Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Hz 50 60 50 Closed center 60 0.46 4/2 5/3 (A/B EA/EB) 50 60 { } Exhaust center 50 60 Note) For AC Pressure center With light/surge voltage suppressor Push-turn locking slotted type P. 283 DIN terminal 10-SYJ5000 0.83 4/2 5/3 (A/B EA/EB) Push-turn locking lever type { } (10-SYJ5000, 7000 only) P. 311 10-SYJ7000 M8 connector 2.9 4/2 5/3 (A/B EA/EB) { } P. 342 Note) All AC voltage

CM2

165 401 to 500 181 185 185 190 20 25 32 40 30 32 32 41 36 36 36 46 24 24 24 25 With Rod Boot l ZZ Symbol Z 1 to 50 143 147 149 181 Stroke Bore size (mm) 1 to 50 12.5 12.5 12.5 12.5 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 301 to 400 100 100 100 100 401 to 500 125 125 125 125 1 to 50 63 67 67 71.5 51 to 100 76 80 80 84.5 101 to 150

Table of Contents

Indoor Three phases 200 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Single phase 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Power source 90 130 0.4 0.45 1.44 1.4 50 60 0.4 0.35 55 65 0.8 0.9 38 46 132 x 2 170 x 2 0.23 0.26 50 Hz 60 Hz 50 Hz 60 Hz Power consumption (W) 0.46 0.52 Current (A) Compact size and lightweight

5

V V V V V 63 V V V V V v: Standard 80 V V V V V 100 V V V V V 125 V 140 V D160 V P. 141 P. 155 P. 172 P. 198 P. 212 P. 183 P. 225 P. 233 P. 251 P. 265 P. 285 P. 294 P. 309 -X 137 Smooth/Low Speed Cylinders CQlY/CQlX Series Added compact foot brackets.

Air Cylinder

Grease pack part number: GR-S-010 (10 g) CS2 Basic (B) P Bore size Stroke 20 25 20 CM2B P P (Head side pressure port) (Head side pressure port) P P (Rod side pressure port) (Rod side pressure port) Effective thread length FL Width across flats B2 Width across flats B1 H1 H2 32 to 40 P Width across flats KA E (Head side pressure port) I G G NA D Q MM NN AL N N F K H A P QY NA ZZ + Stroke S

ZP

13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK20-B5 P.50 ZP3B-T2BJ10-B5 P.50 Lateral With Adapter: Vacuum Inlet ZP3-10UM: ZP3-13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK3-B5 P.50 Lateral P.51 ZP3-015U: ZP3-02U: ZP3-035U: ZP3B-Y1J3-B3 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10UM: ZP3-13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK6-B5 P.50

Proposals for Energy Saving

(P .E.)

CY1

First tentative bore size determination 0.1 xW+W D5.0 x P First tentative bore size determination W D1.6 x P W W>WV P>PV Determination of allowable load weight & pressure (Refer to p. 50 for vertical operation.)

Modular Design with Uniform Body Style

Series Body size Details 20 30 40 50 60 AF p. 61 AFM AFD p. 71 AR(K) p. 79 AW(K) p. 98 AL p. 89 2 A Modular F.R.L.

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ1000 Series P.1.10-124 P.1.10-128 P.1.10-132 Plug-in Plug lead VQ2000 Series P.1.10-124 P.1.10-128 P.1.10-132 VQ0 Series P.1.10-170 P.1.10-174 VQ1000 Series P.1.10-170 P.1.10-174 P.742 1.10-114 Manifold Variations T L C S Port size SUP EXH port Cylinder port kit kit kit Lead wire Direct electrical entry style Serial transmission unit Terminal box (Terminal block) SY P, R A, B Enables single-wire

AC

Model Port size A B C D M N P R B B E F G H J K L AL 58 90 117 117 154 164 195 200 205 M5 X 0.8 11 17 25 35 37.5 40.5 48 48 48 70 103.5 140 150 184.5 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25 40 53 53 70 70 90 95 95 29 45 58.5 58.5 77 82 97.5 102.5 102.5 25 30 41 41 50 50 70 70 70 4.5 5.5 7 7 9 9 12 12 12 20 24 35 35 40 40 50 50 50 17.5 22 34.2 34.2 42.2 46.2 55.2 55.2

SYJ300/500/700

N.O. + P. 4-4-37 SYJ300 Push-turn locking slotted type Note) For AC For AC 0.36 2 3 (A R) M5 x 0.8 With light/surge voltage suppressor 100 VAC Hz 110 VAC Hz 200 VAC Hz 220 VAC Hz 50 60 50 60 50 60 50 60 P. 4-4-4 SYJ500 Push-turn locking lever type DIN terminal 1.2 2 3 (A R) 1/8 (SYJ500, 700 only) P. 4-4-18 SYJ700 M8 connector 2.7 2 3 (A R) 1/8, 1/4 P. 4-4-37 Note) All AC voltage

Secondary Batteries

Type 90-VG342 P.9 3 Port Solenoid Valve Direct Operated Poppet Type 90-VT317 P.10 90-VHK Finger Valve P.11 Actuators Air Filters/Pressure Control Equipment Air Cylinder: Standard Type Double Acting, Single Rod 90-CDJ2 P.12 90-AF30 to 90-AF60 90-AFM30/90-AFM40 90-AFD30/90-AFD40 90-AR30/90-AR40 90-AR25K to 90-AR60K 90-AW30K to 90-AW60K 90-IR1000/2000/3000 90-ITV2000 P.48 P.49 P.49 P.50 P.50

CA2

= 2, 4, 6, 8 110 + 50 (n 2) n = 2, 4, 6, 8 Same side 1 10 90 100 110 20 90 100 110 75 90 100 110 Different sides With 2 Same side (n 2) 2 90 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 (n 4) 2 n = 4, 8, 12, 16 20 + 50 n = 2, 4, 6, 8 Different sides D-B59W With n 75 + 50(n 2) n = 2, 3, 4 90 + 50(n 2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50

MGP

MXS 75 to 124 stroke 50 to 74 stroke MXQ 100 100 200 63 P=0.5MPa P=0.5MPa MXF 80 50 40 50 100 MXW 40 Load weight m (kg) Load weight m (kg) 30 40 50 32 MXP 20 30 MG 10 20 MGP 5 4 3 10 MGQ 5 10 100 200 20 30 40 50 1 100 10 200 20 30 40 50 2 3 4 5 MGG Eccentric distance l (mm) Eccentric distance l (mm) MGC Over 75 stroke Over 125 stroke MGF 100 100 63 200 P=0.5MPa P=0.5MPa CY1 80 100 50 Load

0.4

(R1)5 1 (P) 3(R2) Coil voltage CE-Compliant SQ 3-position exhaust center 1 2 Note) 3 4 Note) 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 2(B) (A)4 4 VFS (R1)5 1 (P) 3(R2) 3-position pressure center VFR 2(B) (A)4 5 (R1)5 1 (P) 3(R2) VQ7 Note) 200 and 220 VAC: F/L kit only Note) For sub-plate single unit type, refer to page 417.

V

U B E Applicable Tube OD P Q R S 4 4 23.3 15.8 10.4 H O W T O O R D E R ZPR P A D H O R I Z O N TA L T Y P E 6 6 24.3 16.8 12.8 8 8 26.2 18.7 15.2 W I T H B U F F E R ZPR D I M E N S I O N S PA D D I A M E T E R S 40, 50 P A D D I A M E T E R M O U N T I N G T H R E A D 16 16 20 20 25 25 32 32 40 40 50 50 02 2 04 4 06 6 08 8 10 10 13 13 Symbol Thread Dia 2~8 10~16 40~50 20~32 A8 M8X1 Male

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

0.3 x Wcos + Wsin D 5.0 x P 0.3 x W + W D 5.0 x P 20Data W W > Wv P > Pv Determination of allowable load weight & pressure Inclined operation (For vertical operation, refer to page 8-15-50.)

High Vacuum Angle Valve, XL Series

P.12 to P.15 3 ( Size ) 16, 25, 40 XLFV (With solenoid valve) High speed operation O-ring Seal 2 x 105 to 10-5 10-10 10-10 High volume operation 2 ( Size ) 50, 63, 80 XLG Double acting P.16 to P.19 XLGV (With solenoid valve) XLD Standard Reduces particulates Single acting (N.C.)

Air Cylinder

A AL B1 C CD CX CZ D E F H H1 I J K KA L MM NA Standard Long stroke GA GB P GA GB P 80 Up to 300 301 to 1500 20 16 (20) 3/8 17.5 16 (17.5) 3/8 40 37 32 50 18 28 56 25 40 3 71 13 89 M10 x 1.5 10 22 35 M22 x 1.5 86 100 Up to 300 301 to 1500 20 16 (20) 1/2 17.5 16 (17.5) 1/2 40 37 41 60 22 32 64 30 50 3 71 16 110 M12 x 1.75 10 26 43 M26 x 1.5 106 (mm) (mm) With Air Cushion With Rod Boot (mm