CQS

For Safety Instructions and Actuator Precautions refer to pages 7-13-3 to 7-13-6.

CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 28 28 28 30 42 42 48 56 20 25 32 40 38.3 42.1 53.8 64.6 28 28 28 30 16 20 22 30 42 42 48 56 35.8 39.8 49.4 58.4 18.1 20.7 23.6 27.3 3.2 3.2 4.5 4.5 13 15 17 21 26 28 28 36 50 57 61.4 71.4 47.8 54.8 57.4 65.4 21.2 21.3 25.6 26.3 3.2 3.2 4.5 4.5 13 15 17 21 20 25 32 40 Knuckle Pin Rod End Nut Clevis Pin

Cylinder with Lock Series CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 28 28 28 30 42 42 48 56 20 25 32 40 38.3 42.1 53.8 64.6 28 28 28 30 16 20 22 30 42 42 48 56 35.8 39.8 49.4 58.4 18.1 20.7 23.6 27.3 3.2 3.2 4.5 4.5 13 15 17 21 26 28 28 36 50 57 61.4 71.4 47.8 54.8 57.4 65.4 21.2 21.3 25.6 26.3 3.2 3.2 4.5 4.5 13 15 17 21 20 25 32 40 Knuckle Pin Rod End Nut Clevis Pin

MTS

15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5 47.5 47.5 20 15 17 37 43.5 33 43.5 33 16 23 19 24.5 24.5 19 27 27 27 27 63.5 63.5 63.5 63.5 22.5 17 23 43 59.5 39 59.5 39 20 26 22 25.5 25.5 22 30 30 30 30 67 67 67 67 23.5 20 26 46 63 42 63 42 25 32 25 28.5 28.5 25 36 36 36 36 88.5 88.5 88.5 88.5 26.5 23 32 52 84.5 48 84.5 48 32 32.5 30 30 30 30 36.5 36.5 36.5 36.5 102.5

Square Tube Type Air Cylinder Series MB1

42 53 53 73 73 MB-B03 MB-B05 MB-B08 Rotation Bore size (mm) A Method for longitudinal mounting of clevis bracket When there is no air cushion, the unit is equipped with rubber bumpers.

HRX-OM-R016

5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure

70astamb1

42 53 53 73 73 MB-B03 MB-B05 11 11 MB-B08 Rotating Angle Method for longitudinal mounting of clevis pivot bracket When there is no air cushion, the unit is equipped with rubber bumpers.

mb1

42 53 53 73 73 MB-B03 MB-B05 11 11 MB-B08 Rotating Angle Method for longitudinal mounting of clevis pivot bracket When there is no air cushion, the unit is equipped with rubber bumpers.

HRX-OM-W038

5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure

AC Servo Motor Driver (SSCNET /H Type)

Axis No. settings 13 5. Parameter list (Driver side) 15 6.

7

(47.5) 24 30 50 20 4.5 5 11 13 37.5 42.5 25 25 30 47.5 (53) 3 A VXD2 64.5 52.5 Model Mounting bracket dimensions Port size P a b d e f 1/4, 3/8 1/2 48.5 47 55 53.5 67 52 28 27 VXD2 3 A ( ): Denotes the Normally Open (N.O.) dimensions.

Solid State Auto Switches

D-B35 Reed switch Contacts protection resistance () () Current limiting resistance DDLight emitting diode (LED) Diode 1649 Series D-B3 Dimensions (mm) Terminal conduit type D-B3 Terminal conduit type D-B3J 42 42 500 G 1/2 59 38 59 38 6 41.5 41.5 85 69 35 35 42 8 8 59 1 2 85 Recommended minimum bending radius for lead wire RT : 25 mm or more 120C : 50 mm or more Terminal part Dimensions for

Speed Controller with One-touch Fitting

(12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 20 (21) AS321F-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS321F-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS321F-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS321F-02

OMU0023

77 4D M 109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X

Vacuum Unit

How to Order Valve Manifold Assembly t Option3 (For details on the Function/Application, refer to page 42.) Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

Stainless Steel One-touch Fittings Series KG

A M Weight (g) M5 D L P Nylon Urethane KGU04-01 KGU04-M5 M5 0.8 4 11 20 13 12 22 35 10.4 36 38 40 2.2 2.2 39.5 42 46 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 M5 0.8 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 42.5 45.5 49 51 13 1 8 1 4 3 8 1 8 17 12.8 6 12.8 13.4 13.4 14 17 52.5 55.5 56.5 25.6 17.7 16 24 36 17 15.2 1 4 KGU08-02 8 18.5 15.2

Series KG Stainless Steel One-touch Fittings

A M Weight (g) M5 D L P Nylon Urethane KGU04-01 KGU04-M5 M5 0.8 4 11 20 13 12 22 35 10.4 36 38 40 2.2 2.2 39.5 42 46 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 M5 0.8 42.5 45.5 49 51 13 1 8 1 4 3 8 1 8 17 12.8 6 12.8 13.4 13.4 14 17 52.5 55.5 56.5 25.6 17.7 16 24 36 17 15.2 1 4 KGU08-02 8 18.5 15.2

2/3 Port Valve

Teflon is a registered trademark of DuPont. 4.2-42