REA/REB

Construction/Dimensions (mm) R Note 2) F Note 1) Model PA M MD MM LA L C HB B HA W A REA25 36 5 M4 M5 x 0.8 30 70 8.0 28.5 46 21 47 20 5.5 7 REA32 47 6 M5 M6 x 1.0 35 80 9.5 36 60 27.5 61 22.5 6.0 8 REA40 55 6 M5 M6 x 1.0 40 92 9.5 41 70 28.5 71 26 6.0 8 REA50 65 8 M6 M8 x 1.25 40 110 11 49 86 35 87 35 6.0 11 REA63 80 10 M6 M8 x 1.25 50 122 18 57 100 42 101 36 7.0 11 Note 1) Dimension F provides

CY1

SCY1R Bore size , #2 (#2 + #3) 19 Series CY1R Auto Switches/Proper Mounting Position for Stroke End Detection Auto Switch Operation Range D-Y5 D-Y7 Auto switch model Bore size (mm) D-A9 D-F9 D-Z7 D-Z8 D-Y7W 6 9 5 10 13 7 15 8 5 A B 20 6 4 25 9 7 32 9 6 40 11 6 50 11 7 63 11 6 C D Note 1) Switches cannot be mounted in some cases.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

11 11 A B D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 7 6 6 7 6 Some switches cannot be mounted.

VM

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

10

A B A B A B A B A B A B A B A B A B 32 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 63 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 80 14 12.5 10 8.5 10.5 9 15.5 14 4 2.5 8 6.5 4 2.5 7.5 6 9.5 8 7 5.5 100 14 12.5 10 8.5 10.5 9 15.5

Series VQ Base Mounted Metal Seal/Rubber Seal

A B A B A Void A Void A B A B A B A A A B Double Double Double Double Double SY Sl unit Sl unit Single Single Single Single Single SYJ Stations Stations 1 2 3 4 5 1 2 3 4 5 Single/Double mixed wiring (Option) Double wiring (Standard) SX SC applicable to SYSBUS Wire System (OMRON) SD applicable to Satellite I/O Link System (Sharp) VK VZ ADDRESS NO. STATION NO.

Modular F.R.L. Unit

Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Bracket mounting size Accessory specification Standard specification With pressure gauge With auto drain Model Port size B C D A L 4.5 E 28 F 31 G 25 H 20 J 27 K 7 N 40 Q B 104

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

0 0.3 B 0 0.3 Drawing of view (E) (mm) Bore size 16 10 15 15 B GA FX FT F A 18.3 15 C 20 17 5 4 8 8 5.5 5.5 2.3 2.3 33 33 20 20 5 5 FB FY D FC FZ 12-0.027 10-0.022 H NA NDh8 Z S NN 11 11 17.5 19 66 65 M12 x 1.0 M10 x 1.0 MM 42 42 GC 0 M4 x 0.7 28 28 122 121 20.5 20.5 0 M5 x 0.8 11 B CJ2RA-Z Series 10-/1121-/22Stroke Length Tolerance 10, 16 How to Order Clean series 10 11 Relief type Vacuum

MHZ

Axial Ported (with M5 port) [M] (mm) Auto switch mounting groove (4 locations) (Except 10) End boss assembly E D1 B D2 Model A 0.016 0.043 MHZJ2-10S CM 40 12f8 11 15 7 D2 0.016 0.043 MHZJ2-16S CM 43.5 16f8 15 20 10 0.020 0.053 MHZJ2-20S CM 51.7 20f8 19 22 12 D1 0.020 0.053 MHZJ2-25S CM 61.3 25f8 24 25 15 Other dimensions and specifications correspond to the standard type. 5 B E A Auto switch

MHZ

Axial Ported (with M5 port) [M] (mm) Auto switch mounting groove (4 locations) (Except 10) End boss assembly E D1 B D2 Model A 0.016 0.043 MHZJ2-10S CM 40 12f8 11 15 7 D2 0.016 0.043 MHZJ2-16S CM 43.5 16f8 15 20 10 0.020 0.053 MHZJ2-20S CM 51.7 20f8 19 22 12 D1 0.020 0.053 MHZJ2-25S CM 61.3 25f8 24 25 15 Other dimensions and specifications correspond to the standard type. 5 B E A Auto switch

F

A R B F I T T I N G F O R S O F T T U B E: M-3AU-4 M-5AU-4 M-5AU-6 B A R B E L B O W F O R S O F T T U B E: M-3ALU-4 M-5ALU-6 U N I V E R S A L E L B O W: M-3UL M-5UL 18 female diverted to 9 x M5 MORE SELECTIONS S E E N E X T P A G E P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P

VS 8-2/VS 8-4

(A) 4 (B) 2 Flow-rate Characteristics 1 (P) 5 (R1) 3 (R2) 4, 2 5, 3 (A, B EA, EB) 1 4, 2 (P A, B) Flow-rate characteristics Series Response time (msec) Mass (g) 4-position dual 3-port valve Note) (A) Type of actuation Seal C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b (A) 4 (B) 2 140 140 170 170 185 185 185 185 185 185 170 225 215 260 250 285 275 285 275 285 275 250 0.30 0.50 0.30 0.50 0.30

Electric Actuators

Description Side cover Bearing retainer Bumper End cover A End cover B Inner cover Motor cover A Motor cover B Auto switch Magnet Brake Material Note 200W Ball screw/Slide screw 1 2 3 4 5 6 7 8 9 10 11 No.

MXQ

5.5 Adjuster at extension end 5H9 depth 5 +0.030 0 36.5 (Adjuster at extension end) Bottom view of MXQ16L-50 1 11 5.5 11 12 I J 5.5 3 11 2-M5 x 0.8 thread depth 8 Operating port 2-M5 x 0.8 5H9 depth 5 +0.030 0 Max. 12 (Retraction end adjuster) 13 35 45 HA GA 5H9 depth 5 +0.030 0 6 B A NN-M6 x 1 thread depth 12 24 9.5 9.5 5.1 5.1 10.5 10.5 B H A 21 9 21 9 (NN 1) x H G Section AA Section

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

A B !

CM2

0() 0() A 6(4) 6(4) 7(5) 12 B B 0() 0() 1(0) 6 Hs 22.5 25 28.5 32.5 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 A B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 0.5(0) 5.5 2.5(0.5) 7.5 1.5(0) 6.5 3.5(1.5) 8.5 ( ): Denotes the values with air cushion.

Modular F.R.L. Unit

B B B B B B O S N.C.: Gray N.O.: Black M5 x 0.8 S O 1/4 V Applicable models AC10, AC20 Barb fitting Applicable tubing T0604 Width across flats 17 10 One-touch fitting Bracket mounting size Accessory specifications Standard specifications With pressure gauge With auto drain Model Port size B C D A L 4.5 E 28 F 31 G 25 H 20 J 27 K 7 N 40 Q L 4.5 M 2.8 P 26 T 0 B 104 85 26 50 AC10 AC20 AC25

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

screw R R B B B B B B B B X X P P 18.7 7.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

screw R R B B B B B B B B X X P P 18.7 7.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

CRQ2

M10 x 1.5 M10 x 1.5 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 16 16 5.2 49 78 (13) 76 16 47 18.5 55 40.4 Size K Q S W Keyway dimensions TF (H9) TG (H9) TL Rotating angle JJ US TA TD UW G L TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153 20 0 0.03 20 11.5 4 1 13.5 27 4 4 2.5 15 59 24.5 74 8 11 9.6 M5 x 0.8 depth 6 0 0.03