Integrated Controller

)[88]4 13 (86) 86 (175.8) 88[(90)]4 Communication cable connector (M12) Origin end3 [Opposite end]4 Opposite end [Origin end]4 2[(4)]4 (90) Parallel I/O connector (M12) 61 (4)[2]4 27.8 20.1 68 8 31 Power supply connector (M12) 39.3 22 Auto switch groove (1 row per side) M4 x 0.7 thread depth 8 (F.G. terminal) 8 53.8 68 Motor option: With lock (220.8) (16) D x 150 (=E) B + Stroke 15 60 150

C95

(variations as much as 30%) There may be large changes depending on the ambient environment. + Minimum length [mm] with bracket T Auto Switch 32 40 50 63 80 100 D-Z7/Z8, D-Y5/Y7 (W) D-Y6/Y7 (W) V D-Y7BA 80 85 90 90 95 100 60 55 85 90 65 90 70 100 75 105 85 110 Mounting and Movement of Auto Switches Caution!

Shock Absorbers and Rate Controls

.90 23.6 lbs.

High Vacuum Angle Valve, XL Series

At 10-7 to 10-9Torr, 90% or more is moisture, at 10-12Torr or below, 98% or more is hydrogen. The other main residual gases have mass numbers of 28 and 35.

XL

At 10-7 to 10-9Torr, 90% or more is moisture, at 10-12Torr or below, 98% or more is hydrogen. The other main residual gases have mass numbers of 28 and 35.

Micro Mechanical Valve Series VM1000

Key can be removed at the on and off positions. 90 External pilot type VFM251 type With foot bracket VFM250-02--F 2 x 4.5 mounting hole (External pilot port) M5 x 0.8 2341 Series VM Made to Order 1 Please contact SMC for detailed specifications, dimensions and delivery.

Aluminum High Vacuum Angle Valve

0 o 83 0.2 2-1 112 q 114 90 O-ring Part No.

Modular F.R.L. Units

209.1 41.2 45 110 45 70 66 35 11 13 90 3.2 47 220.1 228.6 209.1 222.6 229.1 246.2 AL60-A 1 95 223.1 44.7 47.5 110 47.5 70 66 35 11 13 90 3.2 47 234.1 242.6 223.1 236.6 243.1 256.6 88 Semi-standard Specifications: 1000 cm3 Tank Lubricator AL30 to AL60 Symbol Available for previous models (AL30 to 60).

Modular F.R.L. Unit

90 J 5.4 6.5 8.5 8.5 11 11 H 22 23 26 25 35 35 G 27 40 54 54 66 66 E 47 47 R 35 60 80 110 110 110 110 F 30 41 50 50 70 70 P 28 57 73 73 D 25 40 53 70 70 90 95 C 26 36 38 40 38 41 45 A B 77 115 142 176 176 250 268 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification Metal bowl B 82 121 142 176 176 250

2 Phase Stepper Motor/Without Motor Brake Series LXP

(mm) D E Model LXPBAB50S--X LXPBAB75S--X LXPBAB-100S--X LXPBAB-125S--X LXPBAB-150S--X LXPBAB-175S--X LXPBAB-200S--X 44 52 120 90 Note) The overall length of an actuator is Stroke + 124 (141) + Motor dimension.

Best Pneumatics Vol. 14

245 258 A 25 40 53 70 75 90 95 M 2.3 2.3 2.3 2.3 3.2 3.2 L 40 53 70 70 90 90 K 8.4 8 10.5 10.5 13 13 J 5.4 6.5 8.5 8.5 11 11 H 22 23 26 25 35 35 G 27 40 54 54 66 66 F 30 41 50 50 70 70 E 18 16 17 14 23 23 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 Optional specifications Model With barb fitting B 137 173 177 253 266 Metal bowl B

Vacuum Unit

Exhaust Characteristics Flow Rate Characteristics 150 100 100 Vacuum pressure [kPa] 80 Suction flow (Port exhaust) 135 90 60 Air consumption 120 80 40 Vacuum pressure 70 105 Port exhaust 20 Vacuum pressure [kPa] Silencer exhaust/Complex exhaust 0 0 20 40 60 80 100 60 90 Suction flow [L/min (ANR)] 50 75 Flow Rate Characteristics 60 40 100 Suction flow (High-noise reduction silencer exhaust

Modular F.R.L. Unit

90 C 26 36 38 40 38 41 45 K 8.4 8 10.5 10.5 13 13 A B 77 115 142 176 176 250 268 D 25 40 53 70 70 90 95 J 5.4 6.5 8.5 8.5 11 11 H 22 23 26 25 35 35 E 47 47 P 28 57 73 73 G 27 40 54 54 66 66 F 30 41 50 50 70 70 R 50 80 95 120 120 120 120 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 25 40 53 70 75 90 95 Optional specifications With drain

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

With auto switch P411030-5 CRB1LW63 CDRB1LW63 2-12 56 90 83 39 Nut & washer Bolt & washer 8-9.5 75.5 110 39 83 60 5 30 30 90 44 44 52 100

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

Rotation Speed Range Model: 10, 15, 20O.O3 0.3 sec,/90' Model 300.04-0.3 sc,/90' lf a rotation soeed is used slower than 0.3sec/90", sticking may occur.

IDX-OM-Y002

IDF60/70/80/90 Series 9.1 Safety instructions for use 9-1 IDX-OM-Y002 Chapter 9 Option M 9.2 Specifications Motor type auto drain (ADM200) is installed instead of the float type auto drain (standard). Table 1.

NCRBIBwserbs

Rotation Speed Range Model: 10, 15, 20O.O3 0.3 sec,/90' Model 300.04-0.3 sc,/90' lf a rotation soeed is used slower than 0.3sec/90", sticking may occur.

CLA

With 1 switch 10 75 80 90 Wrth 1 switCh 10 75 80 90 0-8586 OGSKS Different 35 75 80 90 With 2 surface sWitches Same Surface 35 75 80 90 Av ro SWitch ~'B5 '86 D-GSoK5 '" " .J ~ ~ D-A4 Different SS.. 3O(n-2} 75+JO90+50(n-2) ""F ttl surface

7

Special electrical entry direction With bracket/Special electrical entry direction VXD2 to VXD2 3 A 6 D VXD2 to VXD2 3 A 6 D VXD2 to VXD2 7 E 9 G 90 Symbol Symbol Standard 180 90 180 90 90 A IN OUT Nil B IN OUT OUT IN IN OUT 180 180 180 180 270 90 270 90 B IN OUT IN OUT A C IN OUT IN OUT 270 270 270 270 1 Available for the VXD23 A to 26 D. 2 Bracket is attached as standard with the resin

Auto Switch Guide

CS1 Auto Switch Internal Circuit C76 D-90 C85 OUT () Weight OUT () Brown Contact protection box CD-P11 CD-P12 Reed switch C95 (g) CP95 OUT ( ) D-90 D-97 Auto switch model OUT ( ) Blue Black line 5 5 0.5 NCM Lead wire length (m) 23 23 3 D-97 37 37 5 Contact protection box CD-P12 NCA Choke coil OUT (+) Brown DDimensions OUT (+) Reed switch Zener diode Zener diode -X D-90 OUT () OUT () Blue