Magnet: D (Built-in Magnet), Mounting: L (Foot), Bore: 32mm, Thread: Rc, Stroke: 300mm, Rod Boot: None, Cushion: Air Cushion, Accessory 1: No Bracket, Accessory 2: No Bracket, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal

Magnet: D (Built-in Magnet), Mounting: D (Clevis), Type: N (Rubber Bumper), Bore: 40mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 300mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal

Magnet: D (Built-in Magnet), Mounting: B (Basic), Type: A (Air Cushion), Bore: 25mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 300mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal

Magnet: Built-in, Series: Standard, Mounting: Double Clevis, Tube Material: Aluminum, Bore Size: 63mm, Port Thread: Rc, Stroke: 300mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: Pivot Bracket, Rod End Bracket: None, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -, Auto Switch: -

Magnet: D (Built-in), Series: A2 (Standard), Mounting: D (Double Clevis), Tube Material: Aluminum, Bore Size: 63mm, Port Thread: Rc, Stroke: 300mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket), Rod End Bracket: None, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal

: M screw, Adjuster Option: Dual-end damper bolts (resin tip), Switch Rail: Yes, Specification: Magnet built-in, Auto Switches: M9B, Lead Wire Length(m): 0.5, Lead Wire Connector: -, The number of the switches: 2, Custom-made Specifications: 0.18 to 0.7, Custom-made: Tapped hole on mounting surface specification

1

e q w e SY No.

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Table of Contents

9@0 w!0!1 e !

Aluminum High Vacuum Angle Valve

Maintenance Parts XM XY w Bonnet Assembly Part No. i Bypass Valve Part No.

Table of Contents

0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load weight & pressure Inclined operation (For vertical operation, refer to page 8-15-74.)

Free Mount Cylinder

Note 4) Figures in ( ) in the table W are D-A93.

ISO Cylinder

W Double knuckle joint V (1 pc.) V (1 pc.) Standard Mounting Bracket/Accessory Part Nos.

Table of Contents

W.

Table of Contents

4 @1 w @4 !0 y !3 !5 @3 !0 !

Rotary Actuator/Vane Type

D77 Free Mount Type Rotary Actuator With Angle Adjuster/Vane Type CRBU2WU Series Size: 10, 15, 20, 30, 40 RoHS How to Order CRBU2 S 20 180 U Z W With auto switch CDRBU2 S 20 180 L U Z M9B W q w e r t y u i o !

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Smooth Cylinder/Low Speed Cylinder

0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 REA Foot: L Rod flange: Head flange: 0.3 301 267 330 F G L, F 0.5 231 207 253 REB W W W 0.7 193 172 212 REC 0.3 144 126 156 CY CY G 0.5 109 94 118 0.7 90 78 97 CX Foot: L Rod flange: Head flange: 0.3 433 386 476 F G MQ L, F 0.5 334 297 367 W W W RHC 0.7 281 250 309 0.3 210 185 229 RZQ G 0.5 160 141 175 0.7 134 117 129 D-X 1231 Series CS2Y Construction

NCQ8

M2 bolt circle M1 W I dia.

Air Cylinder

CBM2-20-PS-W CBM2-25-PS-W CBM2-32-PS-W CBM2-40-PS-W 11 Lock spring Stainless steel 12 Bumper Urethane * Seal kit includes @6 and @7. Order the seal kit, based on each bore size. (Except #3.) * Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.