5 40 50 63 Note 2) For intermediate strokes, dimensions A, B, C, E, WA, and WB will be the same as the longer of the standard strokes. c d e MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA Extension locking Retraction locking ID IE IH J K L IB 100

MLGP

Bore size (mm) a b c d e b a 6.5 8.5 11 10.5 13.5 17.8 5.5 7.5 10 4 4.5 7 11 13.5 18.5 40 50 63 Note 2) For intermediate strokes, dimensions A, B, C, E, WA, and WB will be the same as the longer of the standard strokes. c d e MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA Extension locking Retraction locking ID IE IH J K L IB 100

MQQ

A B C D E F Part no.

MQQ

RS H A RZQ Bore size (mm) Stroke range (mm) A B FD FT FV FX FV MI W S 10 10 to 40 49.5 31.5 4.5 5.5 30 45 FX FT L B + Stroke 16 10 to 60 54 34 6.6 8 39 48 FZ CEP1 20 10 to 60 57.5 37.5 6.6 8 42 52 A + Stroke 2-FD 25 10 to 50, 75, 100 64 42 5.5 8 48 56 CE1 28 10 to 50, 75, 100 70.5 48.5 5.5 8 54 62 25, 28 CE2 Bore size (mm) FZ L M FV 10 55 18 ML2B 16 60 20 FX FT L B + Stroke 20 64 20 C

Hydraulic Cylinders

Mounting Heights for Stroke End Detection 20 & 25 Proper auto switch mounting positions (mm) B D-F9 D-F9V D-F9W D-F9WV D-A9 D-A9V D-A9 D-F9 D-F9W D-F9BAL Bore size (mm) SMC D-A90 B 15 16 A 12 13 B 19 20 A 11 12 B 18 19 A 8 9 SMC D-A90 20 25 A Approx.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

If valves other than the non-polar type are used, this may cause malfunction. 8 0 1 9 10 2 B B B B B 11 3 12 4 D side U side 13 5 A A A A A 14 6 15 7 + + + + + SoL. A SoL.

VFS

[dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Weight (kg) Plug-in Non plug-in VF 2.6 2.8 2.6 2.8 2.5 2.7 2.6 2.9 2.7 2.9 2.8 3.1 2.8 3.1 2.3 2.6 2.3 2.4 2.7 2.8 3 8 0.20 0.22 0.20 0.22 0.14 0.22 0.15 0.15 0.22 0.22 VFS4110 11 12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000

MXW Series Long Stroke Slide Table

100 125 150 175 200 225 250 275 300 A 52.5 31.5 27.5 27.5 27.5 27.5 B 79.5 100.5 125.5 150.5 175.5 200.5 B A MXW 8 6 W 32.5 11.5 7.5 7.5 7.5 7.5 V 99.5 120.5 145.5 170.5 195.5 220.5 A 51 31 31 31 31 B 104 124 149 174 199 MXW12 6 W 31 11 11 11 11 V 124 144 169 194 219 W V A 59.5 34.5 34.5 34.5 34.5 34.5 B 135.5 160.5 185.5 210.5 235.5 260.5 MXW16 8.5 W 39.5 14.5 14.5 14.5 14.5 14.5

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x

Vacuum Unit

Do not let the gasket get caught. 11) Mount the end plate U and D with the appropriate length of tension bolts for the number of stations required. (Tightening torque: 0.75 Nm.) 12) Mount the connector for all stations to the junction box B. (Refer to ) (Engage the recess of the connector and the protrusion of the junction box B.

REC

range Mounting hole 0 0.033 0 0.033 0 0.033 0 0.039 20 Up to 700 18 15.5 34 13 26 8 13 4 60 75 10 41 20 RS Q G FX 25 Up to 700 22 19.5 40 17 32 10 13 4 60 75 10 45 26 32 Up to 1000 22 19.5 40 17 32 12 13 4 60 75 11 45 26 20, 25, 32 RS H A 40 Up to 1000 24 21 52 22 41 14 16 5 66 36 82 12.5 50 32 NA NN P S Z ZZ H1 H2 I K MM N RZQ Bore (mm) Stroke range 20 30 M20 x 1.5 Up to 700 1/8 146

CJ2X/CUX/CQSX/CQ2X/CM2X

Series 10-, 11-CQSX Series 10-, 11-CQ2X How to Order How to Order Clean Series 10 11 Clean Series 10 11 Relief type Vacuum type Relief type Vacuum type C(D)QSX B 20 10 30 F9BW C(D)Q2XB 40 10 30 J79W D D Built-in magnet Built-in magnet Low speed cylinder Mounting style Low speed cylinder Bore size 32 40 50 63 2 pcs. 1 pc. n pcs.