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Electric silicon rubber N 84' M4 X O.7 .i' U ("2.16) ---'-115 M5 X O.a 86 M6X l 1!20 or more:Special order Liste Pad Dia -Pad Type ~"'" ;r""" 2 4 6 8 10 13 16 20 25 32 40 SO 86 MeX l .25 Ast type FJat)wtth nil Daao tvoe l!

MGP

0.5MPa P=0.5MPa CY1 80 100 50 Load weight m (kg) Load weight m (kg) MY1 50 40 40 50 30 40 30 32 20 20 10 10 100 10 10 100 200 20 30 40 50 20 30 40 50 200 Eccentric distance l (mm) Eccentric distance l (mm) 3.17-9 Series MGP Operating Range When Used as Stopper Bore Size 12 to 25/MGPM12 to 25 (Slide Bearing) MGPM12 to 25 (Slide Bearing) 100 l @ 50mm l @ 50mm l @ 50mm u u 25 m m 50 40 20 Transported

Series SV

M12 52 l M12 M12 48 6 6 32.3 28.3 16 M12 31.3 31.3 l 14.9 Terminal no.

Intrinsically Safe Valve

(LL) 53-SY5 20-LL-01 (-F2) 3 4 5 L (Lead wire length) 156 Insulator: Red (+) Insulator: Black () 5.9 4.1 0.3 mm2 14.7 12 84.3 Terminal type (TT) 53-SY5 20-TT-01 (-F2) 3 4 5 Max. 10 L (Lead wire length) 189.6 Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 101.1 7 Body Ported Series 53-SY5000/7000/9000 Dimensions: 53-SY7000 2-position single L-type plug connector (L) 53-SY7120-L-02 (-F2) With

Fluoropolymer Piping Equipment

B E E F G H L L M Min. port size 2 x B L, L LQ3T11 4 3.5 10 9 4.8 9.5 11 28.5 27.5 14 2.5 LQ3T12 3 2 LQ3T21 6 4 17 16 6 12 16 34.5 33.5 20 4 LQ3T31 10 5 22.5 19.5 9 18 21 47.5 44.5 25 7.5 LQ3T32 8 6.4 LQ3T41 12 6 24 22 10 20 24 52.5 50.5 29 9.5 LQ3T51 19 7 26.5 24 14 28 32 64 61.5 37 16 LQ3T61 25 8 30 26 18 36 41 78 74 49 22 M (E, E) (E, E) G H L, L L, L (E,E): Reference dimension for the

CRB2/CRBU2/CRB1

Double vane type CDRB2BW40-S, D Keyway dimensions h (h9) L b (h9) Model CDRB2BW400 0.030 20 4 0 0.030 4 CRB1 Free-Mounting Type CRBU2 CRB2 15 Vane Type Rotary Actuator with Angle Adjuster Series CRB2BWU Sizes: 10, 15, 20, 30, 40 How to Order CRB2 10 WU B 180 S Standard Size 10 15 20 30 40 Size 10 15 With auto switch Sizes: 10, 15 90 L CDRB2 10 WU F 180 S CDRB2 20 WU B 180 S R73 L With auto

Thermo-chiller/Rack Mount Type

0 5 10 15 20 25 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] HRR050-A-20, HRR050-W-20 0.5 Circulating fluid pressure [MPa] Outlet: 60 Hz 0.4 0.3 Outlet: 50 Hz Return port Return port (Option Z) 0.2 Allowable operating range 0.1 0 0 10 20 30 40 Circulating fluid flow rate [L/min] Required Facility Water Flow Rate 012 018 024 030 HRR -W HRR010-W-20 30 20 Facility

energy saving effect

Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Specifications Model HRSH100-Al-20-l HRSH150-Al-20-l HRSH200-Al-20-l HRSH250-Al-20-l HRSH300-Al-20-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.27 2.1 2.1 2.8 2.8 Control method PID control Ambient temperature/Altitude Note 1), 9) C Temperature: 20 to 45, Altitude: less than

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L Dimension n: Stations L n 2 135.5 125 93.5 24.5 3 135.5 125 104 19 4 148 137.5 114.5 20 5 160.5 150 125 21 6 173 162.5 135.5 22 7 185.5 175 146 23 8 198 187.5 156.5 24 9 198 187.5 167 19 10 210.5 200 177.5 20 11 223 212.5 188 21 12 235.5 225 198.5 22 13 248 237.5 209 23 14 260.5 250 219.5 24 15 260.5 250 230 18.5 16 273 262.5 240.5 19.5 17 285.5 275 251 20.5 18 298 287.5 261.5 21.5 L1 L2

VQZ1000/2000/3000

L dimension 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

PF2A/PF2W

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

Modular Design with Uniform Body Style

pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 5000 7500 2500 10 12500 15000 17500 20 0 5000 7500 2500 10 12500 15000 17500 20 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 11 Air Combination AC20-D to AC60-D Series Pressure Characteristics (Representative values) Conditions: Inlet pressure of 0.7 MPa, Outlet pressure of 0.2 MPa, Flow rate 20 L/min (ANR) AC20-D AC30-D AC

IDG

0 40 80 120 160 20 40 60 80 0 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG20 (Type A products group) IDG30 (Type B products group) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 HA 20 P1 = 0.7 MPa 30 AT 30 40 ID 50 0 40 100 200 300 0 100

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

V

www.stevenengineering.com I 6.11 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H O U T B U F F E R ZPT V A C U U M E N T R Y ( A L S O M O U N T I N G T H R E A D D I A) P A D D I A M E T E R S Y M B O L T H R E A D D I A M E T E R 2~ 8 10~ 16 20~ 32 40 50 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 P A D M AT E R I A L Male

Modular F.R.L. Unit

Unit AC10 to 60 Dimensions Pressure gauge port size AC10, 20 P G A Q E F L C B H OUT IN T H L J OUT Pressure gauge (Option) K M Square embedded type pressure gauge (Option) N Port size Lubricator Regulator Air filter Drain Min. clearance for maintenance D AC25, 30, 40, 50, 55, 60 Pressure gauge port size A P G E F Q L H B C OUT IN T H L OUT Pressure gauge (Option) K M Square embedded type

CXS

20 CY 15 10 MG 0.1 10 CX 0.1 6 6 D-X 0.03 5 5 10 20 30 40 50 100 10 20 30 40 50 100 20Overhang L (mm) Overhang L (mm) Graph (4) V = Up to 800 mm/s (Up to 700 mm/s for 15, 20) Data CXSJM CXSJL Graph (3) V = Up to 600 mm/s CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15

CXS

15 10 0 0.01 0 0.1 10 20 40 60 80 100 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (15) V = Over 400 mm/s; Up to 50 st Graph (16) V = Over 400 mm/s; Up to 75 st 2 2 CXSM CXSL CXSM CXSL 1 1 0.5 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 0.05 20 20 15 15 10 0.01 0 0.01 10 20 40 60 80 100 0 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (17) V = Over 400 mm/s; Up to 100

CL

26 27 26 30 31 29.5 38 49 61 64 54 59 67 72 76 10 13 18 23 25 32 40 40 52 52 10 12 15 17 19 10 10 10 14 14 85 95 102 113 124 27 32 32 37 37 16 20 20 25 30 to 500 to 600 to 600 to 750 to 750 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 CXS +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 CXT +0.3 +0.1 MX Bore (mm) W/o rod boot W/ rod boot KA L LZ MM PG S N PH U P PL W H 51 58 58 71 72 PW RR J K Z 244 273

Table of Contents

CDRB2 20 W B 180 S R73 L With auto switch Size: 20, 30, 40 Fittings are sold separately.