Magnetically Coupled Rodless Cylinder

, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact SMC if the maximum stroke will be exceeded.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact P/A if the maximum stroke will be exceeded.

LJ1H

(mm) a=2000 400 LEC-MR-RB-032 LEC-MR-RB-032 LEC-MR-RB-032 LEC-MR-RB-032 A1 A2 B1 B2 a=3000 a 200 L3 Mey 0 2 4 6 8 10 Transfer load m (kg) Refer to page 45 for deflection data.

Integrated Controller

L4 [mm] L4 [mm] L4 [mm] L4 [mm] L4 600 600 600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25

Series AP500

Vespel is a registered trademark of DuPont. 11 Intermediate flow (Tied-diaphragm) Single Stage Regulator for Ultra High Purity Series AP1400T Sub-atmospheric pressure delivery option Tied-diaphragm design For UHP gas delivery High inlet pressure type Standard: Max. 2300 psig(15.9 MPa) HR(option): Max. 3000 psig (20.7 MPa) Flow capacity : to 400 slpm Body material: 316L SS secondary remelt

C76

D-H7NF Bore A B A B 32 8 7 7 6 40 14 12 13 11 Aim at this number.

C76

401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177 32 12.5 25 37.5 50 75 100 125 40 12.5 25

Guide Cylinder/Compact Type Series MGC

400, 450, 500, 600 CLJ2 350, 400, 450, 500, 600, 700, 800 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

C92

11 15 17 10 14 18 18 22 26 27 36 5 7 8 8 10 10 13 16 23 27 30 31 37 40 45 55 11 11 14 14 19 19 42 52 74 84 90 98 116 126 160 180 17 19 24 24 30 30 41 55 136 153,5 173 184,5 215 231 287 340 36 40,5 45 48,5 52 57 65 80 6 6 10 10 16 20 15 15 7 10 11 11 11 12 20 25 10 10 10 10 14 14 26 31 32 40 50 63 80 100 125 160 C92S B-Stroke W Bore (mm) AM D EE G H J KK K KW M N S SW VD WH ZZ B 22 24 32

Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X226 IZN10-G-200-X226 IZN10-G-300-X226 IZN10-G-400-X226 IZN10-G-500-X226 IZN10-G-600-X226 100 IZN10-11 200 300 400 500 600 Recommended supply pressure: 0.05 to 0.15 MPa 459 IZN10 Series Made to Order 2 This product is an individually applicable product. For details about the delivery time and price, please consult with SMC representative.

0.4

Formula: L1 = 16n + 57, L2 = 16n + 163 n: Stations (Maximum 16 stations) n L L1 L2 L3 L4 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 73 89 105 121 137 153 169 185 201 217 233 249 265 281 297 313 179 195 211 227 243 259 275 291 307 323 339 355 371 387 403 419 200 225 237.5 250 262.5 287.5 300 312.5 337.5 371 362.5 375 400 412.5 425 450 210.5 235.5 248 260.5 273 298 310.5 323 348 360.5 373 385.5

Thermo-chiller

V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V HRSH090 Inverter type 0.1 5 to 40 V Indoor use (400 V as standard, 200 V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (400 V as standard, 200 V as an option) (Only 200 V as an option) Indoor use Electrical box: IPX4 CH1 0.1 15

SMC Pneumatic Clean Series

auto switch: 10C to 70C, With auto switch: 10C to 60C (No freezing) Piston speed 10-/11-: 30 to 400 mm/s, 21-/22-: 50 to 400 mm/s +1.4 Stroke length tolerance 0 Basic style/Axial foot style/Rod side flange style/Head side flange style Mounting style 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Grade 2, 21-: Grade 3 11-/22-: Grade 1 Grease Particle generation grade (Refer

Air Cylinder Series MB

11 11 D-A59W 13 13 13 14 14 15 D-A3, A44 9 9 10 11 11 11 10 D-Y59, Y69 D-Y7P, Y7V D-Y7W, Y7WV 7 5.5 5.5 7 7.5 6.5 5.5 D-Y7BAL 6 3.5 3.5 3.5 4 4.5 5 D-F5, J5 D-F5W, J59W D-F5BAL, F5NTL D-F59F 3.5 4 4 4.5 4.5 4.5 5 5.5 5.5 6 6 6 D-F5LF 5 9 4 9 4 9 4 10 4.5 10 4 11 6 D-G39, K39 11 D-P5DWL 4.5 4.5 These values are given as guidelines including the hysteresis and are not guaranteed.

IDU/IDF

Dryer A G F E D C B B 7kVA IDF120D 360 30 11 300 260 400 540 IDF-TR7000-8 94 Three phase compound 9kVA IDF150D 400 40 13 350 300 450 650 IDF-TR9000-8 109 220, 240, 380, 400, 415, 440V (50/60Hz) 200V (50/60Hz) 11kVA IDF190D 550 60 13 400 350 600 450 IDF-TR11000-8 131 4-F A 13kVA IDF240D 400 60 13 350 300 450 600 IDF-TR13000-8 138 D 18kVA IDF370B 400 40 13 350 300 450 650 IDF-TR18000-8 179

Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X226 100 IZN10-G-200-X226 200 IZN10-G-300-X226 300 IZN10-G-400-X226 400 IZN10-G-500-X226 500 IZN10-G-600-X226 600 Part no.

Step Motor Driver （ Pulse input type ）

1 1 Acceleration / 1 1 1 Deceleration pattern S-motion ratio 0 0 0 Storoke (+) Storoke +1 Storoke +1 Storoke +1 Storoke (-) -1.00 -1.00 -1.00 Maximum speed 200 400 200 400 150 400 Maximum acceleration/ 5000 5000 5000 Basic parameter default deceleration Default In position 0.50 0.50 0.50 ORIG offset 0.00 0.00 0.00 Max force 70 70 70 Para protect 1 1 1 Enable SW 2 2 2 Unit name Part no. of

45

M3 Terminal screw Stations n 10 stations 11 12 13 14 15 16 stations A: Orange B: Green 348 373 385.5 398 410.5 435.5 448 L1 L2 L3 L4 337.5 362.5 375 387.5 400 425 437.5 251 267 283 299 315 331 347 12.5 17 15 13.5 11.5 16 14.5 (Rail mounting hole pitch 12.5) 1-6-129

Modular Design with Uniform Body Style

*11 *11 *11 *11 *1 Set the inlet pressure to at least 0.05 MPa higher than the set pressure. *2 Options B, G, H, and M are not assembled and supplied loose at the time of shipment. *3 The assembly consists of a bracket and set nuts (applicable to the AR20(K)-D to AR40(K)-D).

Hygienic Design Cylinder Series HY

Standard Stroke Standard stroke (mm) Bore size (mm) 32 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500 40 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500 50 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500, 600 63 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500, 600 Intermediate strokes of 1 mm each can be produced.