Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

screw R R B B B B B B B B X X P P 18.7 7.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

0.4

screw R R B B B B B B B B X X P P 7.7 18.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

SY

Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 A, B port C4 (4 One-touch fitting) C6 (6 One-touch fitting) C6 (6 One-touch fitting) C4 (4 One-touch fitting) C8 (8 One-touch fitting) C10 (10 One-touch fitting) C6 (6 One-touch fitting) C6 (6 One-touch fitting) C8 (8 One-touch fitting) P to A/B 3.96 (0.22) A/B to EA/EB 4.14 (0.23) C6: P to A/B 9.54 (0.53) A/B to EA/EB 9.0 (0.5) C8: P to A/B 16.2 (0.9

CATALOG

I N G S C3 C4 C6 M5 N1 N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc.

Series VQ Base Mounted Metal Seal/Rubber Seal

S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) F 25P U S P 26P U S F 15P U S A S U S P 16P U S B P 20P U S C P A 10P Model T1 T2 (1) (1) (1) Max. number 16 14 16 16 14 8 8 16 16 Note 1) Due to the limitation of internal wiring.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C3: 3.2 (SMC) C4: 4 (SMC) C6: 6 (SMC) N1: 1/8" (SMC) N3: 5/32"(SMC) N7: 1/4" (SMC) U side D side 87.2 L3 (L4) L5 7.1 (C6: 3.2) (N7: 7) DIN rail holding screw (For DIN rail mounting) (4.9) 55.4 DIN rail holding screw (For DIN rail mounting) SI unit DIN rail B B B B B 8 10.8 29.6 5.5 92.6 92.2 A A A A A 4.6 83 80 35 83.7 B A B A 116 42 36.6 39.6 61.9 Manual override Press and turn for the locking

Table of Contents

A A A A A A A 2-C6 P (SUP port) 24.5 (11) 13.5 B B B B B B B B R R 7 P = 11 19.2 2-C6 R (EXH port) (7.5) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread The broken lines indicate the DIN rail mounting style [-D] and the top entry connection [-PU].

V

I N G S C3 C4 C6 M5 N1 N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Type 42 (5 port/Base mounted) How to Order SS5YJ7 42 C6 05 10 Stations Clean series Thread type A, B port size 02 2 stations C6 6 One-touch fitting Nil Rc + + : : P port 1/4 CE-compliant C8 8 One-touch fitting F G B 20 20 stations R P R Nil Q N7 CE-compliant 1/4" One-touch fitting N NPT A, B port C6, C8 A N9 5/16" One-touch fitting T NPTF R port 1/4 B Note) For more than 8 stations, supply

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Parts (b) Lever Description Note C4: A, B port One-touch fitting for 4 C6: A, B port One-touch fitting for 6 No.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Type 42 How to Order 10--SS3YJ7--42-05 -C6 Applicable solenoid valve 10-SYJ714M10-SYJ724MClean series Applicable blanking plate assembly SYJ700-10-2A R port 1/4 Stations -+ -+ -+ -+ A port size P, R port thread 02 : 20 2 stations : 20 stations P Port 1/4 A A 01 C6 C8 N7 N9 Rc1/8 One-touch fitting for f6 One-touch fitting for 8 Nil Rc G NPT NPTF P R X F N T A port 1/8 One-touch fitting for

Series VQ Metal Seal/Rubber Seal Body Ported

(Specify a model with 9 to 16 stations by using a manifold specification form.) Manifold Specifications Series Porting specifications Applicable stations Port location Port size P, R A, B C3, C4, M5 C3, C4, C6, M5 C4, C6, C8 C6 C6 C10 VQ0 VQ1000 VQ2000 Side Side Side Max. 16 Max. 16 Max. 16 SA applicable to Series EX300 SB applicable to MELSECNET/MINIS3 Data Link (Mitsubishi Electric.)

SX

0.8 2-1.5 die-cast hole (For manifold gasket positioning) L plug connector (L): SX3220-LC4 C6 M plug connector (M): SX3220-M-C4 C6 300 (Lead wire length) 2-One-touch fittings (A, B port) 2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 Applicable tubing O.D.: 4, 6 Polarity indicator Manual override Manual override (Mounting hole for manifold) A: Orange B: Green A: Orange B: Green

0.4

rail clamp screw R R 62.5 X 3 X 3 55.5 7.7 40.5 B B B B B B B B 12 12 P P 25 1 1 A A A A A A A A 18.7 9.5 (12) 33.5 (7.5) C8: 8 One-touch fitting C8 [1(P) SUP port] C3, C4, C6, M5 [4(A), 2(B) port] 20.5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread P = 10.5 34 The dashed lines indicate DIN rail mounting [-D] (with DIN rail mounting bracket).

SYJ3000/5000/7000

SUP spacer assembly ARBYJ5000-00-P Thread type A, B port size A, B port 1/8, C6 Nil F N T Rc G NPT NPTF P port 1/4 01 1/8 One-touch fitting for 6 C6 N7 One-touch fitting for 1/4" Type 43 (5 Port/Base mounted) How to Order SS5YJ5 43 05 C4 Stations -+ -+ A B 02 2 stations P, R port thread type R port 1/8 : : R P 20 A, B port C4 20 stations Nil F N T Rc G NPT NPTF P port 1/8 A, B port size

Series SV

A, B port size (metric) A, B port size (inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 M A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 M 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting A, B ports mixed

VFR

closed center: VFR630 -F(Z) 3 position exhaust center: VFR640 -F(Z) 3 position pressure center: VFR650 -F(Z) 0 1 0 1 0 1 2 position double: VFR620 -F(Z) 263 3-2.3 146 93 (Electrical entry) 45 117 A B A B 72 90 108 PE EA EB PE P Manual override 170 186 4-9 (Mounting hole) (Non-locking) G 1/2 Light/Surge voltage suppressor (For FZ) Other dimensions are the same as the single type. 3-5-97

Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: -, Option: -

Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: C8 [ø8 (5/16") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: -, Option: -

Fieldbus System

DIN rail clamping screw 8 R R 11.5 63.5 62.5 56.6 3 3 X X 40.5 B B B B B B B B 12 12 P P 25 1 1 A A A A A A A A 18.5 9.5 7.5 (12) (7.5) C3, C4, C6, M5 [4(A), 2(B) port] C8: 8 One-touch fitting C8 [1(P) SUP port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 20.5 P = 10.5 34 L2 = L1 10.5 L3 = 10.5 x n1 + 65.5 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4)