Compact 5-Port Solenoid Valve

q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.

Modular Design with Uniform Body Style

m28 51 m27.8 61.5 Optional specifications Semi-standard PC/PA bowl Metal bowl Metal bowl with level gauge Bracket mount Panel mount With auto drain Model With barb fitting With drain guide With drain cock With drain guide With drain cock With drain guide M N Q R S T U V W Y Z B B B B B B B AW20-D 30 34 43.9 5.4 15.4 55 2.3 29.7 28.5 14 6 104.9 91.4 87.4 93.9 AW30-D 41 40 46 6.5 8 53 2.3

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For 90 (Top view from long shaft side) For 100 (Top view from long shaft side) For 100 (Top view from long shaft side) For 90 (Top view from long shaft side) A port B port A port B port A port B port A port B port (Long shaft side) (Long shaft side) (Long shaft side) !83 e i e i u !2 u !2 w !4 w !7 !6 Internal rubber bumper q !4 q !0 Internal rubber bumper !1 !1 o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

B S 90 90 W B S R73 CDRB1 80 With auto switch Number of auto switches S Nil 1 pc.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

For 90 (Top view from long shaft side) For 100 (Top view from long shaft side) For 100 (Top view from long shaft side) For 90 (Top view from long shaft side) A port B port A port B port A port B port A port B port (Long shaft side) (Long shaft side) (Long shaft side) !83 e i e i u !2 u !2 w !4 w !7 !6 Internal rubber bumper q !4 q !0 Internal rubber bumper !1 !1 o !

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B Supply valve (N.O.) and release valve Applicable to plug connector. (Connector assembly with rectifier is attached.) Y DC: 0.45 W (With indicator light: 0.5 W) 24 VDC and 12 VDC are applicable to 0.45 W.

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D-F9W 12 A B W 16, 20, 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com W A B 32, 40 D-A9 D-M9 D-F9W Auto switch model D-F9BAL Symbol A B W A B W A B W Standard Stroke 12 16 20 25 32 40 5.5 6 2.5 0.5 1 1.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 14.5 15 11.5 9.5

0.4

e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2)

Rotary Actuator/Vane Type

q END w END q A B A B B A Switch for rotation END q Switch for rotation END q Switch for rotation END w Switch for rotation END w Auto switch B port A port * Solid-lined curves indicate the rotation range of the output shaft with single flat (key).

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

M5 x 0.8 VQD1151-M5 0.06 0.31 0.22 0.05 0.10 0.22 0.07 Base mounted (With sub-plate) U W VQD1151M5 0.28 0.27 0.07 0.25 0.27 VQC Construction SQ Component Parts JIS Symbol VQ0 (A) 4 (B) 2 No q w e r t y u i o !

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J R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G H -1 -2 -6 -8 -C -J -N -R -W -Z With bracket (With set nut) Float type auto-drain (N.C.)

REA/REB

MVGQ Calculate (WA) from the formula for the tentatively determined bore size Review of bore size, stroke and Lo W > WA CC RB W WA (Refer to data (B) on page 10-2-28.)

REA/REB

8 Stainless steel Wear ring B Special resin Cylinder tube w !

LJ1H

Non-standard motor switch Motor output: 100W H B 8mm 12mm Nil W None N.C. (B contact) 2 pcs.

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Battery-less

3 A-A B B @1 !8 B-B w Component Parts No. Description Material Note No.

SQ1000/2000

5 1 3 (R1) (P)(R2) u u SQ1531 SQ1530 (A) (B) 2 4 (A) (B) 2 4 5 1 3 (R1)(P)(R2) 5 1 3 (R1) (P)(R2) Dual 3 port valve: SQ1 31 A B C SQ1A31 Parts list 4 2 y e e q w w No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

CRB2/CRBU2/CRB1

B S 90 Standard 90 W B S R73 CDRB1 80 With auto switch Number of auto switches S Nil 1 pc.