Table of Contents

9@0 w!0!1 e !

Aluminum High Vacuum Angle Valve

Maintenance Parts XM XY w Bonnet Assembly Part No. i Bypass Valve Part No.

Table of Contents

0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load weight & pressure Inclined operation (For vertical operation, refer to page 8-15-74.)

Free Mount Cylinder

Note 4) Figures in ( ) in the table W are D-A93.

SMC has redesigned the CQ2 compact cylinder with a new body, making it possible to mount auto switches on any of the 4 surfaces, depending on the installation conditions. Auto switch mounting grooves have replaced the CQ2s mounting rails, preventing projection of auto switches and improving ease and safety of work.Double acting, single rod, compact cylinder, Bore sizes *: 12, 16, 20, 25

ISO Cylinder

W Double knuckle joint V (1 pc.) V (1 pc.) Standard Mounting Bracket/Accessory Part Nos.

Table of Contents

W.

Table of Contents

4 @1 w @4 !0 y !3 !5 @3 !0 !

Rotary Actuator/Vane Type

D77 Free Mount Type Rotary Actuator With Angle Adjuster/Vane Type CRBU2WU Series Size: 10, 15, 20, 30, 40 RoHS How to Order CRBU2 S 20 180 U Z W With auto switch CDRBU2 S 20 180 L U Z M9B W q w e r t y u i o !

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Smooth Cylinder/Low Speed Cylinder

0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 REA Foot: L Rod flange: Head flange: 0.3 301 267 330 F G L, F 0.5 231 207 253 REB W W W 0.7 193 172 212 REC 0.3 144 126 156 CY CY G 0.5 109 94 118 0.7 90 78 97 CX Foot: L Rod flange: Head flange: 0.3 433 386 476 F G MQ L, F 0.5 334 297 367 W W W RHC 0.7 281 250 309 0.3 210 185 229 RZQ G 0.5 160 141 175 0.7 134 117 129 D-X 1231 Series CS2Y Construction

NCQ8

M2 bolt circle M1 W I dia.

Electric Actuator/Slider Type

How to Order q w e r t y u i o !

5

96 83 106 0.5 71 61 76 W W 0.7 59 50 62 0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 Foot: L Rod flange: F Head flange: G L, F 0.3 301 267 330 0.5 231 207 253 W W W 0.7 193 172 212 0.3 144 126 156 G 0.5 109 94 118 0.7 90 78 97 Foot: L Rod flange: F Head flange: G L, F 0.3 433 386 476 0.5 334 297 367 W W W 0.7 281 250 309 0.3 210 185 229 G 0.5 160 141 175 0.7 134 117 129 D-X 215 CS2Y Series

Auto Switch Guide

RZQ Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL MI W S CEP1 CE1 Auto Switch Mounting Bracket Part No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

15

Series Variations Series Size Page 25 32 40 63 Slider Type Ball Screw Drive LEFS Series 784 100 W 200 W 400 W Slider Type Belt Drive LEFB Series 805 100 W 200 W 400 W High Rigidity Slider Type Ball Screw Drive LEJS Series 824 100 W 200 W Rod Type LEY Series 848 100 W 200 W 400 W Guide Rod Type LEYG Series 864 100 W 200 W The values in shows the equivalent motor capacity. 780 LE Series Compatible

Air Cylinder

Contents 20 CBG1N20-PS Set of the nos. @5, @6, @7, @8 and grease pack 20 CBG1N20-PS-W Set of the nos. @5, @6, @7, @8 and grease pack CBG1lN Rubber bumper type CBG1lN Rubber bumper type 25 CBG1N25-PS 32 CBG1N32-PS 40 CBG1N40-PS 25 CBG1N25-PS-W 32 CBG1N32-PS-W 40 CBG1N40-PS-W Order seal kit in accordance with the bore size. * The seal kit includes a grease pack (10 g).

2–4

D-M9 D-F9BAL D-F9 W 12 A B W 16, 20, 25 W A B 32, 40, 50 (mm) D-A9 D-M9 D-F9 W Auto switch model D-F9BAL Mounting height Hs exists only for the D-F9BAL type.

Integrated Controller

/s2 3000 mm/s2 4 Work load: W [kg] Work load: W [kg] 3 2 5000 mm/s2 1 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1400 1200 0 Speed: V [mm/s] 200 400 600 800 1000 1200 EQFS40HA/Ball Screw Drive Horizontal/Lead 20 Vertical/Lead 20 70 5 4.5 4 3.5 3 2.5 2 1.5 1 0.5 0 3000 mm/s2 60 Work load: W [kg] Work load: W [kg] 50 40 3000 mm/s2 30 5000 mm/s2 20 10 10 mm/s2 0 0 Speed: V [mm/s] 200