CC

100, 200, 300, 400, 500, 600 200, 300, 400, 500, 600, 700, 800 Specifications Operating pressure 0 to 0.7MPa Proof pressure 1.05MPa Ambient and fluid temperature 5 to 50C Fluid Turbine oil (40 to 100cSt) Converter standard effective oil level stroke/effective volume (cm3) Nominal size (mm) Limited flow* (l/min) Standard effective oil level stroke (mm) 100 200 300 400 500 600 700 800 50 63

VFS

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ A VF 0 VFR 800 700 600 500 400 300 200 100

Series LC7R Dedicated Regenerative Absorption Unit

Applicable Controller Power Supply Voltage 100VAC Specification Series LJ1H10 Series LJ1H20 LJ1H1021H-K (8mm lead) LJ1H2021F-K (5mm lead) 250 400 225 350 12kg 6kg 200 300 175 250 Speed (mm/s) Speed (mm/s) 150 8kg 13kg 125 200 10kg 100 150 14kg 75 100 15kg 50 50 25 0 100 200 Stroke (mm) 300 400 0 100 200 300 400 500 600 Stroke (mm) When an actuator is operated under conditions that exceed

Electric Actuator Triple Axis P&P Unit

the weight of the work piece and the body. 2) Values in parentheses are those for side mount specification. 100 200 300 400 500 600 700 800 Stroke (mm) 900 1000 1100 1200 1300 1400 1500 Weight of body without motor (kg) 650 Stroke(mm) X axis 100 13.6 150 200 15.7 250 300 17.8 350 400 19.9 450 500 22.0 550 600 24.1 1500 43.0 Stroke(mm) X axis 700 26.2 750 800 28.3 850 900 30.4 950

Uniaxial Electric Actuator Series LJ1

400 400 L2 mm L2 mm L2 mm Rolling Yawing W 200 200 200 L2 M2 0 10 20 30 0 20 40 60 0 2 4 6 8 10 Work load (W) kg Work load (W) kg Work load (W) kg W 3000 2000 2000 a=1000 a=1000 a=1000 2000 L3 mm L3 mm L3 mm L3 1000 1000 1000 a=2000 a=2000 W a=2000 a=3000 a=3000 a=3000 M3 a 0 20 40 60 0 2 4 6 8 10 0 10 20 30 Work load (W) kg Work load (W) kg Work load (W) kg 600 600 600 400 400 400 Pitching

Table of Contents

Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 9 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Data 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Bore size (mm) 25 20 32 40 Intermediate strokes and strokes shorter than 75mm are also available.

5

, 450, 500 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 1000 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350

Ionizer

Workpiece electric charge voltage Workpiece electric polarity LED + OK +400 V or higher Positive Light ON +100 V to +400 V Flash at 4 Hz +30 V to +100 V Static neutralization completion Light OFF Within 30 V 30 V to 100 V 100 V to 400 V Negative 400 V or lower ALARM LEDIndicates abnormal states of the ionizer.

Series AK1000

pressure (psig) 0.48 70 0.41 60 45 0.31 0.34 50 0.28 30 0.21 40 0.21 30 0.14 15 0.10 20 0.00 0.07 0 10 0 0.00 0 200 400 600 800 1000 Flow rate (slpm, N2) 0 400 800 1200 1600 2000 Flow rate (slpm, N2) ) If connection size differs, flow characteristics also differ. 55 High flow (Tied-diaphragm) Single Stage Regulator for General Applications Series AK9200 3/4 inch port size Inlet pressure

ML2B

CX 100 10 20 30 4050 100 200 300 Thrust energy E2 400 500 Fs Fs + mgs Fsmgs CY W2 max W1 max W3 max Absorbed energy E E1 + E2 MQQ M Caution Allowable load (N) Symbol : Speed of impact object (m/s) F : Cylinder thrust (N) s : Shock absorber stroke (m) ML2B32 Horizontal collision: P = 0.5 MPa 1.

IR1000/2000/3000

0.3 0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 0 200 400 600 800 1000 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa 6 Series IR1000/2000/3000 Series IR3000 Flow rate characteristics Relief characteristics Pressure characteristics Testing methods conform to JIS B8372.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

500 280 560 Data 10 4 8 7 6 5 MXY12 3 2.0 Shock absorber Rubber stopper screw 2 4 Load weight W kg 1.5 Metal stopper screw 3 1.0 1 100 50 200 300 400 560 2 100 50 200 300 400 500 Average speed Va mm/s Collision speed V mm/s 0.5 Average speed Va mm/s 0.0 Collision speed V mm/s 0 100 200 300 400 500 280 560 Note) Use the average speed when calculating static moment.

Compact Electric Actuator Series LG1

P Ground ball screw Rolled ball screw Sliding screw S N Table 1: Feed Screw and Stroke Combination Correspondence Table Stroke (mm) Model 500 600 700 800 900 1000 1200 100 200 300 400 LG1H212PAStroke Screw combination LG1H212NAStroke LG1H212PCStroke LG1H212NCStroke LG1H212SCStroke Please note that combinations other than those shown above cannot be produced.

Sine Rodless Cylinder Series REBR Direct Mount Type

, 500 750 15 1 axis 200, 300, 400, 500, 600, 800 25 1200 25 200, 300, 400, 500, 600, 800, 1000 2 axes 1500 32 Note 1) Strokes exceeding the standard strokes are available as a special order.

IR1000/2000/3000

pressure P1 (MPa) IR IR2010-02 IR2010-02 IR2010-02 Supply pressure: 0.7 MPa Back pressure: 0.7 MPa 0.7 VEX 0.204 0.4 0.6 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) AMR 0.202 0.5 Set point 0.3 ITV 0.4 0.200 0.2 0.3 IC 0.198 0.2 0.1 VBA 0.1 0.196 VE 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 0 100 200 300 400 500 600 700 800 900 1.0 Flow rate ( /min (ANR))

0.4

Bore size MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

MY1

300 500 400 300 L-unit Air cushion 200 200 Caution 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 1.

ML2B

Bore size (mm) Holding force 25 245 N 32 400 N 40 628 N Note) The holding force is the locks ability to hold a static load that does not involve vibrations or impacts, when it is locked without a load. Therefore, when normally using the cylinder near the upper limit of the holding force, be aware of the points described below.