Process Pump

For AIR EXH: AN20-02 (: Either Nil or N is entered as a thread symbol.)

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

to 24 VDC 10% 12 to 24 VDC PF2M7 PFMC 10% 18 to 30 VDC 10% PF3A7 H-L 12 to 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 21.6 to 30 VDC PF3A701H/ 702H-L 18 to 30 VDC 10% 18 to 30 VDC PF2M7-L PFMC-L 10% 21.6 to 30 VDC PF3A8 H-L Temperature characteristics (25C standard) 3% F.S. 1 digit (15 to 35C) 5% F.S. 1 digit (0 to 50C) 2% F.S. 2% F.S. (15 to 35C) 2% F.S. (15 to 35C) Monitor unit Monitor

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

(mm) 04 06 08 10 12 Type 4 6 8 10 12 Port size Elbow Universal 2 3 01 02 03 04 R 1/8 R 1/4 R 3/8 R 1/2 Control type Meter-out Meter-in 0 1 With residual pressure release valve With One-touch fitting 15-9-36 2 Speed Controller with Residual Pressure Release Valve with One-touch Fitting, Elbow Type/Universal Type Needle Valve/Flow Characteristics AS2201FE-02, AS2211FE-02 AS2301FE-02, AS2311FE

LEC-OM07605CN

PA03] 1 0:() 1:() 12 3 12. 12.3 15PN ONON 12.4 12 4 12. 12.4 (1) CN4 (2) LEC-MR-BAT6V1SETCN4 LEC-MR-BAT6V1SET LEC-MR-BAT6V1SET 12 5 12. 12.5 (MR Configurator2) Monitor"-"ABS Data Display" 12 6 13.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP This is used when changing piping location.

Direct Solenoid

Poriing No. of Ports 'xx" M84010-02 Ta"NPTFSide l l M84011-02 7a" NPTF Side: Y.r" Bottom A & B 1 3 MB 4210-02 %"NPTFSid(2); % Botlom(5) 7 t 5 Manifolds *(OptionsT & P Only) Part No. Poding No.of Ports "xx" Subplates .

JXCx-OMT0061CN

->/P.12 3. ->/P.19 5. ->/P.32 10.1 ->/P.12 3. PLC 5 (PLC) 15ms30ms ->/P.55 12.4 () () (LED() ->/P.13 3.2 ) ->/P.47 11. ->/P.47 11. ->/P.47 11. ->/P.12 3. (CN1: EMG ->/P.12 3. ) 92 - 22. 10.

Speed Controller with

Metric Size Applicable tube Tube size 4 6 8 10 12 23 04 06 08 10 12 Applicable series 3.2 TMH-23J TMH-04J TMH-06J AS1002F AS2002F AS2052F AS3002F AS4002F TMH-06 TMH-07 TMH-08 TMH-10 TMH-12 TMH-13 Holder for speed controller Note) The applicable TMH for AS1002F-02 is not available.

HEC-OM-S008

31 32 35 30 30 03 3F 38 0D Answer 25.0 deg.C. 31 Temperature setting (without writing FRAM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

(mm) Elbow type TMH 6 8 10 12 Tube swivels 360 AS121F-M5-W2 M5 ASD Application to inch size tubing Metric size 6, 8, 10, 12 AS221F-01-W2 R1/8 AS221F-02-W2 R1/4 AS AS321F-02-W2 R1/4 Maximum operating pressure 1 MPa max.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

1/4, 1/8 port (A port) 25 12 12 G: Approx. 300 H: Approx. 600 (Lead wire length) 48.5 70.7 [72.9] A 18 20 27 34 R P Manual override 2-4.5 (For mounting) 40 4 (Light/surge voltage suppressor) M5 x 0.8 (SYJ714R: X port) + 58 [65] 54.5 42.6 26 20 X 1/4, 1/8 (P, R port) 23 15 48 L plug connector (L): SYJ74-LM plug connector (M): SYJ74-M01 02 01 02 DIN terminal (D): SYJ74-D01 02 M8 connector

Hand Valve Series VH 1

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust

Hand Valve Series VH

3 (R) 4 3 3 (Exhaust center) VH301-02, 03 VH311-02, 03 Rc1/4: 17(0.9) Exhaust center 2 (Position) VH302-02, 03 VH312-02, 03 2 1 (A) 2 (B) 4 VH3 1/4, 3/8 0.71 3 (Closed center) VH320-02, 03 VH330-02, 03 Rc3/8: 20(1.1) 1 (P) 3 (R) 3 (Exhaust center) VH321-02, 03 VH331-02, 03 2 (Position) VH322-02, 03 VH332-02, 03 12 3 4 3 (Closed center) VH400-02 to 06 VH410-02 to 06 Rc1/4: 45(2.5) 4 3 3 (Exhaust

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

AN200 to 900 1 Model 0.5 A B D Dimensions (mm) Model Port size R Weight (g) Recommended flow (m3/min (ANR)) 3 or less 5 or less 8 or less 12 or less 20 or less 30 or less 50 or less 80 or less Effective area (mm2) 35 60 90 160 270 440 590 960 2 0.2 Inlet pressure (MPa) Noise level (dB) (A) 0.1 1 4 AN200-02 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233

Smooth Cylinder/Low Speed Cylinder

80 M10 x 1.5 depth 22 37 3 40 25 40 22 Up to 300 110 60 71 16 10 M26 x 1.5 41 100 37 3 M12 x 1.75 depth 22 40 30 50 26 (mm) GB Rc, NPT port GB G port Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 S TB TA ZZ GA 12 P 1/8 GA 12 P M5 x 0.8 11 12 12 77 11 114 Up to 200 11 12 12 77 11 119 12 1/8 12 M5 x 0.8 Up to 300 11 12 10 79 11 121 12 1/8 10 1/8 Up to 300 12 13 10 87 12 139 13

Booster Regulator/Air Tank

SRH VBA20A-03 VBA20A-F03 VBA10A-02 VBA10A-F02 VBA11A-02 VBA11A-F02 G27-20-01 AN20-02 ANA1-02 KT-VBA10A-18 VBA40A-04 VBA40A-F04 VBA22A-03 VBA22A-F03 VBA42A-04 VBA42A-F04 VBA43A-04 VBA43A-F04 Model Description Pressure gauge Silencer High-noise reduction silencer Elbow for silencer SRP G N S L G36-10-01 AN30-03 ANA1-03 KT-VBA22A-7 AN30-03 ANA1-03 G36-10-01 AN40-04 ANA1-04 G27-20-01 AN40-

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

I J 25.3 37 26 5 14 8 12.5 15.5 Up to 350 18 13 12 2 12 12 35 M4 x 0.7 depth 7 20 40 31 28.3 10 12.5 6 16.5 19.5 Up to 400 22 17 14 2 12 12 40 M5 x 0.8 depth 7.5 25 38 43 12 6 31.3 12 19.5 20 Up to 450 22 17 18 2 12 12 40 M5 x 0.8 depth 8 32 47 8 38.3 52.5 15 27 26 16 Up to 800 30 19 25 2 13 13 50 M6 x 1 depth 12 40 44.5 58.5 58 11 32 20 16.5 32 Up to 1200 35 27 30 2 14 14 58 M8 x 1.25 depth



L Dimension L1 = 31n + 25, L2 = 31n + 12 n: Station n 10 9 8 7 6 5 4 2 3 Symbol L1 335 304 273 242 211 180 149 87 118 L2 322 291 260 229 198 167 136 74 105 14-6-12 13 Manifold: VVEX2---02 Applicable valve: VEX1230 3 Valve mounting side Pilot port Pilot port F.R.L.

Speed Controller with One-touch Fittings

AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11

VQC

Stations 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 1 2 3 4 Description/Model A B Single PEB EA A B Double P EA EB A B Valves Options Closed center EAPEB A B Exhaust center P EA EB A B Pressure center EB P EA A B Perfect EB P EA Blanking plate VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-1-02/03 Individual EXH spacer VVQ4000-P-1-02/03 Throttle valve spacer VVQ4000-20A-1 Perfect