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(3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B)

Vespel is a registered trademark of DuPont. 9 Low to intermediate flow (Tied-diaphragm) Single Stage Regulator for Ultra High Purity Series AP1900 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Tied-diaphragm design How to Order Port Number q w e r AP19 S FV4 FV4 01 2PW

Vacuum Pad: Ball Joint Type ZPT/ZPR Series Pad Diameter: 10, 13, 16, 20, 25, 32, 40, 50 on n io on n a io a pt pt s s or la or la ds nt ds nt ed ed a a or or w w l f l f or or ea ea k k id su id su pe rfa pe rfa ty ty ce ce nt nt s s oi oi ac ac l j l j ac ac al al e e B B s s ZP3 ZP3E ZP2 ZP2V ZP ZPT ZPR ZPT ZPR XT661 ZPT Series: Vertical Vacuum Entry Type ZPR Series: Lateral Vacuum Entry

Note Bracket VK300-43-2A With screw Body ported VK332 1 G M5 1 G 01 VK334 Base mounted Port size 01 Rc (With sub-plate) Nil Without sub-plate 1 8 Valve option Nil V Standard type For vacuum Light/Surge voltage suppressor Y For low wattage For vacuum/low power consumption Continuous duty type Nil None S With surge voltage suppressor W Z With light/surge voltage suppressor (Type D only) E For

SI Unit for VQC/S0700 Series Valves ( EX500-Q 01 ) SI Unit for SV Series Valves ( EX500-S 01 ) M3 28: 4 pcs. ( Plus-minus slot round head screw ) Supply/exhaust block assembly Supply/exhaust block assembly 1.

Allen-Bradley PLC 1747-L524, list price: $770 as of 10/01 2. Allen-Bradley I/O card 1740OB, list prices: $280 as of 10/01 3. Allen-Bradley Scanner module 1747 SN, list price: $995 as of 10/01 4. Wiring costs are estimated at $10/point and $100/node for SI system. Your costs may vary. 5.

VZA4221-01 VZA4321-01 VZA4421-01 VZA4141-1-01 VZA4141-1-02 VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02 VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-01 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 Single Double Closed center Exhaust center 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49 0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9

Note Bracket VK300-43-2A With screw Body ported VK3120 1 G M5 VK3140 1 G 01 Base mounted Thread type Nil F N T Rc G Valve option Port size NPT Nil Standard For low wattage (2 W DC) 01 Rc (With sub-plate) Nil Without sub-plate 1 8 NPTF Y Option Light/Surge voltage suppressor Nil None S With surge voltage suppressor Z With light/surge voltage suppressor (Type D only) Since the indicator

Body ported (Single type) VKF332 (With bracket) 5 G M5 Body ported (For manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Port size Light/Surge voltage suppressor Valve option 01 Nil For vacuum For low power consumption For vacuum/low power consumption Continuous duty type Rc 1/8 (With sub-plate) Without sub-plate Nil S None With surge voltage suppressor With light/surge voltage suppressor

Exhaust Time from 0.5 MPa to 0.1 MPa SRH Pressure (MPa) SRP / SRF Exhaust time (s) Exhaust time (s) / ITV IC Exhaust time (s) ITVH 3. Exhaust time from optional pressure point ITVX Ex.] Using VY1500, lower the 500 L tank pressure from 0.4 to 0.1. a) If describing the above graph in accordance with graphs, the exhaust time is read; 27 3 = 24 s.

Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: Rc (Metric M3, M5; Unified 10-32UNF), Port Size: 01 (1/8), Option: N (Nickel Plated), Lock Nut: J (Round)

Size: 1/8, 1/4 Basis, Style: Elbow, Control Method: Meter-out, Thread: Rc (Metric M3, M5; Unified 10-32UNF), Port Size: 1/8, Option: Nickel Plated, Lock Nut: J (Round)

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

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Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

PA23] STO IEC/EN 61800-5-2STO ON/OFF (MR Configurator2) SSCNET/H (MR Configurator2) (MR Configurator2) 1 8 1. 1.6 (1) LECS S 2 T5 S SSCNET/H ACT5, T6 T5 50W,100W ACT7 200W T7 ACT8 400W T8 (2) a) ACT9 T9* 750W * AC200VAC240V 50/60Hz 2 5 A S LE C S M A AC S B M B E 2m 2 5m 5 10m A S R 1 9 1. bSSCNET (LECSS-S/LECSS2-T) LE-CSS-MR-J3BUSM cI/O (LECSS-S/LECSS2-T) 1 LE C S

Body size Port size KKA3 S-01 M KKA3 P-01 M R1 / 8 R1 / 8 1 / 8 KKA3 S-02M 1 / 8 KKA3 P-02M R1 / 4 R1 / 4 KKA3 S-03 M KKA3 P-03 M R3 / 8 R3 / 8 KKA4 S-02M KKA4 P-02M R1 / 4 R1 / 4 KKA4 S-03 M 1 / 4 KKA4 P-03 M 1 / 4 R3 / 8 R3 / 8 KKA4 S-04 M KKA4 P-04 M R1 / 2 R1 / 2 KKA6S-03 M KKA6P-03 M R3 / 8 R3 / 8 KKA6S-04 M KKA6P-04 M 1 / 2 1 / 2 R1 / 2 R1 / 2 KKA6S-06M KKA6P-06M R3 / 4 R3 / 4 Built-in

PD07PD09 (DO) ON/OFF 4.5.1(1)(d) JOGDO TM 4.5 MR Configurator2 No.PC09 MR Configurator2 11.8 TM master-slave masterslave C1 5.4.3 1 5 1 1.5 (1) LECS S 1 S5 50W,100W SSCNET S ACS5, S6 S5 ACS7 S7 200W ACS8 S8 400W AC100VAC120V 50Hz60Hz 1 AC200VAC230V 50Hz60Hz 2 1 6 1 (2) aSSCNET 5 A S LE C S M A AC S B M B E 2m 2 5m 5 10m A S R bSSCNET LE-CSS-MR-J3BUSM 1 LE C S S