HRX-OM-X037

Communication setting screen 35.Contact output 1 to 3 34.Contact input signal 33.Analog output 32.Serial communication setting screen detail setting screen setting screen setting screen 11. Temperature waveform 11.

New

For Air Upstream pressure of valve P1 z 1.0 MPa Downstream pressure of valve (P2) [MPa] 1.0 0.8 Subsonic Critical 0.9 0.6 pressure 0.8 0.7 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 2 50 100 150 200 250 300 400 350 3 100 200 300 400 500 4 400 600 800 1,000 1,200 5 200 1,400 600 1,000 7 350 700 8 400 700 1,000 1,300 10 500 700 10 700 1,000 Flow rate Q [L/min (ANR)] How to read the graph The sonic

LEY-OM007

450 500 50 100 350 400 450 500 LEY25 LEY16 LEY32 LEY32 LEY25 LEY16 / P.38 6.3 <> NPNPNP LEY16B-100 NPN -11- 2.3. 28 28 29 30 29 30 / 14 14 15 15 25 26 27 25 26 27 11 11 12 12 19 19 21 21 18 18 16 16 22 22 24 24 17 17 12 13 12 13 23 23 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 20 20 34 33 35 32 31 1 21 2 22 3 23 4 24 5 25 6 26 NBR 7 27 8 POM 28 9 29 10 30

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

300 500 400 300 200 200 100 1 2 3 4 5 10 20 30 1002 3 4 5 10 20 30 0.5 40 50 100 Load weight (kg) Load weight (kg) 20 Horizontal collision: P = 0.5 MPa 40 Horizontal collision: P = 0.5 MPa 2000 1500 2000 1500 Collision speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution Load weight (kg) Load weight (kg) 1.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

75 9 10 19 500 300 300 30 134 3.2 171 500 300 52 45 143 39 18 177 188 11 53 53 77 154 154 7 10 47.3 11 10 44.5 143.5 82 54 4 55 75 23 27 7 5 66 36 10 15 30 The dimensions other than indicated below are the same as those of indicated on p.3.4-8.

Table of Contents

2 3 4 5 n U side VDW23-GVDW23-GVDW23-GVDW23-G70 31.5 21 18.5 (OUT port) n-1/8 n-M5 x 0.8 11 P = 22 11 4.5 1.5 54 6 32 6 (19.5) 9.5 11 9.5 11 4-M4 x 0.7 46 10 24 10 When w/o bracket, M3 threads at both ends (4 positions) can be used for other purposes.

AZ1000

bar unit MPa unit Surface finish No gauge port No code Seat material Surface finish Ra 10 in. (0.25 m) Standard 25 in. (0.62 m) Code No pressure gauge (Connections: 1/4 inch face seal male) 0 Code Material PCTFE (Standard) Vespel 3) PTFE 4) 5) No code Q No code VS TF V3 L 1 H 2 4 10 40 -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400

MY2

Load weight kg MY2HT25 Horizontal impact: P = 0.5MPa 2000 1500 H unit Impact speed mm/s 1000 L unit 500 400 300 Air cushion 200 100 1 2 3 4 5 10 20 50 40 30 m1 max. m1, m2, m3 max. Load weight kg MY2HT40 Horizontal impact: P = 0.5MPa 2000 1500 H unit Impact speed mm/s L unit 1000 500 400 300 Air cushion 200 1003 5 10 20 30 50 100 200 m1, m2, m3 max.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Flow Rate Characteristics Aluminum Body Type Size Port size Orifice diameter [mm] Flow rate characteristics*1 Max. operating pressure differential [MPa] Model Weight*2 [g] C [dm3/(sbar)] b Cv 20 1/8, 1/4 3 1.41 0.54 0.35 0.7 JSX21-Am30m 240 5 1.66 0.54 0.52 0.2 JSX21-Am50m 240 30 1/4, 3/8 4 1.57 0.59 0.52 1.0 JSX31-Am40m 400 7 3.02 0.53 0.88 0.2 JSX31-Am70m 400 *1 The flow rate characteristics

HRX-OM-Q026

Terminal No.11 Inlet of the signal cable Fig. 3-11 Wiring of run/stop signal input and remote signal input (Example) HRSH Series 3.3 Installation 3-21 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.3.6 Wiring of external switch signal input This product can be monitored by sampling the signal of the external switch prepared by the user.

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

Modular F.R.L. Units

v*11 v*11 v*11 v*11 *1 Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

M14 x 1.5 27 1/4 42 11 20 45 153 51 255 52 43 15 59 1/4 stroke 263 271 50 11 M8 x 1.25 7 18 80 11 M18 x 1.5 30 3/8 46 10 21 50 168 58 284 58 52 15 66 1/4 stroke 292 300 63 11 M10 x 1.25 7 18 99 14 M18 x 1.5 31 3/8 48.5 13 23 60 182 58 298 58 52 17.5 66 1/4 stroke 306 314 80 13 M12 x 1.75 10 22 117 17 M22 x 1.5 37 1/2 55 15 23 70 208 71 350 80 65 21.5 80 1/4 stroke 359 368 100 16 M12 x 1.75

VQ7-6/7-8

2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R 3.3 0.27 13 2.8 0.26 11 Rubber seal 50 or less VQ7-8-FPG-D7.0 7.2 Metal seal 60 or less Double check 1.98 VFR VQ7-8-FPG-D-R 7.0 7.2 Rubber seal 60 or less VQ7-8-FIG-D2.8 0.25 11 2.4 0.26 10 Metal seal 45 or less Pressure center VP4 0.75 Courtesy

Slider Type/Ball Bushing Bearing

CYP 3.5 7 RB0805 RB1006 RB1411 RB2015 Shock absorber model 5.5 11 Maximum energy absorption: (J) 0.98 3.92 14.7 58.8 5 10 Stroke absorption: (mm) 5 6 11 15 5.5 11 Collision speed: (m/s) 0.05 to 5 4.5 9 Max. operating frequency: (cycle/min) 80 70 45 25 Since the cylinder is in an intermediate stop condition when stroke adjustment is performed, use caution regarding the operating pressure

AC Servo Motor Driver (Pulse input type/Positioning type)

Servo amp lifier Driver (Note 7) (Note 7) CN1 CN1 (Note 2) 24VDC RA1 (Note 4, 9) 2 OPC 9 ALM Trouble (Note 6) 1 DICOM Travel completion 10 MEND RA2 13 DOCOM (Note 9, 11) (Note 13) Ready EM1 SON MD0 8 4 3 (Note 3, 5) Forced stop 11 RD RA3 Servo-on Electromagnetic brake interlock 12 MBR RA4 Automatic/manual selection DOG (Note 9, 10, 12) 25 Proximity dog 10m max. Point table No.

100

1 Output Nil None B Adapter assembly for bottom mounting*11 (Included) Nil None A NPN open collector B PNP open collector GN With vacuum pressure detection (G) port (Rc1/8, G1/8, NPT1/8)*6 *11 This adapter assembly is for adjusting the product to the 27 mm pitch of the bottom mounting thread of the existing ZL212 series model.

33

V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 195 Thermo-chiller Basic Type HRSE Series

LEKF-OMZ0035

Slider type LEKFS series . 7 2.1 Specification . 7 2.2 How to Order . 9 2.3 Construction . 11 3.