SYJ3000/5000/7000

Component Parts Replacement Parts No. u i Description Description Sub-plate Pilot valve No. q w e r t y Note Aluminum die-casted Part no.

NCA1

2 4-NT WF G J TN Depth ND E XT SN + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A ZB + Stroke Bore size (in) MM KK NT TN WF XT Y LF P SN ZB A AA B BA C D DD E E/2 EA EE G J ND R 150 (1.5") 5/8 7/16-20 1/4-20 5/8 1 1 15/16 1.71 3 5/8 2 1/4 4 3/4 3/4 2.02

I

A N D R E S I S TA N C E L O A D H O W T O O R D E R P R E S S U R E S W I T C H GS40 GS40-01 W I R I N G E X A M P L E S U S E D W I T H A S E Q U E N C E C O N T R O L L E R (COM T E R M I N A L I S V E) Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !

IDG

pressure dew point (C) P1 = 0.5 MPa 10 10 P1 = 0.5 MPa P1 = 0.7 MPa 20 20 P1 = 0.7 MPa 30 30 40 40 50 0 400 800 1200 1600 50 0 200 400 600 800 1000 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Compact

1 1 2N q w e r t y u i o !

V

THREE-PORT VALVES FIVE-PORT VALVES D I R E C T A C T I N G VT S E R I E S (S E E V A LV E S E C T I O N) V A C U U M V E R S I O N SY B O D Y P A R T E D (S E E V A LV E S E C T I O N) H O W T O O R D E R VT S E R I E S H O W T O O R D E R SY S E R I E S VT3 V Refer to series VT307/327 P O R T W AY SY 20 X20 S I Z E 07 17 25 S I Z E E N T E R A S S TA N D A R D P A R T F O R E X T E R N

JXCx-OMU0004

P.50 6 * 8 e PLC PLC 9.

CNA

MLGC Q T H1 AL A H S + Stroke ZZ + Stroke CNG N K F M M BN W V MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C B CNA CNS With rod boot CLS CLQ e MLGP 8 f l RLQ ZZ + l + Stroke h + l MLU ML1C DBore size (mm) Stroke range (mm) A AL B B1 BN BP BQ C D E F GA GB

ZR

Manual override Ejector exhaust Electrical entry Rated voltage Pilot valve Components Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum switch unit 20 ZR1 S 1 5 M Z E C K1 Ejector unit Supply valve self-holding Vacuum switch unit 5 M Z E C K2 1 20 L ZR1 Supply

SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) e r t q e r t q V100 (A) (A) SY 2 2 SYJ u u VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 (R) 1 (P) 3 (R) 1 (P) w w VT VP y y VG Component Parts Replacement Parts VP Note Zinc die-casted Part no.

Prevents Micro-Bubbles

SMC A B E L J B 2-P 2-F K Body material: PFA N G A D L K 4-M Non-locking type Locking type 60 C (H1) (H2) A B SMC E J B 2-P (mm) Dimensions A B C D E F G H1 H2 J K L M N P Model Body material LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 Stainless steel 36 47 81 13 19 110.5 112.5 37 26 37 Rc 1/4, 3/8, NPT

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

CNG

to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 Up to 300 301 to 800 20 to 300 301 to 800 Without rod boot With rod boot Bore size (mm) 20 25 32 40 K KA MM NA PG PH PL S FD FT FX FY FZ XA XB P I J l ZZ H e f h ZZ 26 35 178 (186) 30 22 55 198 (206) 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 (149) 5.5 6 52 25 65 3 12 M4 x 0.7 0.25 x Stroke 31

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Hard anodized Chromated Hard chrome plated Black painted No. q w e r t y u i o !

MHF2

x 0.8 2-M6 x 1 thread depth 6 56 MHT Mounting thread E 13 MHY 25 30 41 25 MHW MRHQ 2-5.2 through (Mounting hole) 0 -0.1 32 E Misc.

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 25 100 B 2 S A1 S2 w e r t u y i o !0 !

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

C D 4-O MX MTS T MY Q CY 2-P S U W E B K L MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DAA AB I AP A R X Y + Stroke Z + Stroke -X J V 20Data 8-AF AC AD AE 100 piston rod end connection Stroke range (mm) Bore size (mm) AF AE AD AC AB AA G F N E M D L C K

VQ7-6/7-8

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

VM

Body Contacts 1 ab Microswitch Spring Cap e POM Piston 5-7-10 68 Series VR3200/3201 Dimensions VR3200 VR3201 SA VA SA VA Ridges min. 4 VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR VH Terminal with solder VHS 3-M4 x 5.5 terminal thread (With cup washer) Detail

KJ

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !