CL

BP BP lock-up port, Unlocked when pressurized A BP BP lock-up port B With rod boot S + Stroke Long stroke 2-Rc P EA D e 4-LD Plug cap 2 positions Plug cap 2 positions Plug cap 2 positions Width across flats KA l LS + Stroke ZZ + Stroke h + l ZZ + l + Stroke Bore size (mm) Stroke range (mm) F FA GA GB GC H1 K KA LD LH J A AL B B1 BX BY C D EA EB BP Without rod boot With rod boot Up to 500

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

: CHAD 2-Rc P Cushion adjustment screw V T GA 4-J GB Air release Width across flats G CDH9 MM R (max.) d W D E W a MA CX 0.3 F NA NB U A K C L 0 -0.3 S + Stroke H B Z + Stroke RR ZZ + Stroke With rod boot e 10 l f h + l Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) A a B C CDH9 CX D d F G GA GB J K L MA MM NA NB P R RR S E +0.043 0 +0.043 0 +0.043 0 +0.043 0 +0.052 0 +0.052 0 +0.052

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Head Side Trunnion Style Head side trunnion style: CG1TN DZZ 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st Bore size (mm) Z ZZ Z ZZ Z ZZ Z Bracket mounting range 20 25 32 40 118 139 143 164 168 189 -X 123 144 148 169 173 194 198 219 2-TD8 (Pin O.D.) 126 150 151 175 176 200 201 225 20143 171 168 196 193 221 218 246 Data Clevis Style Bore size (mm) Stroke range (mm) B CD CZ L RR TE

Compact Manifold Regulator

AP100 17 735 ARM11A/B Series Pressure Switch Block 56 ARM11AW Z A 0.4 0.2 0.6 0.5 20 MPa 24 q w 0.3 0.1 1. Accessory 2.

CM2

Please delete the unnecessary part. 1.4-10 Series CM2 Axial Foot (L) CM2L Bore size Stroke (mm) B LC LH Bore Stroke range K LT LX N NA NN S A B2 D H2 I P 1/8 1/8 1/8 1/4 B1 LD LS LZ X AL F MM Y G Z H ZZ H1 1to400 15.5 13 26 5 8 6.8 102 3.2 M8 X 1.25 M20 X 1.5 131 40 4 25 5 40 15 24 62 18 8 28 55 20 13 8 8 21 41 20 33.5 5.5 M10 X 1.25 1to450 19.5 17 32 6 8 6.8 102 3.2 M26 X 1.5 135 47 4 28

CXS

J K SS Y (Hexagon socket head set screw) D 1 L Z I M 1 G 0.2 (G) A H P 6.3 5 NN OO (Hexagon head bolt) PP (Hexagon nut) E N X (Hexagon socket head cap screw) F (Through) V (Opposite side: Same) (L) (Z) TT QQ (G) T Q U R UU (Piping port) (Opposite side: Same) (I) (L) (Z) N W C (mm) M N OO A B C D E G H I J K L NN P F Model 2-5.5 through 2-9.5 counterbore with depth 5.3 2-M4 x 0.7 with depth

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

CRQ2

Shaft through hole and female thread Shaft through hole and female thread Shaft through hole and female thread Middle-cut chamfer Middle-cut chamfer XA31 XA32 XA33 XA34 XA35 XA36 XA37 XA38 XA39 XA40 XA41 XA42 XA43 XA44 XA45 XA46 XA31 Y Corresponding shafts type available for combination 20, 30, 40 CRB1 XA33 K, T 10, 15, 20, 30, 40 XA34 MSU XA35 X, Z 20, 30, 40 J XA36 J K XA37 K CRJ

Free Mount Cylinder

C J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc1/8 Bore size (mm) Standard stroke NN T S Z K KA L MM P Q R 20 25 32 M5 x 0.8 with depth

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

2 x M5 x 0.8 2 2 x M3 x 0.5 thread depth 4 3H9 ( ) depth 3 +0.025 0 HA GA +0.025 0 B A 3H9 ( ) depth 3 NN x M4 x 0.7 thread depth 8 4 1 6.5 7 7 15 3.2 B A 6.5 13 6.5 13 H (NN 1) x H G Section AA Section BB (mm) Model F 25 25 40 50 38 50 ZZ 74 79 90 108 126 176 M 49 54 65 83 101 151 Z 48.5 53.5 64.5 82.5 100.5 150.5 K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

With auto switch: CDS1C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ~ = Width across flats KA With rod boot ~ = ~ = S + Stroke Z + Stroke ZZ + Stroke ZZ1 + l + Stroke Z1 + l + Stroke Type Bore size (mm) Stroke range B C P A CDH10 CX G J K MM N AL KA RR L CT D

V100

VQZ Model Weight Weight (g) VFN200N/Flow Characteristics VZ Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN212N-5D-02F 240 380 VS C 2.68 2.68 b 0.40 0.40 Cv 0.72 0.72 C 5.41 5.41 b 0.31 0.31 Cv 1.38 1.38 VFN212N-5D-02F-D 2 position Single solenoid VFN Double solenoid How to Order VFN212 5 D N 02 F Z NAMUR Interface Solenoid Voltage Nil D Single solenoid Double solenoid Thread

Secondary Batteries

How to Order 90 AR 30 t y K 03 B Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

NCA1

X B 5 S T D.R O D T H R E A D S T D.R O D B O R E S I Z E 3/4-16 1-14 1-14 1 1-3/8 1-3/8 500 5 600 6 800 8 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please contact SMC Customer Service for larger sizes R E F E R TO PAG E 22 F O R O P T I O N A L RO D T H R E A D S 3 Dimensional Drawings Expanded Series NCA1 MF1 1.5 ~ 6 WITH FRONT RECTANGULAR FLANGE BORE ROD KK A B V W Y ADD STROKE MM SM

Air Cylinder NCA1 Series

X B 5 S T D.R O D T H R E A D S T D.R O D B O R E S I Z E 3/4-16 1-14 1-14 1 1-3/8 1-3/8 500 5 600 6 800 8 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please contact P/A Customer Service for larger sizes R E F E R TO PAG E 22 F O R O P T I O N A L RO D T H R E A D S 3 Dimensional Drawings Expanded Series NCA1 MF1 1.5 ~ 6 WITH FRONT RECTANGULAR FLANGE BORE ROD KK A B V W Y ADD STROKE MM SM

LEC-OM02704CN

ON DOCOM(7.6) OK ON OK 7 17 7MR Configurator a d e b f c g i j h i k m (1) (a) Enter (2) (b) Enter (3) (c) Enter (4) (de) (5) (f) (6) (g) (7) (h) (8) LSPLSN()ON (i) LSPLSNONLSPLSN (9) Z ON (j) Z 7 18 7MR Configurator (10)(k) (11)(l) (12)(m) (13)CC-Link CC-Link 7.7.3 7 19 7MR Configurator a b (1) (a) (2) (b) OFFONCC-Link 7.7.4 (DO) ON/OFF DO 7 20 7MR Configurator OKDO ON OKDO

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] LE-CA-1-B 270 LE-CA-3-B 520 LE-CA-5-B 870 LE-CA-8-B 1370 LE-CA-A-B 1710 LE-CA-B-B 2560 LE-CA-C-B 3400 U V W Red White Black Connector A2 terminal no. B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

Environment

PB H thread depth C Vent hole Note 3) J PC EV Z T M U D K Note 2) L R 4 x O1 thread depth R W A + Stroke B + Stroke S EH M 6 x MO thread depth MR XA H9 depth XA MH Section XX details MA ML + Stroke MC MD Section XX XB XA H9 XA [mm] Incremental encoder Absolute encoder B C D EH EV Without lock With lock Without lock With lock A W Z A W Z A W Z A W Z Size Stroke range [mm] 25 15 to 100 238