Body Size: 40, Back Flow: w/o Backflow, Thread: Rc, Port Size: 1/4, Options: B+G, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Metal Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Non-relieving, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa, Made to Order: -

Regulator Unit Combination: Filter Regulator, Port Size: Rc3/8, Filter Rating: 5μm, Compressed Air Quality: -, Maximum Operating Pressure(MPa): 1, Case Material: [Metal] Metal, Case Guard: Presence, Exhaust Structure: Non-relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug), Size of Body: 40,

Regulator Unit Combination: Filter Regulator, Port Size: Rc3/8, Filter Rating: 5μm, Compressed Air Quality: -, Maximum Operating Pressure(MPa): 1, Case Material: [Metal] Metal, Case Guard: Presence, Exhaust Structure: Non-relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug), Size of Body: 40,

Regulator Unit Combination: Filter Regulator, Port Size: Rc3/8, Filter Rating: 5μm, Compressed Air Quality: -, Maximum Operating Pressure(MPa): 1, Case Material: [Metal] Metal, Case Guard: Presence, Exhaust Structure: Non-relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: [With Standard Pressure Gauge] Round-shaped pressure

Regulator Unit Combination: Filter Regulator, Port Size: Rc1/2, Filter Rating: 5μm, Compressed Air Quality: -, Maximum Operating Pressure(MPa): 1, Case Material: [Metal] Metal, Case Guard: Presence, Exhaust Structure: Non-relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug), Size of Body: 40,

Regulator Unit Combination: Filter Regulator, Port Size: Rc1/2, Filter Rating: 5μm, Compressed Air Quality: -, Maximum Operating Pressure(MPa): 1, Case Material: [Metal] Metal, Case Guard: Presence, Exhaust Structure: Non-relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug), Size of Body: 40,

Regulator Unit Combination: Filter Regulator, Port Size: Rc1/2, Filter Rating: 5μm, Compressed Air Quality: -, Maximum Operating Pressure(MPa): 1, Case Material: [Metal] Metal, Case Guard: Presence, Exhaust Structure: Non-relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: [With Standard Pressure Gauge] Round-shaped pressure

Regulator Unit Combination: Filter Regulator, Port Size: Rc3/4, Filter Rating: 5μm, Compressed Air Quality: -, Maximum Operating Pressure(MPa): 1, Case Material: [Metal] Metal, Case Guard: Presence, Exhaust Structure: Non-relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Auto/Manual] N.C. (Normally Closed) at non-pressurized without drain emissions,

Regulator Unit Combination: Filter Regulator, Port Size: Rc3/4, Filter Rating: 5μm, Compressed Air Quality: -, Maximum Operating Pressure(MPa): 1, Case Material: [Metal] Metal, Case Guard: Presence, Exhaust Structure: Non-relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Auto/Manual] N.C. (Normally Closed) at non-pressurized without drain emissions,

Step Motor (Servo/24 VDC) Electric Actuator/Low Profile Slider Type Basic Type LEMB Series LEMB25, 32

15 m* LER 5 5 m C 20 m* 2N LECP2* Programless type (With stroke study) *1 The standard cable should be used on xed parts.

Body Size: 30, Back Flow: w/o Backflow, Thread: Rc, Port Size: 02 (1/4), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: 2 (Metal Bowl), Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: N (Non-relieving), Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa

Body Size: 20, Back Flow: w/o Backflow, Thread: Rc, Port Size: 02 (1/4), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: 2 (Metal Bowl), Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: N (Non-relieving), Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa

Regulator Unit Combination: Filter Regulator, Port Size: Rc1/4, Filter Rating: 5μm, Compressed Air Quality: -, Maximum Operating Pressure(MPa): 1, Case Material: [Metal] Metal, Case Guard: No, Exhaust Structure: Non-relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug), Size of Body: 20, Check

Regulator Unit Combination: Filter Regulator, Port Size: Rc1/4, Filter Rating: 5μm, Compressed Air Quality: -, Maximum Operating Pressure(MPa): 1, Case Material: [Metal] Metal, Case Guard: Presence, Exhaust Structure: Non-relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug), Size of Body: 30,

7

flow ratio to be b = 0.3.

New

B F G N.C.

Programless controller (with stroke study) Step motor (servo 24 VDC)

A B-1 Brown 2 A A-1 Red 1 Cable length (L) B B-2 Orange 6 B A-2 Yellow 5 1 1.5m COM-A / COM B-3 Green 3 COM-B / A-3 Blue 4 3 3m Shield 5 5m Cable color Terminal no. Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 Actuator cable type A A-5 Black 6 B-1 B B-6 Orange 9 Nil Robotic type cable B A-6 Black 8 A-1 3 S Standard cable signal Terminal no.

3

flow ratio to be b = 0.3.

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

Electric Actuator / Low profile slider type

Nil Without B With lock Nil Without B With lock DIN rail is not included. Order it separately.