This is a legacy product, and replaced byMGPM80TN-100Z-M9NWL MGP COMPACT GUIDE CYLINDER. CYL, COMPACT GUIDE, SLIDE BRG. ACTUATOR. 80MM MGP SLIDE BEARING. 25.98304 lb. RM.

This is a legacy product, and replaced byCG1GN20-100Z CG/CG3 ROUND BODY CYLINDER. CYL, AIR, DBL ACTING. ACTUATOR. 20MM CG DOUBLE-ACTING. .74906 lb. HD.

This is a legacy product, and replaced byCDM2BZ20TN-100Z-M9PSAPC CM2/CM3 ROUND BODY CYLINDER. CYL, RND BODY, DBL ACTING. ACTUATOR. 20MM CM2 DBL-ACT AUTO-SW. .00000 lb. HE.

This is a legacy product, and replaced byMGPM63-100Z MGP COMPACT GUIDE CYLINDER. CYL, COMPACT GUIDE, SLIDE BRG. ACTUATOR. 63MM MGP SLIDE BEARING. 14.06145 lb. PM.

This is a legacy product, and replaced byMGPL63TF-100Z MGP COMPACT GUIDE CYLINDER. CYL, COMPACT GUIDE, BALL BRG. ACTUATOR. 63MM MGP BALL BEARING. 13.13586 lb. PB.

This is a legacy product, and replaced byCJ2KB16-100Z CJ2 ROUND BODY CYLINDER. CYL, DBL ACT, NON ROT. ACTUATOR. 16MM CJ2 NON-ROTATING. .31118 lb. GK.

This is a legacy product, and replaced byCDJ2D16-100Z-C73Z-B-XC3BB CJ2 ROUND BODY CYLINDER. 16MM CJ2 DBL-ACT AUTO-SW. ACTUATOR. 16MM CJ2 DBL-ACT AUTO-SW. 0.51068 lb. GE.

This is a legacy product, and replaced byCDM2B20-100Z CM2/CM3 ROUND BODY CYLINDER. CYL, RND BODY, DBL ACTING. ACTUATOR. 20MM CM2 DBL-ACT AUTO-SW. .52353 lb. HE.

This is a legacy product, and replaced byCDG1UA32-100Z-C73 CG/CG3 ROUND BODY CYLINDER. CYL, AIR, DBL ACT, AUTO-SW. ACTUATOR. 32MM CG DBL-ACT AUTO-SW. 1.28077 lb. LE.

This is a legacy product, and replaced byCG1BN40-100Z CG/CG3 ROUND BODY CYLINDER. CYL, AIR. ACTUATOR. 40MM CG DOUBLE-ACTING. 1.64149 lb. MD.

This is a legacy product, and replaced byMGPM25TN-100Z MGP COMPACT GUIDE CYLINDER . 25MM MGP SLIDE BEARING . ACTUATOR . 25MM MGP SLIDE BEARING . 4.21082 lb. IM .

This is a legacy product, and replaced byCDM2RB40-100Z CM2/CM3 ROUND BODY CYLINDER. CYL, RND BODY, DIRECT MT.. ACTUATOR. 40MM CM2 OTHERS (COMBO). 1.96211 lb. MC.

15

Motor Mounting: In-line Motor Mounting Diagram Motor type: NZ, NY, NX, NW, NV, NU, NT, NM2 Motor type: NZ, NY, NW, NU, NT [Included parts] Hexagon socket head cap screw/MM (Tightening torque: TT [Nm]) Motor [Provided by user] Motor flange PD Motor side hub Motor flange Motor mounting screw Motor Mounting dimension: FP Motor mounting screw [Provided by user] [Included parts] Motor side hub

High Vacuum Angle Valve

Stainless steel 432 Made to Order XLF Series How to Order Valve 100 XLFR M9N A 1K X Flange type Symbol Nil KF(NW) K(DN) D Temperature specifications Symbol Nil 5 to 60C 5 to 150C H0 Seal material Symbol Nil FKM EPDM Barrel Perfluoro Type Seal material 1349-80 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Compound No.

Table of Contents

MY1B16/20 Stroke (LL) L PA 2 x 2-B counterbore depth C LD through-hole 4-MM depth M YW QW NW PB PG Q + Stroke Floating bracket mounting thread (2-JJ thread depth from bottom of counter bore KK) PC 1 LW M5 x 0.8 (Port) 2-T counterbore depth E M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

Modular F.R.L. Units

Example) AF30-03B-2R-A-X430 X430 Low temperature X440 High temperature Symbol Description Nq Body size 20 30 40 50 60 Symbol Description Nq Body size 30 40 50 60 Nil Rc N*1 NPT F*2 G + Nw Pipe thread type Nil Rc N*1 NPT F*2 G + Nw Pipe thread type 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Ne Port size Nr Option (Mounting) Nil Without mounting

XM, XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Principle materials Body: SCS13 (Conforms to Stainless steel SUS304) Bellows: Stainless steel SUS316L Bellows holder: Stainless steel SUS304.

2

Example) AC30D-F03DM-SV-1NR-A r t y w Nq Body size 20 30 40 Symbol Description Nw Pipe thread type Nil Rc V V V N NPT V V V F G V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V + Ne Port size Nil Without auto drain V V V C Note 2) N.C. (Normally closed) Drain port is closed when pressure is not applied. V V V D Note 3) N.O.

Aluminum High Vacuum Angle Valve

Stainless steel 432 Made to Order XLF Series How to Order Valve 100 XLFR M9N A 1K X Flange type Symbol Nil KF(NW) K(DN) D Temperature specifications Symbol Nil 5 to 60C 5 to 150C H0 Seal material Symbol Nil FKM EPDM Barrel Perfluoro Type Seal material 1349-80 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Compound No.