5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Cylinder Speed Chart Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1/CS2 Pressure 0.5 MPa Load factor 50% Stroke 1000 mm 20 25 32 40 40 50 63 80 100 125 140 160 Average speed (mm/s) System 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation A 800 700 600 500 400 300

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) MXJ Graph (19) Stroke: Up to 100 stroke Graph (15) Stroke: Up to 100 stroke MXP 20 20 10 10 MXY 3 4 5 3 4 5 40 Mass W (kg) Mass W (kg) MTS 40 2 2 32 32 1 1 25 20 0.5 0.4 0.3 0.5 0.4 0.3 25 20 16 16 0.2 0.2 12 12 0.1 0.1 0 40 60 80 100 120 140 160 180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

, 200, 250, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Intermediate strokes are

Compact Proportional Solenoid Valve Series PVQ

20 0 0 0 20 40 40 80 60 120 80 160 100 200 120 240 140 280 160 320 180 360 200 400 Current (mA) 24 VDC 12 VDC Note 1) Follow the same procedure for selecting PVQ10 series. 2) Flow rate depends on individual differences between valves and piping conditions.

Vacuum Ejector Series ZM

Maximum Ejector Stations ZM053 ZM054 ZM073 ZM074 ZM103 ZM104 ZM133 ZM134 ZM153 ZM154 Ejector model Manifold model R L 10 8 5 4 3 ZZM Stations 10 10 8 6 5 ZZM Stations B Effective area of external silencer is 160 mm2.

Air Cylinder Series MB

160 to 500 to 500 to 600 to 600 to 800 to 800 12 16 16 20 20 25 17 22 22 28 34 40 50 63 75 90 110 132 74 95 107 130 150 182 89 93 105 105 129 129 TDe8 TY TX TZ TT 6 Series MB Trunnion/Double Clevis Pivot Bracket Part No.

LJ1H

40 60 Transfer load m (kg) Refer to page 145 for deflection data. 18 19 Standard Motor/Horizontal Mount Specification Series LJ1H30 Dimensions/LJ1H303PD Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth 10 120 4-M12 x 1.75 thread depth 15 20 80 12.5 16.5 Cable entry side LJ1 LG1 LC1 LX LC6D/LC6C Switches Work piece mounting reference plane 8H10 depth 8 Body mounting reference plane 212 160

ISO Standard Hydraulic Cylinder

Auto switch models Bore size (mm) 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F5BA/F59F/F5NT D-A5/A6/A59W D-Z7/Z80 BMB5-032 BA7-040 BA7-080 BA7-080 BS5-160 BT-16 BT-03 BT-04 BT-08 BT-08 BT-16 BS4-160 BMB4-050 BA4-080 BA4-080 BS4-160 Note 1) D-M9 cannot be mounted to 100. Note 2) D-A5/A6/A59W/Z7/Z80 cannot be mounted to 32.

High Vacuum Angle Valve

For 100/120C 1 XL Series High Vacuum Angle Valve Aluminum High Vacuum Angle Valve XL-2 Series New Variations Type Series Valve type Shaft seal type Application Flange size 16 25 40 50 63 80 100 160 XLA-2 Single acting (N.C.) Bellows seal Dust free, P.3 cleaned Single acting (N.C.)

MTS

120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 25 20 0.1 0.1 100 120 140 160 180 200 0 40 60 80 100 120 140 160 180 200 0 40 60 80 20 20 Overhang L (mm) Overhang

SL5200

Surface finish Ra max 10 in. (0.25 m) Standard 7 in. (0.18 m) 5 in. (0.13 m) Code 0 M V X Specification Standard Sub-atmospheric Code V3 L 1 H 2 4 10 40 -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7

SX

(n) (2) (1) stations (Light/Surge voltage suppressor) Connector polarity indication Applicable connector: 26 pins MIL (Conforming to MIL-C-83503) SS5X3-20N Connector polarity indication n: Stations (n1 + n2) Stations n 4 72.5 64.5 5 85 77 6 97.5 89.5 7 110 102 8 122.5 114.5 9 135 127 10 147.5 139.5 11 160 152 12 172.5 164.5 L1 L2 1-6-51 52 SX5000: SS5X5-20PStations 2-One-touch fittings (

VFS

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 900 Perpendicular, upward actuation Horizontal

Cylinder with Lock Double Acting, Single Rod Series CNS ø125, ø140, ø160 How to Order CNS L 100 125 D 100 M9BW D L 125 CDNS With auto switch With auto switch Number of auto switches (Built-in magnet) Nil 2 pcs. Mounting style S 1 pc. Basic style B Tubin

Locking direction Bore size Made to Order Refer to page 761 for details. 125 140 160 125 mm 140 mm 160 mm D Both directions With rod boot/cushion J K Nil N R H Nylon tarpaulin Heat resistant tarpaulin With double-side cushion Without cushion With rod cushion With head cushion Thread type Nil TN TF Built-in Magnet Cylinder Model If a built-in magnet cylinder without an auto switch is required

VEX1

Condition: Pressure 0.5MPa, Load 50%, Piping length 5m Effective area mm 2(Cv ) Cylinder speed (mm/s) 50 63 80 100 125 140 Bore size (mm) 160 180 200 250 300 Port size Rc(PT) 40 250 25(1.4) VEX312 -01, 02 500 750 02 ( 1 4) 60(3.3) 250 500 750 250 500 750 500 750 1000 500 750 1000 250 500 750 250 500 750 VEX332 -02, 03, 04 Body ported Base mounted 03 (3 8) 160(8.9) VEX350 -04, 06, 10 06 (3

4/5 Port Air Operated Valve Series SYJA3000

.: 6, 1/4" 8, 5/16" 55.5 [62.5] + + + + + 40.1 23.5 60 (4.9) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (WO) 141.8 [146.2] Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 160 55.5 [62.5] 89 Pg7 81.5 40.1 70.2 (Lead wire length) Approx. 300 M8 x 1 66.6 [73.6] 3.3 98.6 88.6 [90.8] 3.3 78.8 [81] 3.3 3.3 80.3 122.2 [126.6] 161.8 127.2 [131.6]

c

Recommended radius Refraction value 10 7 20 15 20 15 35 20 35 20 60 40 95 60 100 65 100 65 130 110 160 130 220 160 400 290 Min. bending radius (mm) Note 4) 260oC Max. operating temperature Material PFA (Tetrafluoroethylene perfluoroalkoxy vinyl ether copolymer) How to measure the Note 1) Fluid varies depending on the applicable fittings.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CS1/CS2 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation A 800 700 600 500 400 300 200 100 0

Air Cylinder/Standard Type: Lube, Non-lube Type, Air-hydro Type Series CS1 Lube, Non-lube Type: Air-hydro Type:

Air Cylinder/Standard Type: Lube, Non-lube Type, Air-hydro Type Series CS1 Lube, Non-lube Type: 125, 140, 160, 180 200, 250, 300 Air-hydro Type: 125, 140, 160 Replacement Procedure is P.287 Construction Lube #1 @7 @3 @5#0@8@4 @9 @6 @6 200: More than 998st When the target class 2 pressure vessel #1 @7 @3 @5#0@8@4 @9 @6 Non-lube @6 @6 200: More than 998st When the target class 2 pressure vessel

VEX1

Model Connection Effective area Model Connection R Max. air flow Effective area mm2 R mm2 l/min AMC310 300 3 8 AN110 35 1 8 16 55 165 330 550 AN200 35 1 4 AMC510 1,000 3 4 AMC610 AMC810 AMC910 AN300 60 3 8 3,000 1 1 6,000 10,000 AN400 90 1 2 1 2 2 AN500 160 3 4 AN600 270 1 1 1 99.9% of oil mist removal. Over 35 dB noise reduction.