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, H, L r u. E 03 05 07 09 't't 5132" 1l4', 5/16' 3t8" 1/2" 6mm 8mm H , T , U , X , N 1 3 06 08 t0 1 2 1 6 32 i10-32 UNF Thread 3 5 I l t N P r H ' L . W , r .

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

CYP

-06 2.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

(Hexagon width across flats) Applicable tubing O.D. d A L4 D1 L3 M1 D2 T L1 L2 Metric Size Inch Size d T H D1 D2 D3 L1 L2 L3 L4 L5 AM1 A Weight (g) Model Model Weight (g) d T H D1 D2 D3 L1 L2 L3 L4 L5 M1 AS121F-U10/32-01D 1/8" 8.4 17.3 22.1 AS121F-M5-23D 3.2 8.4 5/32" 9.3 12.7 12.7 22.1 17.3 12.3 12.3 AS121F-U10/32-03D AS121F-M5-04D M5 x 0.8 8 9.6 4.7 4 9.3 0.7 27.4 10 31 0.7 27.4 10-32 UNF

Vacuum System Peripherals:

B Electrical entry 1 Symbol 2 3 4 5 6 7 8 9 10 Order of manifold (Station) G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) 05 07 10 13 H M Common Individual J K A B P5 Q5 None E14 E15 E16 E17 E18 E19 M15 M21 Nil L C CL CN Nil L Nozzle diameter L L type plug connector LN LO With lead wire Without lead wire Without connector For AC, only L or LO is available.

HRX-OM-S004

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

CV/MVGQ

RS Q G ND hole H10 RS H A Rod dg RZQ +0.2 0 NX MI W S CEP1 Material: Rolled steel Material: Brass Material: Iron CE1 Applicable bore size A1 L1 L MM Part no. Y-J010B Applicable bore size Applicable bore size B C d H B C d H Part no.

CV/MVGQ

RS Q G ND hole H10 RS H A Rod dg RZQ +0.2 0 NX MI W S CEP1 Material: Rolled steel Material: Brass Material: Iron CE1 Applicable bore size A1 L1 L MM Part no. Y-J010B Applicable bore size Applicable bore size d C C B d H B H Part no.

5

Single/Double Knuckle Joint H A L1 H1 A, H Dimensions when Mounting a Single/Double Knuckle Joint together with a Rod End Nut (mm) Symbol Bore size (mm) H A L1 H1 Applicable knuckle joint part number (mm) Bore size (mm) A H 125 65 125 I type single knuckle Y type double knuckle 125 110 50 3.5 100 156.5 I-12A Y-12A D140 110 50 3.5 105 161.5 I-14A Y-14A 140 65 125 160 120 56 3.5 110 170.5 I

High Purity Fluoropolymer

10 39.5 51 55 133 48.5 10 36 Inch sizes H Applicable tubing O.D.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Connection threads NPT Model L H A M W E Applicable tubing O.D.

Modular Type Lubricator Series AL

2 Float switch Part number: IS400-1 to 2 Min. clearance for maintenance With bracket B With float switch B 374 383 383 382 385 C E Model Port size H 25 18 16 35 35 P 47 47 AL30 AL40 AL40-06 AL50 AL60 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 324 333 333 332 335 38 40 38 41 45 53 70 75 90 95 54

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

: A6 Symbol: A7 WA C C0.5 file chamfer AL B RD B AL MM AL MM MM DC 30 30 H 30 30 L W H W1 T H H H Symbol: A10 Symbol: A11 Symbol: A12 Symbol: A13 Symbol: A14 DA DA C0.5 R sphere AL MM 30 30 DA C R sphere TP R sphere A A H C H T W1 H H H Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 DA AL MM 30 DA MM 30 MM 30 MM 30 C 30 A H H A H A A C H A H Symbol: A20 Symbol: A21 Symbol:

Tie-rod Type Hydraulic Cylinder

J H N M Spring pin Applicable cylinder type Order no.

One-touch Fittings

Symbol Size 04 4 06 6 08 8 10 10 12 12 16 16 Use the part number below to order the gasket for M5 thread. Gasket for M5 thread: M-5G2 E Bulkhead union v v Bulkhead connector v v A KQ2 H 06 00 1 4, 6 (Oval type release button) Oval type release button KQ2 H 08 00 A 8 to 16 (Round type release button) Port size/Applicable tubing O.D.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Caution REC25 101110-AS2001F-06-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC32 101110-AS3001F-08-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC40 101110-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 2. Speed control is possible with meter-in and meter-out types of speed controllers.

HRX-OM-Q026

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

VXD21/22/23

VXD2150-06-2DS Made to Order Specifications Splashproof Specifications ( ) Based on JIS C 0920 Based on IEC529IP-X4 VXD Model Port size Electrical entry X36 DIN terminal or class H coil not available. 17-3-35 4 The VX series will be revised shortly. Series VXD21/22/23 Normally Open (N.O.)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

M1 AS1001FG-23 AS1001FG-04 AS1001FG-06 AS2001FG-04 AS2001FG-06 AS2051FG-06 AS2051FG-08 AS3001FG-06 AS3001FG-08 AS3001FG-10 AS3001FG-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1 35.6 36.8

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB DBT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 -X BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.