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H B C 8mm 12mm 20mm Non-standard motor switch P N S Ground ball screw Rolled ball screw Slide screw Motor output: 100W None N.C. (B contact) 2 pcs.

V

1 3 Position/Exhaust Center 2 2 Position T H R E A D P O R T I N G Rc* Remove (N) when ordering N NPT F G* Remove (N) when ordering 02 1 4 (Body Size 2) 03 3 8 (Body Size 3) 04 1 2 (Body Size 4) 06 3 4 (Body Size 4) D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E 200 D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E 300 D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 40.1 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 39.3 63.3 79.8 4-One-touch fitting 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting One-touch fitting [4 (A), 2 (B) port] Applicable tube

Electric Actuator/Slider Type

How to Order LEFS 32 R T7 B 200 B S 5 S2 q w e r t y !

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Color of lead wire Black Symbol Contact C Z I SE3 Common A White Normally Open B (N.C.)

CV/MVGQ

2 10-15-13 14 Series CVJ3 Single Acting, Spring Return/Basic Style (B) M5 x 0.8 CVJ3B S Bore size Stroke M5 x 0.8 28 [34.5] 48 [49] Manual override Width across flats B1 Rod End Nut Bore size (mm) 10 16 H1 B1 7 3.2 16 [17] S + Stroke Z + Stroke 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) NN NB NA MM HX H F D C B A ND Z Z S Z S Z S S

CV/MVGQ

Z + 2 x Stroke 7 3.2 8 4 C J G5-S [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) CV LA H F D LY NN C LX Y B LC LT MM X A LB LH LZ NA NB S Z Z S Z S Z S 128 [129] 129 [130] 116 [117] 117 [118] 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106] 10 16 28 8 4 M8 x 1 84 14 24 7 72 12 1.6 5 60 15 15 9 32 9.5 37.5 4.5 16.5 M4 x 0.7 12.5 52.5 MVGQ 28 8 5 M10

Air Slide Table

72 42 60 30 36 B N x M5 x 0.8 F N 2 1 x F 29 3 Cross-sectional view B-B 2 x M5 x 0.8 thread depth 7 27 0.5 M 7 ZZ Z J I 16.5 Pilot port 3 x M5 x 0.8 (Plug: Width across flats 7) +0.030 5H9 ( 0 ) depth 3 +0.030 5H9 ( 0 ) depth 3 +0.030 5H9 ( 0 ) depth 3 24 G H 24 G H HA 10.7 16.3 A 9.5 5.1 10 A 6 6 NN x M6 x 1 thread depth 9 HB GB GB HB B stroke: 50 mm B stroke: 20 to 40 mm Cross-sectional

LJ1H

H B C 8mm 12mm 20mm Non-standard motor switch P N S Ground ball screw Rolled ball screw Slide screw Motor output: 100W None N.C. (B contact) 2 pcs.

Air Cylinder

Z ZZ S Z ZZ S Z ZZ S Z ZZ S Z ZZ 20 87 132 141 112 157 166 137 182 191 25 87 136 145 112 161 170 137 186 195 32 89 138 147 114 163 172 139 188 197 164 213 222 40 113 168 179 138 193 204 163 218 229 188 243 254 213 268 279 Symbol Bore size The bracket is shipped together.

MY1

MY-S A 2-G 2-H F E C D A B Side support B MY-S B 2-J E C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 A 61 67 81 100 120 142 172 G 6.5 8 9.5 11 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1C16 MY1C20 MY1C25 MY1C32 MY1C40 MY1C50 MY1C63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B M10 x 1.5 55 14.8 8.5 9 14 80

Smooth Cylinder/Low Speed Cylinder

(mm) B 12 18.3 C 14 20 D 4 5 F 8 8 FB 13 19 FC 4.5 5.5 FT 1.6 2.3 FX 24 33 FY 14 20 FZ 32 42 GA 8 8 GB 5 5 H 28 28 MM M4 x 0.7 M5 x 0.8 NA 12.5 12.5 NB 9.5 9.5 NN M8 x 1.0 S 46 47 T A 15 15 Z 74 75 Bore size (mm) 10 16 M10 x 1.0 Double Clevis Style (D) Bore size Stroke CJ2XD Z + Stroke S + Stroke Rod end nut Piping port 2 x M5 x 0.8 Clevis pin CZ 0 -0.3 B 0 -0.3 T-bracket For details, refer

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S) PB PA PB SMC B PA A A B SMC SMC (mm) Dimensions (Max.

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

MY1

Wn Y-axis Yn Z-axis Zn X-axis Xn Z X Wa 0 mm 5 mm 0.88 kg 65 mm 111 Wb 0 mm 42.5 mm 4.35 kg 150 mm 210 Y Y Wc 111 mm 42.5 mm 0.795 kg 150 mm Wd 210 mm 42.5 mm 0.5 kg 150 mm n = a, b, c, d 3.

CJ2

M5 x 0.8 Piping port M5 x 0.8 S + Stroke Z + Stroke Rod end nut Rod End Nut 2-LC Mounting hole Material: Iron Applicable bore (mm) 10 16 B H C d Part no.

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06 Thread type Nil Rc Plug-in VFR5000 P B 06 G F N NPT Non plug-in VFS5000 S B 06 NPTF T Note) Bottom ported is not available for external pilot.

5

+0.1 A NA B 0 0.3 S + Stroke H U CZ 0 0.3 Z + Stroke R ZZ + Stroke (mm) * A clevis pin and retaining rings are included.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Order 300 S V7 S B 3 M2 LEFB 32 q w e r y t u i o !

1

CJ1 Series CJ2 Series CA2 B port D port C port A port CJP D port C port A port B port CJ2 S + Stroke B S + Stroke A Z + Stroke (A + B) CM2 D port C port Z S NB Bore size (mm) CG1 A port Stroke B B port Stroke A 10 150 36.5 21 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com