Booster Regulator/Air Tank

Description q O-ring 1 1 (VBA1A) 1 1 (VBA2A) w Hexagon socket head taper screwed plug (For drain port) 1 1 1 e Hexagon socket head cap screw 4 4 (VBA1A) 4 4 (VBA2A) r Anchor bolt/nut 4 Keep the manufacturers certificate of compliance in a safe place. 1030-1 A Air Tank VBAT Series Dimensions VBAT05AN1-E-X105/VBAT05A1-E-X105 VBAT05SN1-E-X105/VBAT05S1-E-X105 Connected to VBA10A, 11A Tank IN

Compact Cylinder Series NCQ8

16") 150 (1-1/2") 200 (2") 250 (2-1/2") 0.34 0.20 4-E 4-E 0.34 0.25 0.50 0.25 0.50 0.34 0.53 0.34 0.66 0.41 B Through screw clearance hole / NC(D)Q8N(Z) (Inch) Symbol Bore E 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") 0.20 0.25 0.25 0.34 0.34 0.41 12

53

: 200/400 VAC Note 5) q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: 20C, r Load: Same as the cooling capacity, t Circulating fluid flow rate: Rated flow, y Power supply: 200/400 VAC, u Piping length: Shortest Note 6) With the pressure control mode by inverter.

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

2 Phase Stepper Motor/Without Motor Brake Series LXS

200/230VAC Note) Refer to pages starting with 205 for driver dimensions.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Stroke range (mm) Bore size (mm) AC AB AA N F M E L AP D K AE C J A AD B I G H AF 25 25 100 66 200 180 60 140 135 200 15 13.5 50 30 117 170 228 65 63 20 depth 14.5 M16 x 2 depth 28 M12 x 1.75 depth 24 75, 100, 125 150, 200 250, 300 27 30 115 76 234 214 230 15 70 170 13.5 160 55 30 138 200 262 75 80 20 depth 14.5 M16 x 2 depth 28 M12 x 1.75 depth 24 30 32 125 80 274 245 80 210 190 280 17.5

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

1 e !4 !3 w !0 !

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

R port P, E port D: Push-turn locking slotted type Port size Electrical entry Nil: Without sub-plate 24, 12, 6, 5, 3 VDC M8 connector 24, 12, 6, 5, 3 VDC 100, 110, 200, 220 VAC Grommet L plug connector M plug connector 24, 12 VDC 100, 110, 200, 220 VAC DIN terminal G: Lead wire length 300 mm L: With lead wire (Length 300 mm) D, Y: With connector WO: Without connector cable MN: Without lead

C95

6ui e!5 !

MVGQ

Electrical entry P/E port R port 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC AC specifications (50/60 Hz) Grommet L plug connector M plug connector 100 VAC 200 VAC 1 2 3 4 110 VAC [115 VAC] 220 VAC [230 VAC] MN: Without lead wire G: Lead wire length: 300 mm L: With lead wire (Wire length: 300 mm) M: With lead wire (Wire length: 300 mm) 200 VAC, 220 VAC specifications An AC specification

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

ISA2

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

Series AK1000

Code psig/bar unit MPa unit No code 0 V3 1 2 10 40 No gauge port e e 4PL 5PC No pressure gauge (Connections: 1/4 inch NPT) Sample Order Number Port -30 in.Hg to 30 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.7 MPa 0 to 1.5 MPa 0 to 7 MPa 0 to 28 MPa AK1410TS e q 6 6 6 6 w 6 6 6 6 r t qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet

Best Pneumatics Vol. 14

option E).

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

800 800 Mey L5 [mm] L5 [mm] L5 [mm] 600 600 600 m Wall L5 Y 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 35 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Port size Sub-plate, 40, 41, 42, 43 manifold Nil: Without sub-plate D: Push-turn locking slotted type (With gasket and screws) 01: 1/8 with sub-plate Electrical entry 24, 12 VDC, 6, 5, 3 VDC 24, 12, 6, 5, 3 VDC / 100, 110, 200, 220 VAC 24, 12 VDC, 100, 110, 200, 220 VAC Grommet L plug connector M plug connector DIN terminal E: Push-turn locking lever type M8 connector MN: Without lead wire