ASR

6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

42

) 96.2 71.7 96.2 71.7 58.2 VFR 1/8" External pilot port 44 106 9 9 91 44 106 49.7 58.2 Station number 1/8" External pilot port 49.7 9 9 U side entry (LU) VQ7 D side U side D side n n U side 8 8 Manual override 7 7 A B A B A B A B A B A A A B A B A B A B A B A A B B B A A A A A A A 6 6 5 5 215 P = 25 44 L1 L2 L1 L2 4 4 B B Indicator light 3 3 2 2 P = 25 1 1 27 38 50.5 27 38 50.5 44 Stations

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 4 2.5 1 4 1 4 3 8 KFF04-02 KFF06-02 KFF06-03 KFF08U-02 KFF08N-02 KFF10U-02 KFF10N-02 KFF12U-02 KFF12N-02 10 33.5 17 17 19 26.8 15 15 17 15.5 1.5 1.6 25 27 30 33.2 26.5 15.2 3 6 6 4 12 35.2 28.5 5 6 4 5 5.5 6.5 7 8 11 17 21 30 35 45 1 4 14 17 33.2 26.5 15 16.2 8 28 10 6.5 7.5 1 4 32 17 17 34.8 27.5 15 18.8 12 8 9 35 36 1 4 17 19 35.3 28.5 15 19.3 98 Series KF Insert Fittings Bulkhead

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

13.7 ASD330F-01-06SD 38.9 22.9 38.5 14 11.6 6 13.7 35.6 1.2 14.2 11.8 7.2 12 R 1/8 31.6 10.6 ASD330F-01-08SD 38.2 28.2 44.8 15.8 15.2 8 18.5 ASD430F-02-06SD 25.2 43.5 12.8 6 17 18 ASD430F-02-08SD 41.7 40.7 1.2 28.2 18.5 15 7.2 46.5 15.2 17 8 R 1/4 34.7 11 18.5 ASD430F-02-10SD 31 49.3 18.5 19.7 10 21 ASD530F-02-06SD 25.2 48.3 12.8 6 17 20.3 ASD530F-02-08SD 28.2 51.3 15.2 8 18.5 53.7 55.3 1.2

reduces flow setting time

Model AS1ll1FS-M5l AS2ll1FS-01 AS2ll1FS-02 AS3ll1FS AS4ll1FS Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Air Fittings & Tubing

F (mm) Port B min. port size Weight (g) L2 L3 L4 L5 L6 P Q1 Q2 M L1 89 110 99 125 108 139 40 KM12-04-02-6 6 17 65 72 81 91 97 112 1 4 10 18 29.5 19.5 29 10.6 16 6 12 4 61.5 KM12-04-02-10 10 KM12-06-02-6 6 KM12-06-02-10 10 KM12-08-03-6 6 KM12-08-03-10 10 47 1 4 17 10 19.5 31.5 21.5 31 13 17 7.5 13.5 6 73 55 3 8 19 11.5 22.5 35.5 24 34.5 15.5 18.5 9 14.7 8 86 SKM, #7 to #12 KM13 Tube O.D.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 17 (18) AS22l1FG-02-04(S)A 4 8.2 AS22l1FG-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS22l1FG-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 19 (20) AS32l1FG-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS32l1FG-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS32l1FG-02

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

-06SD ASD430F-02-08SD ASD430F-02-10SD ASD530F-02-06SD ASD530F-02-08SD ASD530F-02-10SD ASD530F-02-12SD ASD530F-03-06SD ASD530F-03-08SD ASD530F-03-10SD ASD530F-03-12SD ASD630F-04-10SD ASD630F-04-12SD 4 9.3 29.4 17.5 12.9 8 9.6 10 4.7 11.7 30.7 31 0.7 27.4 7.8 M5 x 0.8 6 11.6 32.5 20.6 13.7 18 6 11.6 14 38.5 22.9 38.9 13.7 36 12 14.2 11.8 7.2 34.7 1.2 31.6 10.6 R 1/8 8 15.2 15.8 44.8 28.2 38.2

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

106 116 137.5 148 L1 L2 L3 L4 1.12-21 VQZ1000/2000/3000 Body Ported Dimensions: VQZ3000 VV5QZ32 C (35) 34 Station (12) 2n-C6, C8, C10, 02 (7.5) (5.5) 26 C8: One-touch fittings for 8 C6: One-touch fittings for 6 (4) 44.5 Mounting holes Grommet (G) C10: One-touch fittings for 10 02: Rc(PT)1/4 U side DIN rail clamp screw n Manual override 5 A A A A 2 4 B 4 4 4 4 (L4) (L3) 2 L2 L1 3 B 2 2 P=19

Prevents Micro-Bubbles

P P P Stations are counted from station 1 on the left side, with the A (OUT) ports in front. PA PB PA P PB A A A N.O. PA PB PA A (OUT) port PB A A A Double acting N.C. N.O. Double acting LLA2A-03-02-C 1 set 1 set Manifold base part no. With flow rate adjustment LVA20A-02-C1 2 sets 2 sets Valve part no. (stations 1 & 2) LVA20A-02-C 1 set 1 set Valve part no.

SYJ300/500/700

Type 41 Applicable solenoid valve SYJ514SYJ514MSYJ524SYJ524MHow to Order SS3YJ5 41 05 C6 R port 1/8 Stations P, R port thread type A port size 02 : 20 P port 1/8 2 stations : 20 stations A A M5 01 C4 C6 N3 N7 M5 x 0.8 1/8 Nil Rc G NPT NPTF Applicable blanking plate assembly SYJ500-10-3A F N T 4 One-touch fitting 6 One-touch fitting A port M5 x 0.8, 1/8, C4, C6 5/32" One-touch fitting 1/4"

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Model AS1ll1FSGl-M5 AS2ll1FSGl-01 AS2ll1FSGl-02 AS3ll1FSGl AS4ll1FSGl Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

OMU0023

FF00 5 01 02 004B 0001 01 02 01 Acquires the INP signal information. Acquires the information repeatedly until the received information shows that the INP is "1". 6 Repeat steps 5-6 When INP becomes "1", the Return to Origin operation is completed.

ZP

Model A B C D Y Y A B C D Flat Model ZPT10D-6-A10 10 12 15 24 6 Flat with ribs U C ZPT13 -6-A10 U C ZPT16 -6-A10 U C ZPT16D-6-A10 ZPT10 -6-A10 16 18 16 25 7 10 12 15 12 21 1.7 1.8 3 13 Dimensions by Stroke 16 18 12.5 21.5 1.2 3.5 10 16 G Model Dimensions by Stroke E F E F 10, 13 16 ZPTD10-6-A10 35.5 73.5 23 36.5 74.5 G Model E F E F ZPTD20-6-A10 45.5 111.5 46.5 112.5 51 U C ZPT 20-6-A10 U

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" (L4) L3 (3.2) 113.7 U side D side 3.1 8 36.3 58.2 5.5 35 18 28.8 70.7 B COM A B COM A B COM A B COM A B COM A DIN rail holding screw Manual override DIN rail (Press and turn for the locking type.) 4(A) port side:

Secondary Batteries

Standard Type 1(P): One-touch fitting 2(A): One-touch fitting Applicable tubing O.D. (mm) Bracket assembly no. 1(P) 2(A) 4 90-VHK-B1A 4 4 6 90-VHK-B1A 6 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): One-touch fitting 6 8 90-VHK-B1A 8 2(A) Applicable tubing O.D. (mm) 2(A) Applicable tubing O.D.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

1/4 28.2 46.5 ASD430FG-02-08S 15.2 11 34.4 29.4 18.5 19.7 10 31 49.3 ASD430FG-02-10S 18.5 21 6 25.2 48.3 ASD530FG-02-06S 12.8 17 20.3 28.2 8 51.3 ASD530FG-02-08S 15.2 18.5 23 19.8 46.9 41.9 48.8 43.8 19 R 1/4 15.4 42.8 37.8 32.6 10 54.1 18.5 ASD530FG-02-10S 21 23.1 34.4 12 55.9 20.9 ASD530FG-02-12S 22 25.2 48.3 6 17 12.8 ASD530FG-03-06S 20.3 28.2 51.3 8 18.5 15.2 ASD530FG-03-08S 23 19.8

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

6 6 6 6 6 10 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com One-touch and screw-in connection Applicable tubing diameter B Model A 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 63 6 30.5 18 12.8 29 5 50

0.4

fitting DIN rail clamp screw R EXH EXH R B B B B B B B B X P X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15