CQ2

3 !

Micro Mechanical Valve Series VM1000

) NC 18 36 4.5 13.5 18 VM4 SMC NO 22.5 OUT 13.5 25 3 x 1/8 21 35 T.T. 20 N F.O.F. 4 x 4.5 mounting hole 90 2312 3 Port Mechanical Valve Series VM400 Series VM400 Key selector (2 position) VM430-01-36 Panel mounting hole ON T.T. 40 OFF 39 Max. 6 38 21 30.5 Symbol 1.5 1.5 (OUT) 2 (126.6) 53 22.1 3 10 12 (105.6) 3 (N.C.) 1 (N.O.) (75.1) NC 36 4.5 13.5 18 13.5 18 VM4 SMC NO 22.5 OUT 35 25 21

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VX 2 3 21 1 1 G Normally Closed (N.C.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

12 26 27 53 53 120 1.5 175 Rod end male thread Nut 3170 2270 1360 IN 4 2 8 17 17 32 32 49 1 116 80 With boss in head side 3520 2510 1510 OUT 2 1.3 3 5 7 13 25 45 0.7 96 With rubber bumper 5000 3570 2140 IN 0 0 2 3 3 7 9 18 31 56 100 Built-in One-touch fittings 5500 3930 2360 OUT 12 12 21 21 67 55 164 186 143 155 243 324 696 1062 Foot style (Including mounting bolt) Rod side flange style

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0 @1 -X #4 #1 20@7 #2 Data @3 #3 #7 #6 @6 !

Table of Contents

For compressed air quality, refer to Air Preparation Equipment catalog. 14-21-4 3 Air Preparation Equipment Precautions 1 Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to main text for more detailed precautions on every series. Caution on Design 3.

MGP

6 M8 x 1.25 16 21 97 102 140 20 17.5 55.5 12.5 32 32 50 4 4.5 3 6 M8 x 1.25 16 22 97 102 140 20 11 49 6 40 40 66 5 6 4 8 M10 x 1.5 20 24 50 106.5 118 161 25 9.5 21 64 50 80 5 6 4 8 M10 x 1.5 20 24 63 106.5 118 161 25 4.5 16 59 63 End lock mechanism MGPL (ball bushing)/Dimensions A, DB, E (mm) (mm) A E HN (max.)

CL

21 16 16 18.5 17 17 21 21 16 16 18.5 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot M M1 MM N RT RY S W P Bore size (mm) Stroke range H ZZ e f h ZZ l 3/8 3/8 1/2 1/2 1/2 1/2 3/4 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 50 63 80 100 125 140 160 6 10 12 12 30 24 26 1001 to 1200 1001 to 1200 1001 to 1400 1001 to 1500 1401 to

SV

MAX.21 63.5 60 52.5 12 (For DIN rail mounting) n1 = Valve stations n2 = Input block stations (7.5) B B B B 145.6 127.6 L2 = L110.5 L3 = 16 x n1 + 60 L4 = L3 + 81 + 21 x n2 L5 = (L1L4)/2 L6 = 16 x n1 + 48 L7 = 21 x n2 + 81.5 A A A A B A B A B A B A L1: DIN Rail Overall Length (mm) Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Input block Stations(n2) 0 1 2 3 4 5 6 7

Rubber seal 5 Port Solenoid Valve Series SYJ7000

(Manifold base) SYJ7123-5LOU-C8 3 pcs. (Valve) SYJ7223-5LOU-C8 3 pcs. (Valve) SYJ7000-21-3A 1 pc. (Blanking plate assembly) SY3000-37-3A 3 pcs. (Connector assembly) SY3000-37-4A 3 pcs. (Connector assembly) Example: The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. Use manifold specification sheet.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VV5F5-21 Common EXH: VV5F5-20-1 (G) (E) (T) (D, Y) Double Manual override (Non-locking) Single 2n-Rc 1/4, 3/8 (A, B port) 218.5 (3 position: 247.5) Y: 217.5 (3 position: 246.5) D: 218.5 (3 position: 247.5) 197.5 (3 position: 226.5) Y: 108.5 (3 position: 123) D: 109.5 (3 position: 124) (3 position: 113.5) (3 position: 124) 196 (3 position: 225) 98 (3 position: 112.5) 86.5 (3 position: 101

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

AS331F-N02-11SD 16.2 18.5 28.2 8 15.2 21 3/8" 17.9 23 39.7 82 81 48 43.7 32.6 53.9 R 3/8 19 23 9.8 1.2 47.4 52.6 AS331F-03-10SD AS331F-N03-07SD 21 32.6 10 18.5 17 43.7 1/4" 13.2 38.7 25.6 78 85 52.4 45.4 20.6 12.9 16.2 23 AS331F-03-12SD AS331F-N03-09SD 22 34.4 12 20.9 44.9 23 1.2 47.4 NPT 3/8 19 5/16" 15.2 18.5 9.8 39.7 28.2 81 87 54.2 48 52.6 AS431F-04-10SD AS331F-N03-11SD 16.2 21 32.6 10

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

/N.C. 4 position dual 3 port valve: N.C./N.C. 4(A) 2(B) 4(A) 2(B) A 1(P) 5(EA) 3(EB) 1(P) 5(EA) 3(EB) 4 position dual 3 port valve: N.O./N.O. 4 position dual 3 port valve: N.O./N.O. 2(B) 4(A) 2(B) 4(A) B 1(P) 5(EA) 3(EB) 1(P) 5(EA) 3(EB) 4 position dual 3 port valve: N.C./N.O. 4 position dual 3 port valve: N.C.

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

Proposals for Energy Saving

S + Stroke ZZ + Stroke Bore size (mm) E F (E1) WA GA S TA ZZ (F1) 17 21 26 26 32 37 18 25 30 32 40 50 2 2 2 2 3 3 20 21 23 23 30 31 18 19 21 21 28 29 77 (85) 84 (93) 97 (109) 97 (109) 116 (130) 117 (131) 17 18 20 20 119 (127) 136 (145) 157 (169) 157 (169) 190 (204) 191 (205) 2 2 2 2 3 3 32 40 50 63 80 100 Note 1) Dimensions other than the above are the same as the standard double acting

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Copper/Fluorine/Silicone free + Low particle generation Prefix the asterisk to the part no. of the solenoid valve, etc. 21 W Note) Note) 1021-VQ2000 only Actuation type 1 2 3 4 5 2-position single 2-position double 3-position closed center 3-position exhaust center 3-position pressure center D side U side Manual override Nil B C D 1 2 3 Stations Non-locking push type (Tool required) Locking

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Copper/Fluorine/Silicone free + Low particle generation Prefix the asterisk to the part no. of the solenoid valve, etc. 21 W Note) Note) 1021-VQ2000 only Actuation type 1 2 3 4 5 2-position single 2-position double 3-position closed center 3-position exhaust center 3-position pressure center D side U side Manual override Nil B C D 1 2 3 Stations Non-locking push type (Tool required) Locking

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

position closed center / exhaust center / pressure center Grommet (G), (H): 10-SY7 40(R)G H 02 03 3 4 5 (A, B port) 3/8, 1/4 21 13.5 (Light/surge voltage suppressor) 43.1 21.5 (For mounting) 2 x 4.3 61 4 21 Manual override A B PE 38 46 + + B A X EA EB P 21.5 71.5 18.5 21 134.4 [138.8] 40.7 [42.9] G: Approx. 300 H: Approx. 600 (External pilot port) M5 x 0.8 M5 x 0.8 (Pilot EXH port)

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Stroke length tolerance 10-/11-: 30 to 400 mm/s, 21-/22-: 50 to 400 mm/s Piston speed +1.4 0 Mounting Basic/Axial foot/Flange 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Class 4, 21-: Class 5 11-/22-: Class 3 Grease Refer to page 889 for the applicable auto switch list.

LEC-OM07605CN

-15 3.5.1 . 3-15 3.5.2 . 3-16 3.5.3 . 3-17 3.5.4 . 3-17 3.6 . 3-18 3.6.1 (SS1) . 3-18 3.6.2 . 3-19 3.6.3 . 3-20 3.6.4 EM2 . 3-20 3.7 . 3-21 3.7.1 . 3-21 3.7.2 . 3-22 3.8 . 3-23 3.8.1 . 3-23 3.8.2 . 3-24 3.8.3 . 3-26 1- 3.9 SSCNET . 3-27 3.10 . 3-29 3.10.1 . 3-29 3.10.2 . 3-30 3.11 . 3-34 4 41 4-18 4.1 . 42 4.1.1 . 42 4.1.2 . 43 4.1.3 . 45 4.2 . 45 4.3 . 47 4.3.1