Modular Design with Uniform Body Style

35.5 50 40 55 9 18 7 50 65 AC40B-06-D 3/4 1/8 155.2 149.1 35.5 38.4 77.6 40 35.5 50 40 55 9 18 7 50 65 AC50B-D 3/4, 1 1/8 186.2 220.1 43 93.1 30 45 70 50 70 11 20 8 60 80 AC60B-D 1 1/8 196.2 234.1 45 98.1 30 45 70 50 70 11 20 8 60 80 Model Optional specifications Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with level gauge Square embedded type pressure gauge Round

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRA1 Refer to How to Order on page 11-7-40.

7ND9071en

T100 C IP66, AEx tb IIIC T100 C IP66 Ambient temperature ranges T6 T5 T4 ND9_E2 -40 to +60 C -40 to +75 C -40 to +85 C ND9_E2/I02 -40 to +60 C -40 to +75 C -40 to +85 C ND9_E2/I09 -25 to +60 C -25 to +75 C -25 to +85 C ND9_E2/I32 -25 to +60 C -25 to +70 C -25 to +70 C ND9_E2/D33 -40 to +60 C -40 to +75 C -40 to +82 C ND9_E2/D44 -40 to +60 C -40 to +75 C -40 to +82 C ND9_E2/I45 -25 to +60

LEC-OM07605CN

(c) AERSBAN-_SET SD [:mm] (A B) 40 [mm] [mm] 2-5 17.5 30 B0.3 10 L A 35 C +0.3 6 -0.2 24 0 24 0 3 7 6 22 ()M4 3 5 11 . A B C L AERSBAN-DSET 100 86 30 2 A 70 AERSBAN-ESET 70 56 B1 B 45 11 22 11.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-XC8 to XC11 1 2 Reversed Shaft Change of Rotating Range -XC7 CRB2 CRBU2 CRA1 Refer to How to Order on page 11-7-40. XC8 CRA1 Refer toHow to Order on page 11-7-40.

Table of Contents

4B flange 40 4B flange 60 6B flange Type Type 00 With manual drain cock 10 With auto-drain 01 With manual drain cock 11 With auto-drain Max.

Electric Actuator/Slider Type

105 to 120 95 125 to 200 70 43.5 205 to 300 85 51 25 M6 1.0 12 80 18 30 95 6.8 40 40 28.5 75 20 to 35 64 5 6 34 8.5 40 to 100 50 33.5 105 to 120 105 125 to 200 70 43.5 205 to 300 85 51 32 M6 1.0 12 95 28 40 117 7.3 60 Size Without lock With lock VA VB VC VA VB VC 25 115.5 82.5 11 160.5 127.5 11 32 120 80 14 160 120 14 93 Electric Actuator/Guide Rod Type Series LEYG Dimensions: In-line

CM2

21 MM M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 NA 24 30 34.5 42.5 G 8 8 8 11 B1 13 17 17 22 NN M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 41 45 45 50 H1 5 6 6 8 0 0.033 0 0.033 0 0.033 8 10 12 14 1/8 1/8 1/8 0 0.039 1/4 With Rod Boot S 62 62 64 88 TD 8 9 9 10 TT 10 10 10 11 TX 32 40 40 53 TY 32 40 40 53 TZ 52 60 60 77 Z 36 40 40 44.5 ZZ 116 120 122 154 h Symbol Bore size (mm) 20 25 32 40 e

Modular F.R.L. Units

11 11 11 11 11 Ny h Bowl 10 6C With bowl guard (Nylon bowl) 12 12 12 12 12 12 9 Air Combination AC20-B to AC60-B Series AC AF+AR+AL AW+AL AF+AR AF+AFM+AR AW+AFM AF Attachment AFM / AFD AR AL AW AC40-B AC20-B Nq Body size 20 25 30 40 50 55 60 Symbol Description Nil With drain cock J14 Drain guide 1/8 Drain guide 1/4 W15 Drain cock with barb fitting (for 6 x 4 nylon tube) + i Air filter drain

XL

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

MHZ

Gripping point L (mm) DMHZJ2-16D/11-MHZ2-16D 2050 Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) 40 0.6 MPa 0.5 MPa 0.6 MPa 0.5 MPa 0.4 MPa 30 0.4 MPa 0.3 MPa 0.2 MPa 0.3 MPa 20 0.2 MPa 10 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-20D/11-MHZ2-20D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa 0.5 MPa 40 0.4 MPa 0.4 MPa 30 0.3 MPa 0.3 MPa 20

MHZ

Gripping point L (mm) DMHZJ2-16D/11-MHZ2-16D 2050 Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) 40 0.6 MPa 0.5 MPa 0.6 MPa 0.5 MPa 0.4 MPa 30 0.4 MPa 0.3 MPa 0.2 MPa 0.3 MPa 20 0.2 MPa 10 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-20D/11-MHZ2-20D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa 0.5 MPa 40 0.4 MPa 0.4 MPa 30 0.3 MPa 0.3 MPa 20

CY1

36 80 35 60 27.5 61 22.5 6.0 8 CY1B40 6 55 M5 92 40 M6 x 1.0 9.5 41 26 70 6.0 28.5 8 71 CY1B50 65 8 40 M8 x 1.25 M6 110 35 86 11 6.0 35 49 11 87 CY1B63 80 M8 x 1.25 M6 10 50 100 18 42 57 122 101 36 7.0 11 Note 1) Dimension F provides a clearance of 1mm between the body and the floating joint, but does not consider dead weight deflection of the cylinder tube, etc.

KJ

(mm) (2) Connection thread R (1) A Weight (g) Model D P M L Nylon Urethane 2-applicable tubing D KQ2U23-M5 38 34.5 2.2 2.2 9 M5 x 0.8 10 1 8 KQ2U23-01S KQ2U23-02S 9.6 41 44 9.6 15.5 37 38 14 3.4 2.9 3.2 11 14 1 4 KQ2U04-M5 39.5 M5 x 0.8 M6 x 1.0 4 2.2 2.2 KQ2U04-M6 40 36 10 11 4 10.4 16 10.4 1 8 KQ2U04-01S 42 38 11 4.2 4.2 D 1 4 KQ2U04-02S 46 40 20 14 KQ2U06-M5 42.5 M5 x

Battery-less

series JXCD1 series JXCE1 series JXCP1 series JXCL1 series 16, 25 Version 3.6 (V3.6, S3.6) or higher 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32, 40 8, 16, 25 25, 32, 40 25, 32, 40 25 25 50 32, 40 Version 3.4 (V3.4, S3.4) 25, 32, 40 25, 32, 40 25, 32, 40 25, 32, 40 16, 25 JXCM1 series JXC51/61 series Version 3.5 (V3.5, S3.5) or higher 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32,

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

9.5 9.5 10.5 D-G5l/K59/G59F D-G5lW/K59W D-G5NT/G5BA 5 6 6.5 6.5 7 D-A3l/A44 D-A3lC/A44C 9 10 11 11 11 D-A5l/A6l D-B5l/B64 D-A59W 13 13 14 14 15 D-B59W 14 14 17 16 18 D-G5NB 35 35 40 40 40 D-G39/K39 D-G39C/K39C 9 9 10 10 11 D-P3DWA 4.5 4.5 5.5 5.5 5.5 D-P4DW 4 4 4.5 4 4.5 * Values which include hysteresis are for guideline purposes only, they are not a guarantee (assuming approximately 30%

Aluminum High Vacuum Angle Valve

XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 50 123 48 1 12 40 26 16 7.5 41 65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

MU

3, contained in one kit, and can be ordered using the order number for each cylinder bore size. 2.4-3 Series MU Basic: MUB Rod end male thread MUB25 SMU25, #1 (#1+#11) MUB32 SMU32, #1 (#1+#11) MUB40 SMU40, #1 (#1+#11) MUB50 SMU50, #1 (#1+#11) MUB63 SMU63, #1 (#1+#11) (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 Model MUB25 MUB32 MUB40 MUB50

LEC-OM02704CN

AED ( () 150 1. 2. ) 10.5 (A37)(A37) 1 Pos Spd Acc Dec Dwl (DWELL) Aux 10 16 11 11 . 2 11.1 . 2 11.2 . 4 11 1 11 11 11.1 (1) LECSC-S5 LECSC-S7 [mm] 40 6 6 6 135 (80) 4 () CNP1 CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BAT MR-J3BAT 0.8[kg] .