MVGQ

CC 25, 50, 75, 100 125, 150, 175, 200 M L MVGQ 80/100 RB Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

Cylinder with Lock Series CLS

M16 x 1.5 to 1200 (mm) Bore size (mm) Stroke range (mm) 125 140 160 K KA L N M MM P RR S U W H Z ZZ 15 31 65 19 M30 x 1.5 35 1/2 29 98 35 110 383 412 to 1000 8 15 31 75 19 M30 x 1.5 35 1/2 32 98 40 110 393 425 to 1000 9 17 36 80 22 M36 x 1.5 39 3/4 36 106 45 120 438 474 to 1200 With rod boot (mm) Stroke range (mm) Bore size (mm) 125 140 160 l ZZ1 h Z1 1/5 stroke 30 to 1000 133 406 435 1

0.4

VVQC 000 3A 1 1 VVQC 000 1A 1 D C6 Series Series SV 1 2 1 2 VQC1000 VQC1000 SYJ VQC2000 VQC2000 Note) Tie-rods (2 pcs.) for additional stations included.

Electric Actuator with Integrated Guide

500 to 600 mm strokes 22.5 19 B: Stroke + 75 10 19 Stroke + 95 64 Motor unit2 D section detail (Sensor rail dimensions) Stroke + 169 40 10 Work piece mounting reference plane1 30 5 5.8 3.3 4.9 1 4 15 30 33 E section detail (Switch rail T-slot dimensions) Body mounting reference plane1 17.5 Pitch = 100 60 (n1-1) x pitch 47.5 Section AA n1 100 200 300 400 500 600 n2 1 1 1 1 2 2 Stroke Model

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

Hydraulic Cylinders

across flats E b e g H h + Stroke X with thread depth Y Note) J C B + Stroke Rod end male thread A + Stroke A B C D d E F G H J Y X Bore size (mm) 20 53 43 10 12 11 10 M6 x 1 8 5.5 6.5 12 M6 x 1 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 12 M6 x 1 32 63 51 12 18 15 13 M10 x 1.5 12 7 8.5 16 M8 x 1.25 40 69 55 14 22.4 19 16 M12 x 1.75 15 8 10 20 M10 x 1.5 50 75 60 15 28 24 21 M16 x 2 20 9.5

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Body (1) (1) With (1) With (w/o light) Base mounted 5 Note 1) Applicable to VQZ2000 and 3000.

CG5-S

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 8 8 10 10 12 12 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.

air-filter-e

Main applications Nominal filtration accuracy (m) Material Core material Stainless steel 304 0.5, 1, 5, 10, 20, 50, 75, 100 Cotton 0 to 60 0.5, 1, 5, 10, 20, 50, 75, 100 0.2 MPa 0.1 MPa Polypropylene Polypropylene 0 to 400 Glass fiber Stainless steel 316 1, 5, 10, 20 Note) Size for all is 65 x L250.

Air Preparation Equipment

Main applications Nominal filtration accuracy (m) Material Core material Stainless steel 304 0.5, 1, 5, 10, 20, 50, 75, 100 Cotton 0 to 60 0.5, 1, 5, 10, 20, 50, 75, 100 0.2 MPa 0.1 MPa Polypropylene Polypropylene 0 to 400 Glass fiber Stainless steel 316 1, 5, 10, 20 Note) Size for all is 65 x L250.

SMC Pneumatic Clean Series

, 100, 125, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 20 25 32 40 50 63 80 100 100 Non-lube Double acting, Available double rod 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Suction flow rate of vacuum suction type (Reference values) Specifications Bore size (mm

Compact Cylinder with Solenoid Valve/

, 100 5, 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 Surge voltage suppressor Diode (Non-polar: Varistor) 32 1 Indicator light LED Note) The S and Z types of surge voltage suppressor have an internal circuit allowing voltage drop, so use within the following allowable voltage range.

MXW Series Long Stroke Slide Table

n = 1 + 2 + 3 < 1 Load factors n Note Item Examine W. W max. is maximum movable load at Va. 1 =W/Wmax. (1) Max. movable load Examine Mp,My,and Mr.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

, 200 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied

VFR

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (External pilot port) Manual override (Non-locking) Electrical entry (2.3) 2-5.6 (Mounting hole) Rc 1/8 (PE port) Max. 10 (With direct manual override) (Grommet terminal) 5-Rc 3/8, 1/4 ( ): Rc 1/4 0 1 0 1 0 1 0 1 0 1 0 1 2 position double: VFR321 -E, VFR321 -DZ 0 1 0 1 3 position closed center: VFR331 -E,

SX

1-12.

High Vacuum Angle Valve

Table 1: Suffix Symbol for Seal Material Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Seal material EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for Plasma Compound no. 2101-80*1 70W 4079 SS592 SS630 SSE38 1232-70*1 3310-75*1 *1 Produced by Mitsubishi Cable Industries, Ltd.

CLA

With 1 switch 10 75 80 90 Wrth 1 switCh 10 75 80 90 0-8586 OGSKS Different 35 75 80 90 With 2 surface sWitches Same Surface 35 75 80 90 Av ro SWitch ~'B5 '86 D-GSoK5 '" " .J ~ ~ D-A4 Different SS.. 3O(n-2} 75+JO1'l2) 7S+,5O(n-2) ao. 5O(1l-2} 90+50(n-2) ""F ttl surface

XM, XY

-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)