Booster Regulator/Air Tank

VBAT10A1 S Note) A safety valve port is provided only when option R or S is selected.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

to 300 50 25 32 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

+ Stroke ZZ + Stroke (mm) Stroke range Bore size (mm) B MM I K M MA MB MC NA NB P S Y ZZ H J D C KA GA GB 20 25 32 40 50 63 80 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 11 12 22 25 25 25 25 17 17 22 30 35 35 38 11 11 16 16 16 16 20 4 4 4 4 5 5 6 10 10 12 12 15 15 23 M8 x 1.25 M8 x 1.25 M10 x 1.5 M16 x 2 M20 x 2.5 M20 x 2.5 M22 x 2.5 19 26 21 34 37 44 50 56

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

mm 190 30 MIS12-30D 30, 50 mm 300 10 MIS20-10D 20MIS 5 15 355 20 MIS20-20D Data 410 30 MIS20-30D 800 30 MIS25-30D 10 15 1000 50 MIS25-50D 1350 30 MIS32-30D 18 50 1650 50 MIS32-50D 10-11-9 9 Series MIW/MIS Construction: Double Finger Type (MIW) 8 12, 20 w i !

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

mm 190 30 MIS12-30D 30, 50 mm 300 10 MIS20-10D 20MIS 5 15 355 20 MIS20-20D Data 410 30 MIS20-30D 800 30 MIS25-30D 10 15 1000 50 MIS25-50D 1350 30 MIS32-30D 18 50 1650 50 MIS32-50D 10-11-9 9 Series MIW/MIS Construction: Double Finger Type (MIW) 8 12, 20 q y r !

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

11 7.5 8 45 50 19 25 9 73 53 20 28 17 17 13 M10 x 1.5 20 16 22 M16 x 1.5 30 26 3/8 5 43 112 11 10 9 50 63 21 28 8 80 60 22.4 30 17 17 13 M10 x 1.5 22 16 25 M18 x 1.5 30 26 3/8 5 47 116 11 12 10 55 80 26 32 8 100 75 28 32 22 20 15 M12 x 1.75 26 19 29 M22 x 1.5 35 30 1/2 5 57 127 11 16 13 65 100 34 38 6.5 118 90 35.5 35 27 19 16 M12 x 1.75 27 21 34 M27 x 2 35 32 1/2 8 66 137 12 20 16 80 125

15

Made to Order Click here for details Symbol Specifications -XB9 -XB13 Low speed (15 to 50 mm/s) Weights Ultra low speed (7 to 50 mm/s) (kg) Bore size (mm) 6 10 15 20 25 32 40 0.231 0.428 0.743 1.317 1.641 2.870 4.508 Basic weight CY1S 0.053 0.082 0.111 0.184 0.186 0.284 0.430 Additional weight for 50 stroke CY3B CY3R 0.236 0.435 0.743 1.331 1.662 2.903 4.534 Basic weight CY1SG 0.050 0.079

High Power Cylinder Series RHC

range (mm) 250 to 1000 Effective thread length 32 50 70 35 50 0.042 0 250 to 1000 32 63 104 84 15 11 10 23 58 20 60 80 35 55 0.074 0 250 to 1000 37 80 130 106 18 13 10 23 61 25 75 95 40 65 0.074 0 250 to 1000 37 100 145 120 20 13 10 25 63 30 90 116 40 80 0.074 ZZ WH 305 S 6.8 to 11.3 H1 58 P 215 H 11 NF 1/2 GA 80 NE 24 FZ 16 ND 25 FY 116 MM 27.7 K M18 x 1.5 JC 7 I 75 Bore size (mm) 50 53

RSQ

20 (22) V M 10 (11) H + Stroke A + 2 stroke B + Stroke CEP1 CE1 RSQB Bore size: 32, 40, 50 32 40 50 2 Stroke F Q 2-P CE2 Z J ML2B I C J G5-S D T W E CV U 4-N through 8-O counterbore MVGQ 20 (22) 10 (11) V CC H + Stroke A + 2 stroke B + Stroke M 0.2 E RB Built-in One-touch fittings (20 to 50) Tubing O.D.

CNG

Maximum piston speed: 1000 mm/s It can be used at 50 to 1000 mm/s provided that it is within the allowable kinetic energy range.

VFS

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 900 Perpendicular, upward actuation Horizontal

Compact manifold regulator ARM5 Series

X 5.5 L3=50+R+V L4=50+T+X 50 SMC H H L L S S O O U U C C P P K K R 8 S U 57 (at knob locked) DIN rail part no.

HRX-OM-X071

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

CLQ

Flange Style CLS A + Stroke L FT B + Stroke G 4-FD FZ FX Without auto switch With auto switch Bore size (mm) Stroke range FD FT FV FX FZ G L L1 M CLQ A A B B 92 36 10 to 50 63 9 9 80 92 108 38 18 43.5 60 46 102 102 46 75, 100 MLGP 106.5 43.5 10 to 50 80 11 11 99 116 134 43 20 53.5 77 53.5 116.5 116.5 53.5 75, 100 RLQ 125 53 10 to 50 100 11 11 117 136 154 50 22 53.5 94 63 135 L1 Rod end nut

Auto Switch Guide

RS Q G RS H A RZQ Weight MI W S Auto Switch Internal Circuit D-F7NV (g) CEP1 D-F7NV D-F7PV D-F7BV Auto switch model DC (+) Brown CE1 11 13 13 0.5 Lead wire length (m) 50 57 57 3 Main circuit of switch CE2 OUT Black 81 92 92 5 ML2B DC () Blue Dimensions C J G5-S 3.5 mounting hole D-F7PV CV Indicator light DC (+) Brown MVGQ Main circuit of switch Main circuit of switch CC OUT Black RB DC ()

51

(mm) Rod Flange Symbol F GB B A AL B1 C D FT FX FD ZZ E GA H H2 H1 I J MM KA NA P S Bore size (mm) 20 25 32 40 50 63 80 100 12 15 15 20.5 26 26 32.5 32.5 14.5 17.5 17.5 23.5 29 29 35.5 35.5 8 10 12 14 18 18 22 26 12 14 18 25 30 32 40 50 5 6 6 8 11 11 13 16 79 85 87 93 121 121 151 152 40 44 53 61 76 92 104 128 13 17 17 19 27 27 32 41 14 16.5 20 26 32 38 50 60 2 2 2 2 2 2 3 3 28 32 38 46 58

CG5-S

11 85 15 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS 11 93 15 50 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 15 109 21 63 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 15 109 21 80 22 234 14 23 6 40 80 87.2 57 9 144.5 120 80 291 257 CG-E080SUS 23 130 32 100 22 235 14 23 6 40 80 87.2 57 9 144.5 120 80 292 CG-E080SUS 258 23 131 32 Plug

MXS Series Air Slide Table

Z ZZ (NN-1) X H G H 29 11.5 29 11.5 A B 9.5 5.1 11 11 30 1.5 A B 5H9 5 deep +0.030 0 6 NN-M6 X 1 thread 12 deep 5H9 5 deep +0.030 0 HA GA Cross section AA Cross section BB (mm) Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA M 83 83 83 93 108 147 200 254 306 NA 2 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 ZZ 97 97

CXS

20 CY 15 10 MG 0.1 10 CX 0.1 6 6 D-X 0.03 5 5 10 20 30 40 50 100 10 20 30 40 50 100 20Overhang L (mm) Overhang L (mm) Graph (4) V = Up to 800 mm/s (Up to 700 mm/s for 15, 20) Data CXSJM CXSJL Graph (3) V = Up to 600 mm/s CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15