Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-M9 D-M9V D-F9W D-F9WV D-F7V D-J79C D-A79W D-A9V D-M9V D-A79W D-A9 D-A9V D-A7 D-A80 D-A73C D-A80C D-A7 D-A80 Bore size (mm) D-F7WV D-F9WV D-F9BAL D-F9BAL D-F7BAVL U U U U U U U U A B A B A B A B A B A B U 4.5 5.5 (10) 5 6 (10.5) 2 3 (7.5) 12 22 26 23 26.5 20.5 19.5 5 (7) 8 (6) 5.5 (7.5) 5 (3) 2.5 (4.5) 7.5 (5.5) 16 25 29 26 29.5 23.5 22.5 20 25 32 40 50 27 31 28 31.5 25.5 24.5 5 7 8 6.5

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VP4 21 21 Rc(PT)1/4, 3/8 M5 X 0.8 External pilot port (Only external pilot style(R)) (Rc(PT)3/8) (Rc(PT)3/8) P port 33 VQ 3 4 5 L plug connector (L): VQZ3 5 (R)lLl 0 1 02 03 3 4 5 DIN connector (Y): VQZ3 5 (R)lYl 0 1 02 03 VQ4 VQZ Indicator light 155.5<157.5> 300 VQD (Lead wire length) 71<72> VZS Pg.7 VFS MAX.10 163.5 56.5<60> 75 Applicable cord O.D. 3.5 to 7 VS Indicator light Cover diameter

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-F79F D-F7NTL D-M9 D-M9V D-F9W D-F9WV D-F7V D-J79C D-A79W D-A9V D-M9V D-A79W D-A9 D-A9V D-A7 D-A80 D-A73C D-A80C D-A7 D-A80 Bore size (mm) D-F7WV D-F9WV D-F9BAL D-F9BAL D-F7BAVL U U U U U U U U A B A B A B A B A B A B U 4.5 5.5 (10) 5 6 (10.5) 2 3 (7.5) 12 22 26 23 26.5 20.5 19.5 5 (7) 8 (6) 5.5 (7.5) 5 (3) 2.5 (4.5) 7.5 (5.5) 16 25 29 26 29.5 23.5 22.5 20 25 32 40 50 27 31 28 31.5 25.5

Prevents Micro-Bubbles

LQ 2 U 03 PAX PB Tubing size Symbol 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 19 25 Body class Applicable fitting Tubing O.D. 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1", 25 Type of fitting Symbol Nil 1 Applicable fitting LQ2 LQ1 2 Body class Symbol 2 3 4 5 6 Applicable fitting Body class 2 3 4 5 6 3 LQ2 LQ2 4 LQ1 Type of part Symbol U B N Type

5 Port Solenoid Valve SY Series

L): M plug connector (M): DIN terminal (D): M8 connector (W0): 3 4 5 3 4 5 3 4 5 3 4 5 SY7 20-L(-F2) C8, N9 C10, N11 SY7 20-D(-F2) C8, N9 C10, N11 SY7 20-W0(-F2) C8, N9 C10, N11 SY7 20-M(-F2) C8, N9 C10, N11 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 66 58.5 47.2 Max. 10 32.1 31.5 [38.5] 36 16.1 42.6 [49.6] Approx. 300 (Lead wire length) M8 x 1 18.5 Pg7 70.6 [72.8] 60.8

CLQ

Type A mounting bracket part numberYA-03 JointYU-03 J E Data T1 B 2-D through 2-O counterbore Material: Precision die-casting material equivalent to stainless steel 304 Bore size (mm) O J M D E B Part no.

Body Size: 30, Thread: Rc, Port Size: 1/4, Mounting: w/o Mounting Option, Bowl: Polycarbonate Bowl, Lubricant Exhaust Port: w/Drain Cock, Flow Direction: Left to Right, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Body Size: 30, Thread: G, Port Size: 3/8, Mounting: w/o Mounting Option, Bowl: Polycarbonate Bowl, Lubricant Exhaust Port: w/Drain Cock, Flow Direction: Left to Right, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Body Size: 30, Thread: G, Port Size: 3/8, Mounting: w/Bracket, Bowl: Polycarbonate Bowl, Lubricant Exhaust Port: w/Drain Cock, Flow Direction: Left to Right, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Body Size: 30, Thread: Rc, Port Size: 02 (1/4), Mounting: w/o Mounting Option, Bowl: Polycarbonate Bowl, Lubricant Exhaust Port: 3 (w/Drain Cock), Flow Direction: Left to Right, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Body Size: 30, Thread: F (G), Port Size: 03 (3/8), Mounting: w/o Mounting Option, Bowl: Polycarbonate Bowl, Lubricant Exhaust Port: 3 (w/Drain Cock), Flow Direction: Left to Right, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Body Size: 30, Thread: F (G), Port Size: 03 (3/8), Mounting: B (w/Bracket), Bowl: Polycarbonate Bowl, Lubricant Exhaust Port: 3 (w/Drain Cock), Flow Direction: Left to Right, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Body Size: 30, Thread: Rc, Port Size: 03 (3/8), Mounting: B (w/Bracket), Bowl: Polycarbonate Bowl, Lubricant Exhaust Port: 3 (w/Drain Cock), Flow Direction: Left to Right, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Modular Type Filter Regulator Series AW

(The SI unit type is provided for use in Japan.) 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 Option Note 3) Symbol Nil B C D H Applicable model AW20(K) to 40(K) AW20(K) to 40(K) AW30(K), 40(K) AW20(K) to 40(K) Description With bracket Float type auto drain (N.C.) Float type auto drain (N.O.)

SYJ3000/5000/7000

28.1 [35.1] 12.7 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 1.4 (PE port) 21 L plug connector (L): SYJ5 20-L-M5 3 4 5 M plug connector (M): SYJ5 20-M-M5 3 4 5 DIN terminal (D): SYJ5 20-D-M5 3 4 5 M8 connector (WO): SYJ5 20-WO-M5 3 4 5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 28.1 [35.1] 60.9 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length)

Free Mount Cylinder

Single Acting, Spring Extend D-M9, D-F9W D-M9V, D-F9WV D-A9, D-A9V Bore size (mm) Stroke A B W A B W A B W 6 5.5 0.5(3) 5.5 4.5 1.5 2.5 14.5 All stroke 14.5 10.5 1.5(1) 6.5(4) 2(0.5) 7(4.5) 4(1.5) 9(6.5) 5.5(3) 10.5(8) 6.5(4) 11.5(9) 3.5 8.5 4 9 6 11 7 12 8.5 13.5 7.5 12.5 8 13 10 15 11 16 12.5 17.5 7.5 12.5 8 13 10 15 11 16 12.5 17.5 2.5 2.5 2 3 0 5 1.5 6.5 2.5 7.5 0.5 4.5 0 5 2 7 3.5 8.5

Series IDG

IDG 10 M 03 X016 Optional specifications Size Symbol Contents Size 3 3 10 20 30 50 5 5 Nil Standard 10 Flow direction (rightleft) With dew point indicator R S 20 Standard equipment 30 50 Drain discharge symbol Standard dew point Size 3 10 20 30 50 5 Drain discharge method Nil Manual valve C N.C. auto drain D N.O. auto drain Drain guide (aperture 1/4, without valve) J Port size Note) IDG50M

IDG

Size 3 10 20 30 50 5 Drain discharge Nil Manual valve C N.C. auto-drain D N.O. auto-drain Drain guide (Aperture 1/4, without valve) J Port size Note) IDG50M and 50HM are 03 only.

Compact Cylinder with Lock Series CLQ

Hs A B A B Auto switch mounting height (mm) Proper auto switch mounting positions (mm) D-J79W D-F7BAL D-F7F D-F7NTL D-A7H D-A80H D-F7 D-J79 D-F7W D-F79W D-F7BA D-F7W D-F7F D-J79W D-F7WV D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V/J79C D-A73C D-A80C D-F7V D-F7WV D-J79C D-A79W D-A7 D-A80 Bore size (mm) D-A7/A80 D-A79W Bore size (mm) Hs Hs Hs Hs Hs Hs 20 B A B A B A A B 25 20 32 34 35 38 32.5 38.5

F

E R S E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I E