Table of Contents

VXA22 , , 18 21 9 10.5 40 45 21 27 55 62 64 71 11 13 36 46 46 56 11.5 Dimensions (Orifice Size: 8 mm, 10 mm) VXA225/VXA226 Thread fixed: (VXA2262 0-04 only) 2-M5 x 0.8 depth 8 Dimension of view from A Pilot port Port size P Rc , With bracket E Port size View from A Model A B C D VXA22 52 60 02 03 VXA226 -04 2 0 1 4 3 8 22 28 11 14.5 67 73 77 83 27 30 1 2 Fixing with thread is also possible

Table of Contents

) Rc , , 5 to 60C (No freezing) Rc ,1 ,1 1 4 3 8 1 2 3 4 3 8 3 4 Highly resistant to dust and corrosion, operates reliably, and a bowl guard is provided as standard equipment.

ZP3

It is not necessary to select a connection thread. 148 Bellows Type ZP3 Series Compact Type Dimensions/Models Single unit 4 to 8 w q ZP3 B N 04 7 Model A B C Y q Pad dia.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

A A A A A R R B B B B B P P Applicable tubing O.D.: 8, 5/16" P , R port One-touch fitting A, B port One-touch fitting Applicable tubing O.D.: 4, 5/32" 6, 1/4" (L4) U side D side L3 (N7: 7) (C6: 3.2) 27 Terminal screw M3 DIN rail DIN rail holding screw (3) 8 COM 1 2 3 4 5 6 7 8 COM 1 2 3 4 5 6 7 8 15.7 34 87.7 B B B PORT SOL.a PORT SOL.a SOL.b SOL.b A A A 5.5 3 4 5 6 7 8 stations 2 stations

Proposals for Energy Saving

M5 x 0.8, NPTF 1/8, M5 x 0.8 ZX ejector mounted type: M5 x 0.8 Port size R 1/8, M5 x 0.8, NPTF 1/8, M5 x 0.8 Enclosure IP40 Note 1) For vacuum operation, a momentary pressure of 0.5MPa will not be a problem.

Speed Controller with Indicator

33.5 13.3 13.6 9.6 7 AS131FS1-U10-32/23 AS131FS1-M5E-04 4 8.2 11.5 19.8 AS131FS1-U10/32-04 AS131FS1-M5E-06 6 10.4 20.9 20.4 36.6 8 AS131FS1-U10/32-06 7.2 M5 x 0.8 10/32UNF 8 9.6 9.4 Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FS1-M5E-01 1/8 7.2 9.4 9 17.2 19.8 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FS1-U10/32-01 AS131FS1

VFR

Porting specifications (A, B) EA, EB P Symbol 03 04 Symbol 3 8 02 2 stations 1 2 1 2 1 Side 2 Bottom 10 10 stations M Mixed Common Common For bottom ported: Rc 3/8 only.

VFS

D 01F VV5FS4 1 06 03 Thread type Stations Series VFS4000 Manifold Port size Nil N Rc NPT NPTF G 02 2 stations Symbol 03 04 A, B P, R1, R2 Plug-in type with D-sub connector T U side 3 8 Rc Rc Rc M Mixed 08 8 stations F 1 2 1 2 Max. 8 stations Connector mounting direction Option Symbol D side For bottom ported, Rc is only available. 3 8 Porting specifications (A, B) Passage D side mounting

CG5-S

10 -04 R 1/2 R 3/8 -03 KGU12-02 R 1/4 R 1/2 -04 12 -03 R 3/8 R 1/4 KGT12-02 -04 R 1/2 12 R 3/8 -03 Male Delta KGD R 1/2 -04 R 3/8 KGT16-03 16 Applicable tubing O.D.

Air Fittings & Tubing

Thread R(PT) D2 L1 L2 L3 P A Q1 Q2 M1 M2 1 8 1 4 3 8 18 25 38 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 13 14 17 18 13 10.4 38.2 16 9.9 17 68 71.5 73.5 64 65.5 67.5 6 4 KM14-04-06-01S-3 1 8 1 4 3 8 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 69.5 70.5 71 8 4 KM14-04-08-01S-3 30 38 6 KM14-04-08-02S-3 15.2 10.4 KM14-04-08-03S-3 1 8 1 4 3 8 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5

Table of Contents

54.3 12 17 21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-

ZP

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

V

S V Q Z 1 0 0 0 / 2 0 0 0 / 3 0 0 0 F I T T I N G B L A N K P L U G DIMENSIONS FITTING BLANK PLUG KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 PART A L D APPLICABLE NUMBER FITTING SIZE D 16 KQP-23-X19 31.5 3.2 3.2 16 KQP-04-X19 32 6 4 18 KQP-06-X19 35 8 6 20.5 KQP-08-X19 39 10 8 COLOR: WHITE 22 KQP-10-X19 43 12 10 M A N I F O L D O P T I O N M A N I F O L D O P T I O N S E R I

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1.5 2.2 1 8 Rc VSA4130-02 VSA4130-03 VSA4130-04 VSA4230-02 VSA4230-03 VSA4230-04 VSA4330-02 VSA4330-03 VSA4330-04 VSA4430-02 VSA4430-03 VSA4430-04 2 position single VA 3 8 1 8 Rc 0.75 1 8 Rc 1 8 Rc SA 2 position double 3 8 1 8 Rc 0.86 1 8 Rc VA 1 8 Rc 3 position closed center 3 8 1 8 Rc 0.90 VM 1 8 Rc Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

SY

Valve Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 P, EA, EB port Rc 1/4 M5 x 0.8 C4 (4 One-touch fitting) C6 (6 One-touch fitting) Port size C4 (4 One-touch fitting) C6 (6 One-touch fitting) C8 (8 One-touch fitting) A, B port C8 (8 One-touch fitting) C10 (10 One-touch fitting) Type 20P P to A/B 15.84 (0.88) A/B to EA/EB 14.94 (0.83) P to A/B 9.18 (0.51) A/B to EA/EB 9.9 (0.55) P to A/B 3.6 (0.2) A/B to EA

Speed Controller with One-touch Fitting

23 41.2 26.1 62.5 15.6 46 (46) AS331F-03-07(S)A 1/4" 3/8 19 11.2 12.9 16.6 20.2 36 21.4 50.1 42.3 40.7 37.1 35.5 13.3 34 (35) AS331F-03-09(S)A 5/16" 13.2 37.1 23.5 52.2 14.2 35 (36) AS331F-03-11(S)A 3/8" 15.9 17.4 23 41.2 26.1 54.8 15.6 38 (39) AS431F-04-11(S)A 3/8" 1/2 24 (23.8) 15.9 17.4 18.8 25.6 46.4 (46.3) 26.1 61.2 50.8 49.2 43.7 42.1 15.6 61 (59) AS431F-04-13(S)A 1/2" 18.5 21 26.2

2/3 Port Valve

Solenoid valve (Port size) D, T G, C S S L, Z S L, Z T 1 (2mm) 2 (3mm) 3 (4.5mm) 4 (6mm) 5 (8mm) 6 (10mm) VX21 VX22 VX23 (1) 01( ) 02( ) 02( ) 03( ) 04( ) 02( ) 03( ) 04( ) 1 8 1 4 1 4 1 4 3 8 1 2 AC 3 8 1 2 Ordering Example (Example) Series VX21, Orifice size 2 mm, Rc(PT)1/8, 100V AC Grommet. With surge voltage suppressor.

Flow Control Equipment

Metric size 23 04 06 08 10 12 Inch size With One-touch fittings 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Use 1/8" tubing. 4.1-9 Series TMH Holder Specifications A holder for securing a speed controller (in-line style) with a One-touch fitting. 20 to 60C Ambient temperature Material Polypropylene White Color Accessory: Round head Phillips screw for mounting

VQ5000

A void A void A void A void A void A B A B A B A B A B A A A B A B A B A A A A 6 7 8 9 10 11 12 13 14 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 15 0 0 1 2 3 4 5 SC type OMRON SYSBUS wire system compatible SD type Sharp Satellite I/O link system compatible Terminal block (LED) nomenclature ADDRESS NO. STATION NO.

A

7/16 D I M E N S I O N S MORE DIMENSIONS S E E N E X T P A G E O V E R S I Z E D R O D R E A R F L A N G E M O U N T I N G T Y P E NC A1G (XB5) F Y XF BORE (INCH) KK A AA B BA C D DD E EA EE FA G J R UF WF P ZF MM TF 2.09 5 200 (2) 1 1/8 2.6 1.5 1 1/8 1/2 5/16-24 2 1/2 0.3 1.26 1.06 1.84 4 1/8 1 3/8 2.40 5 3/8 1 3 3/8 3/8 3/4-16 7/8 3/8 3/8 2.13 5 1/8 250 (2.5) 1 1/8 3.1 1.5 1 1/8 1/2 5/