Rubber seal 5 Port Solenoid Valve Series SYJ7000

For sub-plate, manifold type 40, 41, 42 P, E port R port Port size 3:Common exhaust type for main and pilot valve Nil: Without sub-plate D: Push-turn locking slotted type P, E port R port Electrical entry (With gasket and screws) 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC Grommet L plug connector M plug connector 24,12 VDC 100,110, 200, 220 VAC DIN terminal 24, 12, 6, 5, 3 VDC M8 connector

CG5-S

X165US inch rod option dimensional changes R V Integral clevis type (E)/CG5ENS Dim.

VK300

Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light Varistor Varistor Diode Diode Coil Coil Coil Coil S AC Vacuum Spec.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(Values at the initial period) VG VP JIS Symbol (A) 2 S070 VQ Construction 1 (P) 3 (R) VKF q t o r e VQZ y VZ y VS VFN i w 1(P)2(A)3(R) P R Description Component Parts No. q w e r t y u Note Material Aluminum die-casted Aluminum die-casted Aluminum Resin Stainless steel Steel Solenoid coil assembly Sub-plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

LJ1 60 72 A A Motor mounting area B Section BB When mounting a coupling on the motor, mount it within the dimensional range shown on the left. 9.2 Thread P.C.D. 32.5 Coupling Motor 29.5 30 8 Dimensions D C F D E With brake (mm) 101 8.5 26 32 Without brake (mm) 93 17 19 27.5 E F Coupling mounting dimensions Section AA (Housing interior) Series LJ1H S20 Motor mounting area dimensions Mitsubishi

OMR0031

The table e is moved based on the user defined settings. -Necessary settings: Target position, speed, acceleration, deceleration and load mass.

VK300

Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light No.1 No.1 Varistor Varistor S Diode Diode Coil Coil Coil Coil No.2 No.2 (G, GS) (D, DS) AC Vacuum Spec.

Table of Contents

D E ZPY02U 2 4 6 8 Applicable tube O.D.

Table of Contents

EZ VFS1320-E/EZ VFS1420-E/EZ VFS1520-E/EZ Lead wire O.D.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order w y e r t u o !

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L I mberinq syslemr I I Body size a E r\4tG_l E ita.1t4 | E 3ta E : : ; l I (New n (old nu USA USA Euro "oO, .,."

ISO Cylinder

(Screw: Stainless steel) BJ6-010S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-012S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-016S (A set of a, b, c, e) (Screw: Stainless steel) BM5-020S (A set of a, b, c, e) (Screw: Stainless steel) BM5-025S (A set of a, b, c, e) (Screw: Stainless steel) BM5-032S (A set of a, b, c, e) (Screw: Stainless steel) BM5-040S (A set of a, b, c, e

New

G Grommet E NPT Grommet 1E 12 VDC (With surge voltage suppressor) G E G H K L Z 1F NPT 48 VAC 1G 1H 1V 1J Rc 220 VAC 240 VAC E E DIN terminal Special voltage With light Without DIN connector G (With surge voltage suppressor) E E NPT 24 VAC 12 VDC 48 VAC Rc E 1K 1L Note) When the body is resin, one-touch fittings are equipped. 220 VAC 240 VAC Conduit terminal 1M 1W (With surge voltage suppressor

MHZ

Flat finger type 3 E Narrow type is not available for 6, 32 and 40.

MHZ

Flat finger type 3 E Narrow type is not available for 6, 32 and 40.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

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2/3 Port Valve

e, r are for selection of valve composition.

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Series AP500

r e Sample Order Number Port w q w q AP2702S e r FV4 FV4 FV4 FV4 FV4 FV4 FV4 FV4 2PW 3PWQ 4PW 5PWQ MP 4PW 5PWQ 40 40 V3 V3 MPA MPA qIN wOUT eGauge port (Inlet) rGauge port (Outlet) MP=Monitoring gauge port 1) Refer to gauge guide (P.94) for gauge specifications.