0.01

(A + 72 + B) 76.5 (72 + A) 77 (72 + A) Total length 125.5 (A + 114.5 + B) 120 (114.5 + A) 125.5 (A + 114.5 + B) 120 (114.5 + A) 120 (114.5 + A) Port size w C06 (C04) 02 (C04) C08 (C06) 02 (C06) 02 (C08) Port size w C10 (C08) 02 (C08) C12 (C10) 02 (C10) 02 (C12) Model Port size q C04 (C06) C04 (02) C06 (C08) C06 (02) C08 (02) Model Port size q C08 (C10) C08 (02) C10 (C12) C10 (02) C12 (02

5 Port Solenoid Valve SY Series

BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 1, 5, 3 4, 2 (A, B) 1, 5, 3 4, 2 (A, B) DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 129 175 (sbar) ) (sbar) ) Single Single 2 position 125 167 2 position 0.23 0.93 4.1 3.3

LEC-OM07605CN

(c) AERSBAN-_SET SD [:mm] (A B) 40 [mm] [mm] 2-5 17.5 30 B0.3 10 L A 35 C +0.3 6 -0.2 24 0 24 0 3 7 6 22 ()M4 3 5 11 . A B C L AERSBAN-DSET 100 86 30 2 A 70 AERSBAN-ESET 70 56 B1 B 45 11 22 11.

Series AK1000

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

P Q PF2M7mW-C4/C6/C8/N7(-L) A D A D 58 58 48 48 18 18 OUT1 OUT2 OUT1 OUT2 10.2 DC() DC(+) 1.4 10.2 DC() DC(+) 1.4 46.9 (Max. 53.9) 46.9 (Max. 53.9) 38.5 (30.9) 38.5 (30.9) 3 3 C 18 C OUT IN 18 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 2 x 3.4 OUT IN 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 68 2 x 3.4 68 28 [mm] 28 Model A C D P PF2M705/710W-C4(-L) 86.2

VM

VM220-02-30B VM-30AG Green VM220-02-30G VM-30AY Yellow VM220-02-30Y VM220-02-32R VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y VM-32AR Red Push button (Extended) VM-32AB Black VM220-02-32B VM-32AG Green VM220-02-32G VM-32AY Yellow VM220-02-32Y With a set of red, black, green, yellow VM-33A Push button (Flush) VM220-02-33 VM230-02-33 VM230-02-34R VM230-02-34B VM230-02-34G VM230-02-34Y

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Turn the manual override counterclockwise by 180 to set the E mark to "0", then it will be reset. 200V AC 220V AC Red Red 200V AC 220V AC Indicator light With light and surge voltage suppressor Circuit for DC Circuit for AC Light A () A (+) SOL SOL C (+) C ZNR Light () Due to the use of non-polar light, the VQZ series has no polarity.

5 Port Air Operated Valve

A), 2 (B) port] (4) 26.4 5 5 B 2 B 2 26.4 12 12 1/8 (Pilot port: Upward) 1/8 (Pilot port: Upward) 4 A 4 A 5 (1.6) 11.5 45.5 (6) 40.5 55.5 1502 VFA1000/3000/5000 Series 5 Port Air Operated Valve Body Ported/Single Unit Dimensions: VFA3000 Series/Body Ported 2 position single VFA3130(-F)(-P) 01 02 2 position double VFA3230(-P) 01 02 63.5 23 1/8, 1/4 [4 (A), 2 (B) port] 1/8, 1/4 [4(A), 2(B)port

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Elbow type Meter-out AS3201F-02 AS TMH ASD AS AS-FE KE AS-FG AS-FP AS-FM AS-D AS-T AS-D AS-T Meter-in AS3311F-02 Meter-in AS3211F-02 ASP ASN AQ ASV AK VCHC ASS ASR ASQ Component Parts Component Parts No.

Thermo-chiller/Rack Mount Type

Q = m x C x (T0 Tt) it = r x V x C x iT it = 1 x 20 x 4.2 x 103 x 12 900 = 1120 [J/s] 1120 [W] Q = m x C x (T0 Tt) it x 860 = c x V x 60 x C x iT it x 860 Cooling capacity = Considering a safety factor of 20%, 1120 [W] x 1.2 = 1344 [W] = 1 x 20 x 60 x 1.0 x 103 x 12 15 x 860 1120 [W] Thermo-chiller Q x t: Heat capacity [kJ] 20C Water bath Cooling capacity = Considering a safety factor

125

How to Order Sub-plate and Base Gasket Body size 22 42 VEX VEX VEX1 2 9 A VEX4 2A 1 A Port size Thread type Port size Thread type Symbol Port size A 1/8 B 1/4 Symbol Thread type Nil Rc F G N NPT T NPTF Symbol Port size A 1/4 B 3/8 C 1/2 Symbol Thread type Nil Rc F G N NPT T NPTF Sub-plate Base gasket VEX1 11 2 VEX4 4 Options/Part Number Description Part number VEX312-01 02 VEX322-01 02 VEX33202

JXCx-OMT0061CN

B RESET 72 - <>+JOG <>+1-052 B RESET <> 1-096 C RESET <> (1-097) <> C RESET <> <>OFF JOG OFF 1-098 OFF DRV C RESET <>ON SVRE ON DRIVE ON 1-099 <> SETOFF DRV C RESET <> <>1 2 (1-103) C RESET 1 [] A [a ] [] A [a ] 2 [SW] <> <> ( (1-106) RESET SVON ) C <>1 <> <> 1-144 RESET SVON D 73 - <> ON <>(M24V) 1-145 RESET SVON (1) D <> <> <> 1-146 RESET SVON

Modular Type Lubricators Series AL

106 2 x P (Port size) AF-A 90 A 106 AF-A 66 70 Bracket (Option) 13 3.2 AR-A 11 AL-A B C V Q OUT IN AW-A AC OUT AF AF AR With float switch Specifications AL AL Contact capacity: 15 VA (AC) 15 W (DC) Contact point: 1a, 1b AW AG E AV AF B Clearance for maintenance 210 Clearance for maintenance G 1/2 Float switch Part number: IS400-1 to 2 210 Bracket mount With float switch Model P A B C Q V

AZ1000

Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Seat material S Material PCTFE (Standard) PTFE 3) Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 No code TF SHP 3) PTFE recommended for applications such as within a process tool.

5 Port Air Operated Valve SYA3000/5000/7000 Series

Model/SYA720 Series (Body ported) Valve model Port size Flow rate characteristics Weight (g) Type of actuation Pilot port size b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) C [dm3/(sbar) ] C [dm3/(sbar) ] Cv b Cv P, EA, EB A, B Single Double Closed center 2 position 94 100 4.1 0.23 0.93 3.3 0.33 0.81 SYA720-02 1 4 0.39 0.31 0.65 0.70 3.4 [2.1] 2.4 0.35 [0.38] 0.38 0.82 [0.54] 0.63 2.9 3 position

Smooth Cylinder/Low Speed Cylinder

Auto switch mounting surface Bore size (mm) 32, 40, 50 63, 80, 100 Port side Port side C A C A B B Auto switch mounting surface Auto switch mounting surface Auto switch model Port side A, B, C side Port, A, B, C side qBQ-2 wBQ2-012 Two types of auto switch mounting bracket are used as a set.

SYA3000/5000/7000

SYA Model/Series SYA720 (Body ported) Valve model Port size Flow characteristics Mass (g) Type of actuation Pilot port size SYJA b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) Cv b Cv P, EA, EB A, B C [dm3/(sbar) ] C [dm3/(sbar) ] Single Double Closed center 94 100 2 position VZA 4.1 0.23 0.93 3.3 0.33 0.81 SYA720-02 1 4 0.39 0.31 0.65 0.70 3.4 [2.1] 2.4 0.35 [0.38] 0.38 0.82 [0.54] 0.63 2.9 3 position

Speed Controller with One-touch Fitting

03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Model/Series SYA720 (Body ported) Valve model Type of actuation Port size Flow characteristics Weight (g) Pilot port size (Nominal size) b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) C [dm3/(sbar) ] C [dm3/(sbar) ] Cv b Cv 132 177 P, EA, EB A, B Single Double Closed center 2 position 0.81 4.1 0.23 0.93 3.3 0.33 SYA720-02 1 4 0.82 [0.54] 0.63 0.39 0.31 0.65 0.70 3.4 [2.1] 2.4 0.35 [0.38] 0.38 2.9

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

(35) 33 (11) 2-4.5Mounting holes DIN rail clamp screw (5.5) Grommet (G) (7.5) 24 (2.5) U side 02: Rc(PT)1/4 n Manual override 5 A A A A 4 2 2 2 2 (L4) (L3) L2 L1 3 2 P=19 1 21 6 Stations D side 1.8 (C6, C8) 17.5 3.5 20.5 10.5 300 75.5 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (C10) (02) 63 56 (11) PE port R 3 1 P (24) 9 2-Rc(PT)1/4 P(SUP) port 2-Rc(PT)1/4 R(EXH) port 21 10 41 DIN terminal