VM

. 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle Valve P . 5-7-3 Shuttle Valve with One-touch Fitting P . 5-7-5 AND Valve with One-touch Fitting P . 5-7-7 Time Delay Valve P . 5-7

F

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture

Prevents Micro-Bubbles

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com PB B A B A Double acting N.C. Double acting VX3 With indicator PA N.C. B A VXA N.C. Single type Suck back P P P VN A B A B Unit Single type Unit LVC Manifold (5 stations max.) LVA LVH A R P 3 port N.C. PA LVD N.C.

3 Port Air Operated Valve Series SYJA300 1

800) 258-9200-www.stevenengineering.com 3(R) NC 1(P) Switch mark (Mounting hole) 2-5.2 (R port) Rc 1/4, 3/8 47 41.6 69 68 29.5 28.5 22.5 13.5 (P port) Rc 1/4, 3/8 Rc 1/4, 3/8 A B Base mounted: VPA544V(A port) 13.5 91.4 57 47 13.5 (PA port) Rc 1/8 NO 2(A) 32 42 52 PA 3(R) NC 1(P) Switch mark Rc 1/4, 3/8 47 2-5.2 (Mounting hole) (R port) 41.6 69 68 29.5 28.5 22.5 13.5 Rc 1/4, 3/8 (P port) 5

NCA1

588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E LF + Stroke Bore size (in) MM KK A AA B BA C D DD E EA EE G J R WF Y LF P ZB 150 (1.5") 5/8 7/16-20 3/4 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 1.43 1 1.71 3 5/8 2.36 4 3/4 2.02 200 (2") 5/8 7/16-20 3/4 1 1/8 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 1.84 1 1.71 3 5/8 2.4 4 3/4 2.6 250 (2.5") 5/8 7/16-20

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

VZS

Body type Rc 1 8 Plug-in type VVZS3000-P-01-1 Non plug-in type VVZS3000-P-01-2 Rc 1 4 VVZS3000-P-02-1 VVZS3000-P-02-2 Body type Plug-in type AXT625-12A Non plug-in type Part no. Part no. Body type Plug-in type VVZS3000-22A-1 Non plug-in type VVZS3000-22A-2 Part no.

Vacuum System Peripherals:

) 258-9200-www.stevenengineering.com 0.1 (inHg) Fluid Fluid that will not corrode stainless steel 630 and 304 Power supply voltage 12 to 24 VDC, Ripple (p-p) 10% or less Current consumption 55 mA or less (With no load) For details, refer to Best Pneumatics Vol. 16.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

l h + l ZZ + l + 2 stroke With rod boot at both ends l l + Stroke h + l + Stroke S + Stroke h + l ZZ + 2 (l + Stroke) Stroke range (mm) Up to 350 Up to 400 Up to 450 Up to 800 Up to 1200 Up to 1200 Up to 1400 Up to 1500 Bore size (mm) I J GA F AL C D E H1 S A B1 K KA MM NA P 15.5 19.5 19.5 27 32 32 37 37 14 16.5 20 26 32 38 50 60 8 10 12 16 20 20 25 30 5 6 6 8 11 11 13 16 26 31 38 47

MG

kinds of bearing (Slide bearing, Ball bushing bearing) CY P . 8-20-2 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com : Common stroke for MGQ and MGP : For MGP CX DSeries MGG Bore size (mm) Standard stroke (mm) Basic cylinder with integrated guide rods Long stroke

I

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard

LEF-OM002xx

/See 3.3.Step data setting on p.23 3.4.Parameter setting on P .29 /Refer to the LEC controller operation manual. Input the RESET signal. 45 - No.

CNA

MLGC Taper ring Steel ball CNG P q MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com f CNA R R CNS CLS CLQ MLGP RLQ MLU ML1C Manual override for unlocking DEven if the air supply is blocked or exhausted, lock release is possible.

MNB

: (800) 258-9200-www.stevenengineering.com 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 1000 1000 100 100 CLQ 500 400 300 500 400 300 80 80 63 63 100 100 MLGP 200 200 50 50 40 40 80 80 100 100 RLQ 63 63 50 50 Load weight: m (kg) Load weight: m (kg) 32 32 50

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

KR

P. 3 KRL KRT KRU P. 4 P. 4 Use to branch line from female thread in both 90 directions. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 45 male elbow Union tee Branch Use to pipe in 45 angle direction from female thread.

VQ5000

94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bottom ported drawing VQZ 16 M5 ground screw VQD SMC 4(A), 2(B) port 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 Rc 1/8 PE port Rc 1/8 External pilot port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3 position double check: VQ5650 1-G H 2 position double: VQ5250 1-G H 3 position

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 200, 250, 300 63 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 MGGL Ball bushing bearing CX 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300

CNG

CL CL1 MLGC P 0.3 MPa Lock unit part no.