15

5.2 14 4.5 30 M5 x 0.8 8.5 70 50 4.6 13 60 NY M3 x 12 1.5 M4 x 12 1.5 M6 x 14 5.2 11 4.5 30 M4 x 0.7 7 70 50 4.6 13 60 NW M4 x 12 3.6 M4 x 12 1.5 M6 x 14 5.2 9 4.5 30 M5 x 0.8 8.5 70 50 4.6 13 60 NU M3 x 12 1.5 M4 x 12 1.5 M6 x 14 5.2 11 4.5 30 M5 x 0.8 8.5 70 50 4.6 13 60 NT M3 x 12 1.5 M4 x 12 1.5 M6 x 14 5.2 12 8.5 30 M5 x 0.8 8.5 70 50 4.6 17 60 NM1 M3 x 5 0.63 M4 x 12 1.5 M6 x 14 5.2

Table of Contents

Exploded view: VQ1000-Plug-in Unit (F, P, J, L, Skit) . Exploded View: VQ2000-Plug-in Unit (F, P, J, L, G, S kit) . Exploded View: VQ0-Plug Lead Unit (F, P, C, S kit) .

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

JXCx-OMT0001CN

K J K J K [mm] 8 4 10 5 16 8 mm/s 400 200 400 200 400 200 [mm/s] () 20 10 20 10 20 10 [mm/s] () 25 13 27 14 30 15 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 mm/s 300 250 150 350 250 200 [mm/s] () 20 10 20 10 [mm/s] () 25 13 27 14 -109No.JXC-OMT0001CN-C 1.5 LEFB LEFB16 LEFB25 LEFB32 T [mm] 48 mm/s 1100 1400 1500 [mm/s] () 48 [mm/s] () 78 1.6 LER LER10 LER30 LER50 J

Series IDG

7 14 16 23 IN OUT Bracket (Accessory: B) (G) B D Purge air discharge tubing port for dehumidification Applicable tube O.D.: J (NPT thread: K inch) Purge air for dehumidification Purge air for dehumidification (Maintenance space 100mm or more) Option: P Port size L A B C D E Model F G J H K 97 224 8 119 [126] 5/16 114 249 10 147 [154] 3/8 83 187 53 165 62 113 212 54 190 82 IDG10, IDG10H IDG20

Modular Type Lubricators Series AL

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B J A C D E F G H I , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3 x M5 x 0.8 x depth 6 3 x M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 950

Cylinder

(mm) F F' GA I GS H J 5 ,~t' , 10st I 1&$\ 49'S\ ;p~" K I MM NN 8 I M3XO .5 MlOX 1.0 7 30.5 35.5 40.5 45.5 6 7 9 14 ,4 3 8 6.5 6 6 17 6 I 8 ;lOS 35.5 40.5 4!to. : 5.5,5 1 10 '0 '2 '5 ,7 I 5 8 I M4 XO.7 M'2XlO 8 1 6.5 6 J 7 20 7 '0 I 8.5 6 I 7 I 24 9 110 30.5 35.5 40.5 45.5 55.5 I 15 '2 14 20 _' 9 i 6 -8 I MS X: O.8 M14xtO -Flange Mount : CO JPF z H s p A' F GA 2-M3 GB ~-IJ~J I A ~ u: > !

MQQ

RB A + Stroke FZ J Double clevis style: MQQLD Bore size (mm) Stroke range (mm) A B CL CD CT CU D10 CU 10 to 40 61.5 90.5 5 84.5 4 10 CD hole H10 Shaft d9 Cap bolt 16 10 to 60 70.5 107.5 8 98.5 5 12 -X 20 10 to 60 79 119 10 109 5 14 25 10 to 50, 75, 100 84.5 126.5 10 116.5 5 14 2028 10 to 50, 75, 100 104 148 10 138 6 14 CX +0.4 +0.2 CT Data CZ 0.1 0.3 CW B + Stroke L Bore size (mm) CW CX CZ

MQQ

RB A + Stroke FZ J Double clevis style: MQQLD Bore size (mm) Stroke range (mm) A B CL CD CT CU D10 CU 10 to 40 61.5 90.5 5 84.5 4 10 CD hole H10 Shaft d9 Cap bolt 16 10 to 60 70.5 107.5 8 98.5 5 12 -X 20 10 to 60 79 119 10 109 5 14 25 10 to 50, 75, 100 84.5 126.5 10 116.5 5 14 2028 10 to 50, 75, 100 104 148 10 138 6 14 CX +0.4 +0.2 CT Data CZ 0.1 0.3 CW B + Stroke L Bore size (mm) CW CX CZ

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Otherwise, unexpected malfunctions, such as knocking, may occur. 14.

RZQ

RB RA W 4-O1 T Section a-a' Basic style (Through-hole): RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b' Section b-b' (mm) Bore size (mm) A B C D FB G H I J K L M N O1 O P Q RA RB RR RH T W E FA Z 32 100.5 82.5 14 22.4 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc1/8 24.5 14 10 5.5 7 4.5 49.5 45 33 14 40 110 92 16 28 52 35 14 9 M10 x 1.5 69 5

MXW Series Long Stroke Slide Table

14 14 14 V 121 141 166 191 216 A 56.5 31.5 31.5 31.5 31.5 31.5 B 138.5 163.5 188.5 213.5 238.5 263.5 5.5 MXW16 W 42.5 17.5 17.5 17.5 17.5 17.5 V 152.5 177.5 202.5 227.5 252.5 277.5 A 65.5 40.5 40.5 40.5 40.5 40.5 40.5 B 171.5 196.5 221.5 246.5 271.5 296.5 321.5 7 MXW20 W 51.5 26.5 26.5 26.5 26.5 26.5 26.5 V 185.5 210.5 235.5 260.5 285.5 310.5 335.5 A 83.5 71.5 41.5 41.5

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

flats 14 3 I 3 Width across flats 10 J Applicable tube O.D.

REC

32 16 12.5 50 8 56.2 7 39 26.5 51 Up to 1000 NN P RR S U Z ZZ Bore (mm) Stroke range 20 M20 x 1.5 Up to 700 1/8 9 146 14 217 226 25 M26 x 1.5 Up to 700 1/8 9 146 14 221 230 32 M26 x 1.5 Up to 1000 1/8 9 159 14 234 243 40 M32 x 2 Up to 1000 1/4 11 181 18 270 281 Double clevis style: RECD 2-RcP NN CDH10 +0.058 0 G Plugged (M5 x 0.8) G H1 Standard port Width across flats B1 I Eh8 D MM AL CX0.1

C76

Joint/DIN648 Double Knuckle Joint/DIN71751 CJ1 CJP CJ2 CM2 CG1 MB MB1 (mm) (mm) CA2 Thread e M10 x 1.5 M12 x 1.75 b 10 12 d 40 48 f 10 12 g 18 23 c 20 24 j 12 15 a 20 24 0 l3 14 16 Bore Model GKM10-20A GKM12-24A Thread d3 M10 x 1.5 M12 x 1.75 h 43 50 d6 20 30 b3 b1 14 16 l 20 22 d7 19 22 Bore 32 40 Model KJ10DA KJ12DA dH71 10 12 32 40 10.5 12 13 13 CS1 C76 C85 C95 Floating joint/Series JA

C76

1.2 J Auto Switch Mounting, Minimum Possible Cylinder Stroke Band Mounting Type (mm) No. of auto switches Auto switch model 2 pcs. n pcs. 1 pc.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 15 17.5 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 M4 x 0.7 20.4 39 Rc1/8 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 17.5 15 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20.5 20 7 32 5 M5 x 0.8 M3 x 0.5 11 32 10 3 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 Rc1/8 M4 x 0.7 20.4 39 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Integrated Controller

Select the graphs for horizontal of the EQFS40H on page 14. 3. Lx = 350 mm, Ly = 250 mm, Lz = 1000 mm 4.

CHKD/CHKG

8 x L counter bore J J A + Stroke M M Rod end male thread CHKDB20, 25 CHKDB32 to 100 Water resistant type S N g C B + Stroke h + Stroke A + Stroke Rod end male thread (mm) B C D E F G H J K L M P Q R A Bore size (mm) 20 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 9.5 depth 5.4 43 1/8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6