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Shield 12 13 7 6 9 8 3 B-4 A-4 B-5 A-5 B-6 A-6 Brown Black Red Black Orange Black Vcc GND A A B B Connector B terminal no.

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

LEC-OM07605CN

b . A b . A b . A 1 2 3 1 b012 Ab. 0 1 b b . A b .

RZQ

stroke of 25 mm or less RZQ MI W S B A CEP1 CE1 CE2 [mm] Proper Mounting Position D-A7H,A80H D-A73C,A80C D-F7,J79,J79W D-F7V,J79C D-F7W,F7WV D-F7BAL,F7BAVL D-F79F ML2B D-M9 D-M9V D-F9W D-F9WV D-A79W D-A9 D-A9V C J G5-S D-A7,A80 D-F9BAL D-P5DWL Bore size (mm) CV B A B A B A B A B A B A B A MVGQ 32 27 37.5 27.5 38 24.5 35 26 36.5 30 40.5 29 39.5 40 CC 27 39 31 43 31.5 43.5 28.5 40.5 30 42

3 Position Cylinder Series RZQ

stroke 50 or larger bore size D-P5DW 40, 50, 63 B + First-stage stroke =U =U Mounted on different side in case of a full stroke of 25 mm or less B A [mm] Proper mounting position D-A7H,A80H D-A73C,A80C D-F7,J79,J79W D-F7V,J79C D-F7W,F7WV D-F7BAL,F7BAVL D-F79F D-F9 D-F9V D-F9W D-F9WV D-A79W D-F7LF D-A9 D-A9V D-F9BAL D-P5DWL D-A7,A80 Bore size (mm) A B A B A B A B A B A B A B A B 32 29 39.5

C95

A B A B A B A B A B A B MB1 32 0 10.5 1.5 14 9.5 22 4.5 17 2 14.5 0 10.5 1 13.5 40 0 21.5 1.5 25 9.5 33 4.5 28 2 25.5 0 21.5 1 24.5 CA2 50 0 23 2 26.5 10 34.5 5 29.5 2.5 27 0 23 1.5 26 63 0 28 2 31.5 10 39.5 5 34.5 2.5 32 0 28 1.5 31 CS1 80 2.5 28 6 21.5 14 29.5 9 24.5 6.5 22 2.5 28 5.5 31 100 2.5 28 6 31.5 14 39.5 9 34.5 6.5 32 2.2 28 5.5 31 C76 C85 Auto Switch Mounting Height C95 D-F5,

Sine Rodless Cylinder Series REBR Direct Mount Type

-LD Piping port P Operating direction A 7 Piping port P Operating direction B W K G With switch rail Q + Stroke Z + Stroke Piping port P (plug) Operating direction B HS CR HR Plug 22 8 Piping port P Operating direction B Piping port P (plug) Operating direction B 8 Piping port P Operating direction A 16 19.5 16 Plug REBR15 REBR15 (mm) A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15

KR

button Body O-ring Seal Stud Port B Port B Port B Port B Seal Guide Chuck Guide Chuck Collet Collet Port A Release button Port A 15-3-6 2 FR One-touch Fittings Manifold Series KRM Dimensions: KRM11 2-FB Applicable tubing O.D.

AC Servo Motor Driver (Pulse input type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Size: 1/8, Reverse Flow Function: Backflow Mechanism, Thread: G, Port Size: 1/4, Accessory 1: -, Accessory 2: -, Option 1: -, Option 2: -, Option 3: -

Compact Electric Actuator Series LG1

Description Body cover Bearing cap Damper End cover A End cover B Photomicrosensor Sensor plate Connector A Connector B No.

CP95

auto switch CP95KD B 32 100 W S Z76 With auto switch Number of auto switches Auto switch Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

CP95

Piston rod deflection reduced Deflection of the piston rod has been reduced by increasing the precision of the bushing and piston rod, and reducing the tolerances. 6-13-2 6-13-3 3 ISO/VDMA Cylinder: Standard Type Double Acting with End of Stroke Cushioning Series CP95 32, 40, 50, 63, 80, 100 How to Order CP95S B 32 100 W Without auto switch CP95SD B 32 100 W S Z76 With auto switch Courtesy

Profile Design ISO/VDMA Air Cylinder Series CP95

e Order No. b d f l1 c a 32 M10x1.25 GKM10-20 10 40 10 52 20 20 40 M12x1.25 GKM12-24 12 48 12 62 24 24 50/63 M16x1.5 GKM16-32 16 64 16 83 32 32 80/100 M20x1.5 GKM20-40 20 80 20 105 40 40 Rod end nut (standard equipment) 30 d D C H B Bore size (mm) Order No.

Pressure Range: ISE79S (0 to 50 MPa), Piping: F02 (G 1/4, ISO 1179-1 Compliant), Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m), Bracket: B (Bracket B)

Pressure Range: ISE70 (0 to 1 MPa), Piping: F02 (G 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: None, Bracket: B (Bracket B)

Pressure Range: ISE70 (0 to 1 MPa), Piping: F02 (G 1/4), Output Specification: AB (Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: None, Bracket: B (Bracket B)

Pressure Range: ISE76G (0 to 5 MPa), Piping: F02 (G 1/4, ISO 1179-1 Compliant), Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: None, Bracket: B (Bracket B), Operation Manual/Calibration Certificate: K (Operation Manual + Calibration Certificate)

Pressure Range: ISE76G (0 to 5 MPa), Piping: F02 (G 1/4, ISO 1179-1 Compliant), Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: None, Bracket: B (Bracket B)

Number of Ports: 3 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 30 (Push Button, Mushroom), Suffix: B (Black), Bracket: B (w/Bracket)