Series VQ Base Mounted Metal Seal/Rubber Seal

Write sequentially from the 1st station on the D side.

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

CLS

model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-F59F D-A59W D-F5NTL Bore size (mm) Bore size (mm) A B A B A B A B Hs Hs Ht Hs Hs Ht 125 125 2 75.5 69.5 74.5 70 116 126 4.5 4.5 9.5 9.5 0 0 2 140 140 2 81 76.5 80 76.5 124 134 4.5 4.5 9.5 9.5 0 0 2 160 160 2 89 87.5 88 87.5 134.5 144.5 4.5 4.5 9.5 9.5 0 0 2 180 180 7.5 97.0

CNS

D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-F59F D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 MLGP D-A59W D-F5NTL RLQ Bore size (mm) Bore size (mm) MLU A B A B A B A B Hs Hs Ht Hs Hs Ht 125 125 0 0 2 2 4.5 4.5 9.5 9.5 116 126 75.5 69.5 74.5 70 ML1C 140 140 0 0 2 2 4.5 4.5 9.5 9.5 124 134 81 76.5 80 76.5 160 160

Modular F.R.L. Unit

Note 2) AW20K to 40K 20 30 40 D Float type auto drain (N.O.)

Basic Type/Direct Mount Type

Note 4) D-Z7 and D-Y types cannot be mounted. 25 to 63 (mm) Auto switch model D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA A B C D D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-A9 D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-A9 Bore size (mm) 25 32 40 50 63 19 23 18 98 94 99 42 38 43 75 79 74 22.5 26.5

Best Pneumatics Vol. 14

Accessory Optional specifications D Float type auto-drain (N.O.)

Modular F.R.L. Unit

Accessory Optional specifications D Float type auto drain (N.O.)

Modular F.R.L. Units

D*7 N.O. (Normally open) Drain port is open when pressure is not applied.

Magnetically Coupled Rodless Cylinder

8 6 D-F9, D-F9W 5 4 D-Z7, Z80 9 9 11 A B D-Y59, Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

G: 300 H: 600 P=17 L2 4.5 L1 VK Manual override 12.5 (Pitch) Depress and turn to operate and lock override.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

8 6 D-F9, D-F9W 5 4 D-Z7, Z80 9 9 11 A B D-Y59, Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

BBA1: D-A5/A6/F5/J5 types *"D-F5BAL" switch is set on the cylinder with the screws above when shipped. When a switch only is shipped, "BBA1" screws are attached.

HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

Table of Contents

D-sub Connector. Series SV D-sub Connector. How to Order . Manifold Electrical Wiring. Dimensions . Series SV1000 for D-sub Connector. Series SV2000 for D-sub Connector. Series SV1000 for D-sub Connector. Series SV2000 for D-sub Connector. Series SV3000 for D-sub Connector. Series SV4000 for D-sub Connector. Flat Ribbon Cable Connector . Series SV Flat Ribbon Cable Connector.

Electric Actuator / Slider Type 《 AC Servo Motor 》

See the table below Belt tension Size Belt N Part number Bolts LEF25 LE-D-6-2 19.6 pull LEF32 LE-D-6-3 49.0 LEF40 LE-D-6-4 98.1 4. "Pulley plate" is installed. Bolts Size Tightening torque (Nm) M3 0.6310% M4 1.510% M5 310% 8.Troubleshooting When a fault occurs during the operation, the corresponding alarm or warning is displayed.

Power Valve: Economy Valve Series VEX5

Cylinder Speed Chart Bore size Series CS1/CS2 Pressure 0.5 MPa, Load factor 50% Cylinder stroke 300 mm Average velocity (mm/s) System 125 140 160 180 200 250 300 1000 Vertically upward movement Horizontal movement 900 800 700 600 500 400 300 200 100 0 A 800 900 1000 700 600 500 400 300 200 100 0 B 900 1000 800 700 600 500 400 300 200 100 0 C 800 900 1000 700 600 500 400 300 200 100 0 D 800

Compact Electric Actuator Series LG1

C plane to A plane D plane to B plane 0.1 or less 0.1 or less Bottom mounting Top mounting Maximum work load (N) Repeatable positioning accuracy (mm) Horizontal Mounting position Stroke (mm) Motor output (W) Typical model Maximum speed (mm/s) Individual models Applicable controller model Feed screw 100 200 300 400 500 600 700 800 9001 0001 200 Ground ball screw lead 10mm Rolled ball screw

SMC Electronic Switch Series Variations

10.2 8 10 17.6 10 5.5 2-3.3 Mounting hole 3.10-4 ZSE2/ISE2 Dimensions/Standard: ZSE201 T1 01 T1 01 T1 Grommet style/ZSE2-15 Connector style/ZSE2-15C Pressure setting Pressure setting Indicator light Indicator light trimmer trimmer 15 Lead wire length 600 15 (3000) H H L L 20 20 Lead wire length 600 Lead wire length 600 Lead wire length 600 (3000) 9.5 39 8.5 39 8.5 3.5 3.5 3.5 Mounting hole