15

Motor Mounting: In-line Motor Mounting Diagram Motor type: NZ, NY, NX, NW, NV, NU, NT, NM2 Motor type: NZ, NY, NW, NU, NT [Included parts] Hexagon socket head cap screw/MM (Tightening torque: TT [Nm]) Motor [Provided by user] Motor flange PD Motor side hub Motor flange Motor mounting screw Motor Mounting dimension: FP Motor mounting screw [Provided by user] [Included parts] Motor side hub

High Vacuum Angle Valve

Stainless steel 432 Made to Order XLF Series How to Order Valve 100 XLFR M9N A 1K X Flange type Symbol Nil KF(NW) K(DN) D Temperature specifications Symbol Nil 5 to 60C 5 to 150C H0 Seal material Symbol Nil FKM EPDM Barrel Perfluoro Type Seal material 1349-80 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Compound No.

Modular F.R.L. Units

Example) AF30-03B-2R-A-X430 X430 Low temperature X440 High temperature Symbol Description Nq Body size 20 30 40 50 60 Symbol Description Nq Body size 30 40 50 60 Nil Rc N*1 NPT F*2 G + Nw Pipe thread type Nil Rc N*1 NPT F*2 G + Nw Pipe thread type 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Ne Port size Nr Option (Mounting) Nil Without mounting

XM, XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Principle materials Body: SCS13 (Conforms to Stainless steel SUS304) Bellows: Stainless steel SUS316L Bellows holder: Stainless steel SUS304.

2

Example) AC30D-F03DM-SV-1NR-A r t y w Nq Body size 20 30 40 Symbol Description Nw Pipe thread type Nil Rc V V V N NPT V V V F G V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V + Ne Port size Nil Without auto drain V V V C Note 2) N.C. (Normally closed) Drain port is closed when pressure is not applied. V V V D Note 3) N.O.

Aluminum High Vacuum Angle Valve

Stainless steel 432 Made to Order XLF Series How to Order Valve 100 XLFR M9N A 1K X Flange type Symbol Nil KF(NW) K(DN) D Temperature specifications Symbol Nil 5 to 60C 5 to 150C H0 Seal material Symbol Nil FKM EPDM Barrel Perfluoro Type Seal material 1349-80 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Compound No.

High Vacuum Angle Valve, XL Series

Valve closed 40 50 63 80 Auto switch type Nil Without auto switch (without built-in magnet) F9N Solid state auto switches F9P D-F9N D-F9P Flange type F9B D-F9B Symbol Type Applicable flange size Nil D KF(NW) K(DN) 16, 25, 40, 50, 63, 80 63, 80 Note 1) The standard lead wire length is 0.5m. For 3m, "L" is added at the end of the part number.

XL

Valve closed 40 50 63 80 Auto switch type Nil Without auto switch (without built-in magnet) F9N Solid state auto switches F9P D-F9N D-F9P Flange type F9B D-F9B Symbol Type Applicable flange size Nil D KF(NW) K(DN) 16, 25, 40, 50, 63, 80 63, 80 Note 1) The standard lead wire length is 0.5m. For 3m, "L" is added at the end of the part number.

High Vacuum Angle Valve

air (Bellows balance) 2 Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW

Magnet: D (Built-in), Series: A2 (Standard), Mounting: D (Double Clevis), Tube Material: Aluminum, Bore Size: 63mm, Port Thread: Rc, Stroke: 200mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: A93V--Reed, DC Volt, AC Volt, LED, Vertical

Magnet: Built-in Magnet, Mounting: Clevis, Type: Air Cushion, Bore: 50mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 350mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: A93V--Reed, DC Volt, AC Volt, LED, Vertical, Lead Wire or Prewire

Tube) Inner Diameter(φ): 63, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches: A93V

Tube) Inner Diameter(φ): 63, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches: A93V

Magnet: D (Built-in Magnet), Mounting: D (Clevis), Type: A (Air Cushion), Bore: 50mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 350mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: A93V--Reed, DC Volt, AC Volt, LED, Vertical

MY1

O-ring) Y 2 x 4 A B 6.0 C 3.5 CH 25 G 13.5 GA 8.5 GB 16.2 H 52 HH 27.7 J K 10 L 110 LD 3.6 LH 38 LL 35 LW 84 M 6.0 MM N 20 NC 14 NE 49.5 NH 16.5 Bore size (mm) 16 20 090 M5 x 0.8 M4 x 0.7 110 7.5 4.5 26 12.5 12.5 20.0 58 33.7 M6 x 1 12 130 4.8 39 45 88 7.5 M5 x 0.8 25 17 55.5 21.7 NW PA PB PG PP Q QQ QW RR SS TT UU VV W WW YW Z XX Bore size (mm) 16 20 07.5 11.5 56 60 40 50 94 100 3.5 4.5

AR20-B to AR60-B

Example) AR30-03BG-NR-B-X425 Symbol Description Nq Body size 25 30 40 50 60 Symbol Description Nq Body size 20 25 30 40 50 60 Nw Pipe thread type Nil Rc N NPT F G + Nw Pipe thread type Nil Rc N NPT F G + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Nil Without mounting option B*2 With bracket a Mounting Option *1 H With set nut (for

Cylinder (Tube) Inner Diameter(φ): 125, Stroke(mm): 400, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: -, Valves: -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: NPT, Auto

Magnet: Built-in Magnet, Mounting: Clevis, Type: Rubber Bumper, Bore: 25mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 400mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 400, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches: M9BA, Lead Wire