IDG

for dehumidification Purge air for dehumidification 7 Drain Drain (Maintenance space 100 mm or more) Drain Discharge With float type auto-drain With drain guide E D With float type auto-drain D With drain guide Model A B C Thread size: 1/4 (Without valve mechanism) N.C.: Gray E 187 170 Applicable tubing O.D.: 10 IDG10V/10HV IDG20V/20HV 275 305 158 188 212 135 Hexagon width across flats 17

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Note 2) Refer to Manifold Option on page 100.

MLGP

2.0 WB Bore size (mm) X YY YL Z st25 st50 50100100 124 M14 x 2.0 24 28 28 35 92 97 128 135 178 185 54 71 M12 x 1.75 42 60 80 100 MLGPL (ball bushing)/Dimensions A, DB, E MLGPM (slide bearing)/Dimensions A, DB, E (mm) (mm) A E A E Bore size (mm) Bore size (mm) DB DB st25 25

MLGP

2.0 WB Bore size (mm) X YY YL Z st25 st50 50100100 124 M14 x 2.0 24 28 28 35 92 97 128 135 178 185 54 71 M12 x 1.75 42 60 80 100 MLGPL (ball bushing)/Dimensions A, DB, E MLGPM (slide bearing)/Dimensions A, DB, E (mm) (mm) A E A E Bore size (mm) Bore size (mm) DB DB st25 25

HRS100/150

HRS HRS 090 HRS 100/150 HRS 100/150 Part no.

0.4

Yes None (Non-polar) Nil E Note) Note) A combination of Function [N] (Negative common) and [E] is unavailable. Since [E] has no polarity, it can also be used as a negative common.

CLS

] 100 100 100 500 400 300 200 100 500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa ) P 0.5 MPa ) P 250 4000 4000 3000 3000 200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum

MXQ

MXQ20-100 MXQ20-100 MXQ20-125 MXQ20-125 MXQ20-150 MXQ20-150 0.06 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-150 MXQ20-150 MXQ20-150 0.08 MXQ20-30 MXQ20-30 MXQ20-30 MXQ20-125 MXQ20-125 MXQ20-125 0.04 0.04 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-10 MXQ20-10 MXQ20-10 0.04 MXQ20-10 MXQ20-10 MXQ20-

Rotary Table/

Positioning pinhole Counter-clockwise 5 Adjustment bolt A 5 (For counter-clockwise rotation end adjustment) 9 22 e B port g .5 n Adjustment bolt B ra (For clockwise rotation end adjustment) nt e e m is st w u k dj c lo a 0 -c e d C 19 s n i er a w lo A port B port e k dj c c nt o l Clockwise C k n e u u w o st ng o is ti C m e ta ra ro e ro ta nt ti o on n ra e d n n ti g e ta 5 9 ro m u

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

2 Different sides Same side 110 110 150 150 -XC15 Change of tie-rod length D-A3 D-G39 D-K39 -XC18 NPT finish piping port 150 + 100 (n 2) n = 2, 4, 6, 8 Different sides 35 + 30 (n 2) 110 + 30 (n 2) n = 2, 4, 6, 8 n Double clevis pin and double knuckle pin made of stainless steel -XC27 150 + 30 (n 2) n = 2, 4, 6, 8 Same side 100 + 100 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 1 15 35 55 110

LEC-OM02904

) (100) L .

Booster Regulator/Air Tank

port 3/8" Tank OUT port 3/8" Inspection port 3/4" (With plug) ARJ VBAT05A(N)1-E-X105 VBAT05S(N)1-E-X105 Safety valve (Supplied with product) AR425 to 935 Booster regulator IN port 1/4" Booster regulator IN port 1/4" Safety valve port 1/4" ARX EXH: 1/4" EXH: 1/4" (370) (370) OUT OUT AMR (307) (307) 257 60 Inspection port 150 148 163 ARM 4 x 11 4 x 11 32 32 3/4" (With plug) ARP 100 100 200

Vacuum

Entry-Mounting 04 o4 Tube o a o 06 s6 Tube a o a o 08 08 Tube a a E E 5 List O Pad Dia.

Vacuum

Entry-Mounting 04 o4 Tube o a o 06 s6 Tube a o a o 08 08 Tube a a E E 5 List O Pad Dia.

JXCx-OMU0004

P.50 6 * 8 e PLC PLC 9.

CNG

CNG 2 2 MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 1 CNA 0.5 100 500 400 300 200 100 0.5 500 400 300 200 1000 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 200 200 CLQ 100 100

MVGQ

DMVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions -X Symbol A E Symbol Bore size (mm) 80 DB E A DB Stroke Bore size (mm) Up to 50 st Over 50 st Up to 50 st Over 50 st 2080 84 143 9.5 25 68.5 93 28 18.5 Data 100 100 89 153 5 30 69 105 36 21 10-16-17 18 Series MVGQ Construction Series MVGQM For 12 to 25: MVGQM12 to 25 Over 50 stroke Courtesy of Steven

MXS

8 w e q !1 !0 !6 CL MLGC r CNA !2 !3 t !

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)