High Vacuum Angle Valve

40-2 65 171 66 39 11 55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

New

F D 23 G1/2 Water For Air For Medium R E C C R E A B1 A B1 Vacuum For Oil Construction Dimensions Construction Dimensions 2 x P 1 (IN), 2 (OUT) port 2 x P 1 (IN), 2 (OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N Terminal part Faston connector 250 Series 23 K K 11 9 6.5 J H H J 15 (mm) Conduit Faston type Dimensions Size Port size A B B1 C D E F P H J Q R Q R K N 1 1/8 1/8 1/4

CNG

7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l ZZ H e f h ZZ 20 25 32 40 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 (149) 11 11 M5 x 0.8 3 12 35 178 (186) 30 16 55 198 (206) 0.25 x Stroke M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 (159) 11 11 M6 x 0.75 3 12 40 193 (201)

Modular F.R.L. Unit

115 44.5 11 6.4 84 3.3 303 264 43 110 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 110 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 110 297 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

HRX-OM-M090

See note 4 for other conditions. 11 Dimension between panels. Projection is not included. 12 Weight when the circulating fluid and facility water (for water-cooled type) is not included. The weight will increase by 1kg when option J [Automatic fluid filling] is selected.

ZP

J Connection thread Width across flats H N S U F GN GS B3 M3 x 0.5 3 11 6 02 04 06 08 6 10 15 25 J K ZP T U A8 G B5 M5 x 0.8 5 13 8 Dimensions Per Vacuum Inlet: One-touch Fitting Model Vacuum inlet: Barb fitting G H J Fitting part min. hole size Vacuum inlet direction q Pad dia.

LEC-OM02904

LE-CSB-SB 1 2 B1 B2 LE-CSB-RA ST-TMH-S-C1B-100-(A534G) CT160-3-TMH5B () LE-CSB-RB 11 10 11 (2) LE-CSB-RA LE-CSB-RB LE-CSB-SA LE-CSB-SB MR-BKS1CBLM-A1-H MR-BKS1CBLM-A2-H MR-BKS2CBL03M-A1-L MR-BKS2CBL03M-A2-L () AWG 20 B1 AWG 20 B2 . 11 11 11 11.1.5 SSCNET CN1ACN1BSSCNET SSCNETJIS C6802IEC 60825-11 (1) 0.15 0.3m 0.5m 1m 3m m LE-CSSL K J 1 3 (2) SSCNET LE-CSCNET 0.15m 0.33m 25mm

HRX-OM-W038

(When automatic fluid filling [Option J] is selected.) Overflow port This is necessary when automatic fluid filling function.Discharge excess circulating fluid when the fluid level in the tank rises. (When automatic fluid filling [Option J] is selected.)

RB/RBL/RBQ

RB J D-X 20Data 10-18-11 11 Shock Absorber: Short Type Series RBQ Series RBQ/Shock Absorber: Short Type Technical Data: Model Selection Symbol 1.

CJ2X/CUX/CQSX/CQ2X/CM2X

G5-S 10-3-12 CV MVGQ Compact Cylinder Series CM2X Minimum operating piston speed (mm/s) Bore size (mm) Minimum operating pressure (MPa) CC 20, 25, 32, 40 0.025 0.5 RB 10-3-14 J Clean Series DCompact Cylinder Series 10-/11-CQSX Air Cylinder Series 10-/11-CM2X Air Cylinder Series 10-/11-CQ2X -X 20Data 10-3-1 2 Low Speed Cylinder Low Speed Cylinder Improved low friction characteristics (CM2X

CJ2X/CUX/CQSX/CQ2X/CM2X

G5-S 10-3-12 CV MVGQ Compact Cylinder Series CM2X Minimum operating piston speed (mm/s) Bore size (mm) Minimum operating pressure (MPa) CC 20, 25, 32, 40 0.025 0.5 RB 10-3-14 J Clean Series DCompact Cylinder Series 10-/11-CQSX Air Cylinder Series 10-/11-CM2X Air Cylinder Series 10-/11-CQ2X -X 20Data 10-3-1 2 Low Speed Cylinder Low Speed Cylinder Improved low friction characteristics (CM2X

MK

G5-S M thread CV F Note 2) E Note 2) MVGQ CC I thread length J RB 4-G through 2 x 4-H counterbore J R + Clamp stroke Q + 2 x Clamp stroke depth 3 D-X Through-hole/Both Ends Tapped Common (Standard) (mm) 20H J Model K L F E C B A D G Q V P Yh9 Z N I M O R S T U X 0.1 0.2 0.1 0.2 0.1 0.2 0.1 0.2 1 8 1 8 1 4 1 4 0 0.062 0 0.062 0 0.062 0 0.062 MK2B32 MK2B40 MK2B50 MK2B63 54 61 73 86 34 40 50

A

37.5 70 65.5 50 54 54 8.5 10 .5 70 2.3 52.5 NAR5000 90 168 48 90 75.5 70 66 65.8 11 13 90 3.2 52.5 NAR6000 95 204.5 48 95 78 70 66 65.8 11 13 90 3.2 D I M E N S I O N S NAR2001 ~ NAR4001 Bracket Port Size Model Part Size A B C D E Bracket Dimensions N F G H J K L M NAR2001 1/8 1/4 40 95 17 40 35 30 34 44 5.4 15.4 55 2.3 33.5 NAR25O1 1/4 3/8 53 102.5 25 48 32 30 34 34 44 5.4 15.4 55 2.3

Prevents Micro-Bubbles

S) LVN TI/ TIL L 49.5 PA A B (mm) Dimensions W PAX (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2-2 Depth 4 S PB Model LVA2 LVA3 LVA4 LVA5 88.5 11.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K Dimensions (mm) A B Q R P C D E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2 57.5 30 36 44 11 31.5 13 4 20 37 3.5 26.5

HRX-OM-O021

(When automatic fluid filling [Option J] is selected.) Overflow port This is necessary when automatic fluid filling function.Discharge excess circulating fluid when the fluid level in the tank rises. (When automatic fluid filling [Option J] is selected.)

HRX-OM-R005

(When automatic fluid filling [Option J] is selected.) Overflow port This is necessary when automatic fluid filling function.Discharge excess circulating fluid when the fluid level in the tank rises. (When automatic fluid filling [Option J] is selected.)

7

I VXE 4.5 VXP Conduit d e C VXR E U 280 VXH 23 VXF 1.2 7.5 VX3 G1/2 T 5.5 A b a VXA IN OUT B 2 x P Port size f J F I L K D 4.5 4.5 Flat terminal C e d U E 11 1.2 7.5 T 5.5 A b a IN OUT B 2 x P Port size I F J 4.5 L K D 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K Model Conduit terminal Conduit Flat terminal C L T 52.5 (58) 52.5 (58) 99.5 U V T 58.5 (64.5) U T U 10

Cylinder with Lock

10.5 D-Z7/Z80 7.5 8.5 7.5 9.5 9.5 10.5 D-A5/A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3/A44 9 9 10 11 11 11 *1 The switch mounting bolt is supplied with the switch. * Values which include hysteresis are for reference purposes only.

Cylinder with Lock

10.5 D-Z7/Z80 7.5 8.5 7.5 9.5 9.5 10.5 D-A5/A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3/A44 9 9 10 11 11 11 *1 The switch mounting bolt is supplied with the switch. * Values which include hysteresis are for reference purposes only.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Z MXP12-15 MXP12-25 SMXP12, #1 (#1 + #3) SMXP12, #2 (#2 + #4) L K J V H S G M W Model 24 22 68 59 40 15 76 10 29 55 MXP12-15 42 40 98 89 60 25 106 30 49 75 MXP12-25 11 Precision Air Slide Table Series MXP Dimensions MXP12/With Shock Absorber 2-M4 x 0.7 depth 6 Z 3 V K 5 Max. 15 7.5 M Stroke: S MXP12-15B Width across flats 12 H A 8.5 M8 x 1 40.8 14.3 7.1 14.4 MA 8 8.5 11 20.3 24 25 20 A