Smooth Cylinder/Low Speed Cylinder

(mm) B 12 18.3 C 14 20 D 4 5 F 8 8 FB 13 19 FC 4.5 5.5 FT 1.6 2.3 FX 24 33 FY 14 20 FZ 32 42 GA 8 8 GB 5 5 H 28 28 MM M4 x 0.7 M5 x 0.8 NA 12.5 12.5 NB 9.5 9.5 NN M8 x 1.0 S 46 47 T A 15 15 Z 74 75 Bore size (mm) 10 16 M10 x 1.0 Double Clevis Style (D) Bore size Stroke CJ2XD Z + Stroke S + Stroke Rod end nut Piping port 2 x M5 x 0.8 Clevis pin CZ 0 -0.3 B 0 -0.3 T-bracket For details, refer

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

Table of Contents

3 8 1 2 3 4 S L, Z S L, Z S Note ) Thread PB 1 32A 40A 50A AC Flange DC Note) Surge voltage suppressor is attached in the middle of lead wire.

Table of Contents

time (s/90) MHY2-20D MHW2-32D 6 50 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 5 40 4 30 3 20 2 10 1 0 0 0.2 0.4 0.6 0.8 0.2 0.4 0.5 0.3 0.6 Operating time (s/90) Operating time (s/90) MHY2-25D MHW2-40D 20 200 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 15 150 10 100 5 50 0 0 0.2 0.4 0.6 0.8 1.0 0.2 0.4 0.6 0.8 1.0 Operating time (s/90) Operating time

15

The load factor for each direction can be obtained as follows. x = 0/250 = 0 y = 50/180 = 0.27 z = 200/1000 = 0.2 5. x + y + z = 0.47 1 1000 1500 1500 800 1000 1000 Lz 600 L2 [mm] L1 [mm] L3 [mm] 400 500 500 200 Ly Lx 0 5 10 15 20 25 0 0 5 10 15 20 25 0 0 5 10 15 20 25 0 Work load [kg] Work load [kg] Work load [kg] 808 A Model Selection LEFB Series Motorless Type Table Accuracy (Reference

Table of Contents

VQ7-8-FG-S-A03 VQ7-6-FG-S-A03 VQ7-8-FG-S-A04 VQ7-6-FG-S-RA02 VQ7-8-FG-S-RA03 VQ7-6-FG-S-RA03 VQ7-8-FG-S-RA04 3-10-5 6 For details about certified products conforming to international standards, visit us at www.smcworld.com.

5

(mm) Bore size A B C D F GA GB H LB LC LH LT LX LY LZ MM NA NB NN S X Y Z 10 15 12 14 4 8 8 5 28 15 4.5 9 1.6 24 16.5 32 M4 x 0.7 12.5 9.5 M8 x 1.0 46 5 7 74 16 15 18.3 20 5 8 8 5 28 23 5.5 14 2.3 33 25 42 M5 x 0.8 12.5 9.5 M10 x 1.0 47 6 9 75 144 Smooth Cylinder Double Acting, Single Rod CJ2Y Series Dimensions Double foot (M) CJ2YM Bore size Stroke Z REA H Mounting nut Mounting nut F

V100

Rated voltage For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type Electrical entry 24 VDC, 12 VDC, 6 VDC, 5 VDC, 3 VDC Grommet L plug connector M plug connector G: 300 mm lead wire L: 300 mm lead wire M: 300 mm lead wire MN: Without lead wire Light/Surge voltage suppressor Nil S Z R U Without light/surge voltage suppressor With surge voltage suppressor With light/surge

Battery-less

LEFS LEFB LEY LEYG LESYH LES LESH LEHF LER JXC51/61 JXC 1 LES25mEm Vertical Horizontal 6 6 Lead 8: LES25 EK 5 5 Lead 8: LES25 EK Work load [kg] Work load [kg] 4 4 3 Lead 16: LES25 EJ 3 Lead 16: LES25 EJ 2 2 1 1 0 0 0 100 200 300 400 500 Speed [mm/s] 0 100 200 300 400 500 Speed [mm/s] Cycle Time Graph (Guide) 1.80 100 mm/s 1.60 1.40 1.20 200 mm/s Time [s] 1.00 300 mm/s 0.80 0.60 0.40 400 mm

1

Dimensions Double acting, Single rod Single acting, Spring return Single acting, Spring extend Z + Stroke H + Stroke Z Z Z Double acting Single acting (Spring return) Single acting (Spring extend) Action F H F H Without switch With switch Without switch With switch Without switch With switch Bore size (mm) 5 10 15 5 10 15 5 10 15 5 10 15 6 8 9 42 42 9 8 47 52 57 47 52 57 52 62 67 52 62 67

Aluminum High Vacuum Angle Valve

to 60C Heater With 100C heater With 120C heater D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

LJ1H

Left Top Bottom 2 3 4 5 2m 3m 4m 5m Axial entry Right entry Bottom entry Specifications Intermediate strokes 100 5.2 200 6.0 300 6.8 400 7.5 500 8.3 5 to 40 (with no condensation) 10 74 600 mm kg C kg N mm/s mm Standard stroke For manufacture of strokes other than the standard strokes on the left, add "-X2" at the end of the part number.

Air Cylinder

N Rubber bumper 100 CG1 25 B S Z N CDG1 With auto switch M9BW 100 B 25 N S Z With auto switch (Built-in magnet) Number of auto switches Rod end thread Mounting Nil Male rod end F Female rod end Nil 2 pcs. S 1 pc. n n pcs.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 3 position pressure center 2(B) (A)4 Light/Surge voltage suppressor 5 Electrical entry for D, Y (10-SY500/7000 only) Electrical entry for G, H, L, M, W (EA)5 1 (P) 3(EB) Nil S Z Nil S Z R U Without light/surge

CRB2/CRBU2/CRB1

CRB1 (mm) d1 = d1 = Q1 = M Q1 = M d1 (mm) Shaft type Size 50 63 80 100 J X Z Size Shaft type 50 S Y S Y S Y S Y 4 to 5 Thread 63 4.2 4.2 4.2 4.2 L1 = M5 x 0.8 4 to 6 L1 = Q1 Q1 80 5 5 5 M6 x 1 4 to 6.5 L1 100 6.8 M8 x 1.25 5 to 8 S axis Y axis J axis Z axis L1 Symbol: A43 Symbol: A44 Applicable to single vane type only A special end is machined onto both the long and short shafts, and

Rotary Actuator

LL LL Key dimensions [mm] Size Key dimensions LL 30 3 x 3 x 14 3 50 5 x 5 x 25 5 63 6 x 6 x 30 5 80 6 x 6 x 40 5 100 8 x 7 x 45 5 D215 CRA1 Series Symbol Shaft Pattern Sequencing2 -XA33 to -XA59 Applicable shaft type: X, Z, T, J, K How to Order C RA1 Z X D B J 50 90 M9BW A33 A34 C8 C30 Number of auto switches Magnet Nil 2 pcs. S 1 pc.

Table of Contents

(mm) d1 = d1 = Q1 = M Q1 = M d1 (mm) Shaft type Size 50 63 80 100 J X Z Size Shaft type 4 to 5 50 S Y S Y S Y S Y Thread L1 = L1 = 4 to 6 63 M5 x 0.8 4.2 4.2 4.2 4.2 4 to 6.5 Q1 Q1 80 M6 x 1 5 5 5 L1 5 to 8 100 M8 x 1.25 6.8 S axis Y axis J axis Z axis L1 Symbol: A43 Applicable to single vane type only Symbol: A44 Applicable to single vane type only A special end is machined onto both

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) d1 = d1 = Q1 = M Q1 = M d1 (mm) Shaft type Size 50 63 80 100 J X Z Size Shaft type 4 to 5 50 S Y S Y S Y S Y Thread L1 = L1 = 4 to 6 63 M5 x 0.8 4.2 4.2 4.2 4.2 4 to 6.5 Q1 Q1 80 M6 x 1 5 5 5 L1 5 to 8 100 M8 x 1.25 6.8 S axis Y axis J axis Z axis L1 Symbol: A43 Applicable to single vane type only Symbol: A44 Applicable to single vane type only A special end is machined onto both

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) d1 = d1 = Q1 = M Q1 = M d1 (mm) Shaft type Size 50 63 80 100 J X Z Size Shaft type 4 to 5 50 S Y S Y S Y S Y Thread L1 = L1 = 4 to 6 63 M5 x 0.8 4.2 4.2 4.2 4.2 4 to 6.5 Q1 Q1 80 M6 x 1 5 5 5 L1 5 to 8 100 M8 x 1.25 6.8 S axis Y axis J axis Z axis L1 Symbol: A43 Applicable to single vane type only Symbol: A44 Applicable to single vane type only A special end is machined onto both

CJ2

(mm) MM NA NN S T Z Bore LZ LY LX LT LH LC LB H GA F D A Y X 6 15 M3 X 0.5 16 M6 X 1.0 61 (66) 3 117 (122) 1.6 9 4.5 32 15 16.5 28 24 14.5 8 3 7 5 10 16 32 16.5 24 1.6 9 4.5 15 28 8 8 4 15 12.5 7 5 49 42 M4 X 0.7 12.5 M8 X 1.0 9 105 25 33 2.3 14 5.5 23 28 8 8 5 15 6 50 M5 X 0.8 M10 X 1.0 106 ( ) in S or Z dimensions: With auto switch With air cushion Dimensions not mentioned in the below