ZP

x 0.5 M3 x 0.5 Width across flat 4 Width across flat 6 3 Width across flat 5.5 0.9 Width across flat 8 Width across flat 10 (6.5) (7.4) (10) 2 2 3 A D B 2 2 D B Buffer Applicable Pad List Width across flat 4.5 M-3AU-2 [Weight: 0.7 g] 2 KJH02-M3 [Weight: 1.1 g] 2 M6 x 0.75 M8 x 0.75 ZP3-T015U; -04 ZP3-T02U; -04 ZP3-T035U; -04 ZP3-T015U; -U4 ZP3-T02U; -U4 ZP3-T035U; -U4 A Mounting Adapter Part

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D2 D3 L1 L2 L3 L4 M1 L5 Weight T D1 H(1) D2 D3 L1 L2 L3 L4 M1 L5 H(1) A(2) A(2) AQ Weight (g) (g) Model Min.

CATALOG

BANDS FOR SWITCHES D-B5, D-B6, D-G5, D-K5 ACCESSORIES SWITCH BANDS FOR SWITCHES D-C75, D-C8, D-H7 BM1-01 3/4 BM1-02 1 BM1-32 1 1/4 BM1-04 1 1/2 BM1-05 2 BM1-06 2 1/2 BA-01 3/4 BA-02 1 BA-32 1 1/4 BA-04 1 1/2 BA-05 2 BA-06 2 1/2 BMA1-020 3/4 BMA2-025 1 BMA2-032 1 1/4 BMA2-040 1 1/2 BMA2-050 2 BMA2-063 2 1/2 R E P A I R K I T S TA N D A R D S E R I E S NCG T E C H N I C A L SPECIFICATIONS

ZP

x 0.5 M3 x 0.5 Width across flat 4 Width across flat 6 3 Width across flat 5.5 0.9 Width across flat 8 Width across flat 10 (6.5) (7.4) (10) 2 2 3 A D B 2 2 D B Buffer Applicable Pad List Width across flat 4.5 M-3AU-2 [Weight: 0.7 g] 2 KJH02-M3 [Weight: 1.1 g] 2 M6 x 0.75 M8 x 0.75 ZP3-T015U; -04 ZP3-T02U; -04 ZP3-T035U; -04 ZP3-T015U; -U4 ZP3-T02U; -U4 ZP3-T035U; -U4 A Mounting Adapter Part

Vacuum Pad

x 0.5 M3 x 0.5 Width across flat 4 Width across flat 6 3 Width across flat 5.5 0.9 Width across flat 8 Width across flat 10 (6.5) (7.4) (10) 2 2 3 A D B 2 2 D B Buffer Applicable Pad List Width across flat 4.5 M-3AU-2 [Weight: 0.7 g] 2 KJH02-M3 [Weight: 1.1 g] 2 M6 x 0.75 M8 x 0.75 ZP3-T015U; -04 ZP3-T02U; -04 ZP3-T035U; -04 ZP3-T015U; -U4 ZP3-T02U; -U4 ZP3-T035U; -U4 A Mounting Adapter Part

ZP

M8 x 1.25 F 04 4 06 6 08 8 M Width across flats H Model A B C 2 D E F G H J Vacuum inlet direction q Pad dia.

Table of Contents

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

AC

10 12 14 20 A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140 02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06

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Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

KJ

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

ZP3

w w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

Table of Contents

Symbol A R P Symbol 2 Body class 2 Orifice dia. LVQ Metric sizes 4 04 06 4 6 N.C.

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Note 2) Drain piping, or piping for a stop valve, like a ball valve, is required. 850 size comes with a ball valve. substitute with (Symbol: A).

5 Port Solenoid Valve Series SY3000/5000/7000/9000

With External Pilot Specifications One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" (Pitch) P = 24 22.2 24.3 R R 4 A 4 A 4 A 4 A 3/5 3/5 4 A 4 A R R 18.8 18.8 4 A 4 A 4 A 4 A 3/5 3/5 18 4 A 4 A 63.3 39.3 39.3 40.1 79.8 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] One-touch fitting [4(A), 2(B) port] Applicable tubing O.D. :

Proposals for Energy Saving

Note 2) Changing from an internal pilot to an external pilot or vice versa is not possible. 04 4 5 1 VP3 A G 1 04 4 5 1 VP3 A G 1 Pilot option VP 3 port solenoid valve Standard (Internal pilot) External pilot 1 Nil 1 Type of actuation 1 No. of solenoids Single A B N.C. (Normally closed) N.O.

Speed Controller with Indicator

-23 3.2 7.2 17.2 21.7 13.3 16.9 39 36.5 35 33.5 13.6 15.1 5.5 9.6 7 AS12l1FSGl-U10/32-23 AS12l1FSGl-M5-04 4 8.2 AS12l1FSGl-U10/32-04 AS12l1FSGl-M5-06 6 10.4 18.6 23.1 16.5 8 AS12l1FSGl-U10/32-06 M5 x 0.8 10/32UNF 8 9.4 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g

VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

VFS

(sbar)] 6.0 0.20 1.4 7.0 0.20 1.8 1 4/2 (P A/B) Cv Non plug-in type: 6 stations (Manifold base) VV5FS5-10-061-04 1 (2 position single) VFS5110-5D 5 (3 position exhaust center) VFS5410-5D 1 (Individual EXH center) VVFS5000-R-04-2 1 VV5FS5 C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Port size: Rc 1/2, 3/4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-

Table of Contents

valve supply pressure port) ZCU AMJ Filter block Spacer A Valve unit Release flow adjustment needle 2-4.2 (Mounting hole) Misc. 2 Rc 1/8 PV port (Air supply pressure port) 2 1 Adapter G Bracket A Bracket A Rc 1/8 V port (Vacuum pad connection port) 10.2 ZR100-K1MD1 D2 D3 A B SMC PRESSURE SWITCH VJ3233-X17 PRESS. 2.5~7kgf/cm2 SOL.a SOL.b A B RESET SET A B + + + Digital pressure switch 85

CG5-S

8 -04 R 1/2 -04 R 1/2 Straight Union KGH KGLU12-02 R 1/4 12 -03 R 3/8 -04 R 1/2 Applicable tubing O.D.