Large Flow Air Filter AF800/900 Series

D-R Note 3) Options for 2, 6, and 8 can not be specified at the same time. (Ex.) 68 Note 4) Symbols 9, D, J can not be specified at the same time. (Ex.) 9-D-J Note 5) For products with auto drain, either symbol D or J cannot be specified at the same time. 1 Indicate the required filtration rate after the symbol 1. Ex.)

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

30 37 47.3 d M6 x 1.0 M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 Part no.

HRL

(N.O. type/N.C. type can be changed.) 3 Do not connect wiring. 1 14 25 13 D-sub 25-pin female (socket) type 8 HRL Series Dual Channel Refrigerated Thermo-chiller for Lasers Communication Functions Serial Communication The following operations can be performed by the serial communication RS-232C/RS-485.

energy saving effect

equipped as standard.) sPage 177 sPage 180 With fluid fill port 156 A Thermo-chiller Inverter Type HRSH Series Circulating Fluid Temperature Controller Circuit diagram HRSHl-W-l (Water-cooled refrigeration) HRSHl-A-l (Air-cooled refrigeration) HRS Ventilation DC inverter fan HRS 090 Water regulating valve Air release valve for facility water discharge HRS 100/150 WPR Facility water outlet D

HRS100/150

-phase 200 VAC 3-phase 400 VAC [mm] [mm] 93 Environmental friendly R410A as refrigerant Thermo-chiller Standard Type HRS100/150 Series Circulating Fluid Temperature Controller Fan Triple controller Air-cooled condenser fan control Cooling valve Heating valve Circuit diagram Ventilation Cooling valve control Fan Facility water outlet Dryer Air-cooled condenser D

53

Inverter pump Triple inverter HRZD HRW 0.6 kW 1.8 kW Water-cooled refrigeration Air-cooled refrigeration HECR 377 [mm] 970 HEC 2.4 kW HEB Triple inverter HRSH090 HED *1 Under the conditions shown on page 128 HEA Cooling capacity 9.5 kW IDH 1080 0.1C Temperature stability (when a load is stable) Set temperature range 5C to 40C W 377 x H 1080 x D 970 mm Compact, Space-saving Low-noise design

Electric Actuators

Two mounting styles Table traveling accuracy C D Bottom mount Top mount Model Traveling accuracy C side against A side D side against B side LG1H 0.1 or less 0.1 or less A B Variations Mounting orientation Lead screw type Motor type Guide type Motor/Screw connection Series Standard motor [Tamagawa Seiki Co., Ltd.]

IDX-OM-W035

E F C (35.4[900]) J M N P L K H 4x0..5 (0.4[9~11mm] [4x13] [IDFB22E-11*(L=2800)] Unitinch [mm] A B C D E F G H J K L M N P 30.5 23.6 IDFB22E 1 [775] [600] 3.3 11.4 24.5 5.3 15.9 27.5 3.7 1.8 1 0.5 12.4 13.4 [290] [623] [134] [405] [698] [93] [46] [25] [13] [314] [85] [340] 26.8 33.7 IDFB37E 1/2 [855] [680] R IDFB55E/75E Q A B H G E D F C (0.4 (39.4[1000]) J L K M N P 4x0..5 [4x13]

Thermo-chiller

Series HRS100/150 CAT.NAS40-62B R410A as refrigerant Thermo-chiller Standard Type Series HRS100/150 Circulating Fluid Temperature Controller Triple controller Fan Air-cooled condenser fan control Cooling valve Heating valve Circuit diagram Ventilation Cooling valve control Fan Facility water outlet Temperature sensor (Heat exchanger inlet) Water-cooled condenser Dryer Air-cooled condenser D

Model Selection 1

Main sealing Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Main sealing D side sealing A side sealing A seal is formed when the tubing is inserted, with its insert bushing, and its compression against the internal nut.

NAIV

Suite D Poway, CA 92064 TEL: (858) 679-190s FAX: (858) 679-1904 ARGENTINA SMC Argentina S.A. CHILE SMC Pneumatics (Chite) Ltda.

Magnet: D (Built-in), Mounting: B (Standard), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 200mm, Thread: Rc, Stroke: 300mm

Magnet: D (Built-in), Mounting: B (Standard), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 200mm, Thread: Rc, Stroke: 500mm

Magnet: D (Built-in), Mounting: B (Standard), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 200mm, Thread: Rc, Stroke: 200mm

Magnet: D (Built-in), Mounting: B (Standard), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 200mm, Thread: Rc, Stroke: 600mm

Magnet: D (Built-in), Mounting: B (Standard), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 200mm, Thread: Rc, Stroke: 100mm

Magnet: D (Built-in), Mounting: B (Standard), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 200mm, Thread: Rc, Stroke: 250mm

Magnet: D (Built-in), Mounting: B (Standard), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 200mm, Thread: Rc, Stroke: 400mm

Magnet: D (Built-in), Mounting: B (Standard), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 200mm, Thread: Rc, Stroke: 150mm

Magnet: D (Built-in), Mounting: B (Standard), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 200mm, Thread: Rc, Stroke: 350mm