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S) PB PA PB SMC B PA A A B SMC SMC (mm) Dimensions (Max.

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

MY1

Wn Y-axis Yn Z-axis Zn X-axis Xn Z X Wa 0 mm 5 mm 0.88 kg 65 mm 111 Wb 0 mm 42.5 mm 4.35 kg 150 mm 210 Y Y Wc 111 mm 42.5 mm 0.795 kg 150 mm Wd 210 mm 42.5 mm 0.5 kg 150 mm n = a, b, c, d 3.

CJ2

M5 x 0.8 Piping port M5 x 0.8 S + Stroke Z + Stroke Rod end nut Rod End Nut 2-LC Mounting hole Material: Iron Applicable bore (mm) 10 16 B H C d Part no.

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06 Thread type Nil Rc Plug-in VFR5000 P B 06 G F N NPT Non plug-in VFS5000 S B 06 NPTF T Note) Bottom ported is not available for external pilot.

5

+0.1 A NA B 0 0.3 S + Stroke H U CZ 0 0.3 Z + Stroke R ZZ + Stroke (mm) * A clevis pin and retaining rings are included.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Order 300 S V7 S B 3 M2 LEFB 32 q w e r y t u i o !

1

CJ1 Series CJ2 Series CA2 B port D port C port A port CJP D port C port A port B port CJ2 S + Stroke B S + Stroke A Z + Stroke (A + B) CM2 D port C port Z S NB Bore size (mm) CG1 A port Stroke B B port Stroke A 10 150 36.5 21 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

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to Z kgm2 IB m1 m2 r1 r2 Axis on the center gravity of B part of attachment and parallel to Z Z2 Weight of A part of attachment kg MHF kgm2 Weight of B part of attachment kg Total moment of inertia for attachment I Distance between Z and Z1 axis mm Inertia moment around the Z1 axis of A part of attachment kgm2 IZ1 MHL Distance between Z and Z2 axis mm Inertia moment around the Z2 axis of

Battery-less

3 A-A B B @1 !8 B-B w Component Parts No. Description Material Note No.

V100

S Z Nil 14 1 2 1 20 2 Indicator light is not available for grommet type.

LJ1H

(B contact) 2 pcs.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 3 position pressure center 2(B) (A)4 Light/Surge voltage suppressor 5 Electrical entry for D, Y (10-SY500/7000 only) Electrical entry for G, H, L, M, W (EA)5 1 (P) 3(EB) Nil S Z Nil S Z R U Without light/surge

Hydraulic

Single clevis type: CHAC V T 2-Rc P Cushion adjustment screw GA GB 4-J Air release CDH9 Width across flats G MM R (max.) d W D E W a MA A K F NA NB U CX 0.3 S + Stroke H L 0 -0.3 C Z + Stroke RR B ZZ + Stroke With rod boot e 10 f l h + l Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) A a B C CDH9 CX D d E F G GA GB J K L MA MM NA NB P R RR S +0.043 0 +0.043 0 +0.043 0 +0.043 0 +0.052

15

[mm/s] (Operating condition) a1: Acceleration [mm/s2] T1 = V/a1 [s] T3 = V/a2 [s] = = 0.57 [s] T2: Constant speed time can be found from the following equation.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

B C D R Model CDRBU2WU10-S 22 45.5 14 M5 x 0.8 CDRBU2WU15-S 25 47 18 M5 x 0.8 CDRBU2WU20-S 34.5 51 20 M5 x 0.8 CDRBU2WU30-S 47.5 55.5 22 M5 x 0.8 CDRBU2WU10/15-D Double vane type CDRBU2WU20/30-D A port B port A port B port A port B port Free mounting rotary actuator Free mounting rotary actuator Free mounting rotary actuator Cover Angle adjuster Angle adjuster Angle adjuster Switch unit Switch

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B C D R Model CDRBU2WU10-S 22 45.5 14 M5 x 0.8 CDRBU2WU15-S 25 47 18 M5 x 0.8 CDRBU2WU20-S 34.5 51 20 M5 x 0.8 CDRBU2WU30-S 47.5 55.5 22 M5 x 0.8 CDRBU2WU10/15-D Double vane type CDRBU2WU20/30-D A port B port A port B port A port B port Free mounting rotary actuator Free mounting rotary actuator Free mounting rotary actuator Cover Angle adjuster Angle adjuster Angle adjuster Switch unit Switch

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

B C D R Model CDRBU2WU10-S 22 45.5 14 M5 x 0.8 CDRBU2WU15-S 25 47 18 M5 x 0.8 CDRBU2WU20-S 34.5 51 20 M5 x 0.8 CDRBU2WU30-S 47.5 55.5 22 M5 x 0.8 CDRBU2WU10/15-D Double vane type CDRBU2WU20/30-D A port B port A port B port A port B port Free mounting rotary actuator Free mounting rotary actuator Free mounting rotary actuator Cover Angle adjuster Angle adjuster Angle adjuster Switch unit Switch

CRB2/CRBU2/CRB1

port is pressurized. 73 Series CRB1 Dimensions: 50, 63, 80, 100 (with Auto Switch Unit) Single vane type/Double vane type CDRB1BW-S, D V 6-Q 4-Z through b Keyway dimensions L h Model b (h9) h (h9) L !

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.